PRESSURE SENSOR MODULE
    52.
    发明申请
    PRESSURE SENSOR MODULE 有权
    压力传感器模块

    公开(公告)号:US20090235753A1

    公开(公告)日:2009-09-24

    申请号:US12473822

    申请日:2009-05-28

    IPC分类号: G01L9/06

    CPC分类号: G01L9/0054

    摘要: A pressure sensor module of the invention includes a pressure sensor and a laminar substrate. Electrodes are arranged in the vicinity of a diaphragm portion of the pressure sensor. In the laminar substrate, a plurality of substrates are laminated, and the laminar substrate incorporates the pressure sensor. One face of the diaphragm portion is exposed by a space portion. According to the invention, it is possible to provide a pressure sensor module which facilitates smaller and thinner sizes, and which enables high-density packaging.

    摘要翻译: 本发明的压力传感器模块包括压力传感器和层状基板。 电极布置在压力传感器的隔膜部分附近。 在层叠基板中层叠多个基板,层叠基板包含压力传感器。 隔膜部分的一个面由空间部分露出。 根据本发明,可以提供一种便于更小和更小尺寸的压力传感器模块,并能实现高密度包装。

    CHEMICALLY AMPLIFIED RESIST COMPOSITION
    53.
    发明申请
    CHEMICALLY AMPLIFIED RESIST COMPOSITION 有权
    化学稳定组分

    公开(公告)号:US20080193874A1

    公开(公告)日:2008-08-14

    申请号:US12021149

    申请日:2008-01-28

    IPC分类号: G03F7/004

    摘要: The present invention provides a chemically amplified resist composition comprising:a resin which comprises a structural unit having an acid-labile group and a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, ring X represents a C3-C30 cyclic hydrocarbon group in which one —CH2— is substituted with —COO—, and at least one hydrogen atom in the C3-C30 cyclic hydrocarbon group may be substituted, and p represents an integer of 1 to 4, and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and at least two salts selected from a salt represented by the formula (II): wherein Y1 and Y2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, A+ represents an organic counter ion and R21 represents a C1-C30 hydrocarbon group which may be substituted and at least one —CH2— in the C1-C30 hydrocarbon group may be substituted with —CO— or —O—, and a salt represented by the formula (III): A′+−O3S—R23   (III) wherein R23 represents a C1-C8 linear or branched chain perfluoroalkyl group and A′+ represents an organic counter ion.

    摘要翻译: 本发明提供一种化学放大抗蚀剂组合物,其包括:树脂,其包含具有酸不稳定基团的结构单元和由式(I)表示的结构单元:其中R 1表示氢原子 或甲基,环X表示其中一个-CH 2 - 被-COO-取代的C 3 -C 30环烃基,和C 3 -C 30环烃基中的至少一个氢原子 可以被取代,p表示1〜4的整数,其本身在碱性水溶液中不溶或难溶,但通过酸的作用而溶于碱性水溶液中,并且选自: 由式(II)表示的盐:其中Y 1和Y 2各自独立地表示氟原子或C 1 -C 6全氟烷基, SUP>表示有机抗衡离子,R 21表示可以被取代的C 1 -C 30烃基, C1-C30烃基中的至少一个-CH 2 - 可以被-CO-或-O-取代,和由式(III)表示的盐:<β在线式 描述=“在线公式”end =“lead”?> A' + - O 3 3 -line-formula description =“In-line Formulas”end =“tail”?>其中R 23表示C1-C8直链或支链全氟烷基,A'+ SUP >表示有机抗衡离子。

    ELECTRIC POWER STEERING SYSTEM
    54.
    发明申请
    ELECTRIC POWER STEERING SYSTEM 审中-公开
    电力转向系统

    公开(公告)号:US20080154462A1

    公开(公告)日:2008-06-26

    申请号:US11960801

    申请日:2007-12-20

    申请人: Satoshi YAMAMOTO

    发明人: Satoshi YAMAMOTO

    IPC分类号: B62D6/00 B62D5/04

    摘要: There is provided an electric power steering system including a motor for imparting a steering assist force to a steering system of a vehicle, a current command value determination unit which determines a current command value based on a steering torque and a vehicle speed, a motor angular velocity detection unit which detects or estimates an angular velocity of the motor, and a drive control unit which controls the motor based on the current command value so determined, the electric power steering system including a protecting function unit which prevents the overheat of the motor or the whole of a control system and a response control unit which decreases the response of a current control when it is judged a holding steering state.

    摘要翻译: 提供一种电动助力转向系统,其包括用于向车辆的转向系统赋予转向辅助力的电动机,电流指令值确定单元,其基于转向转矩和车速确定当前指令值,电动机角度 速度检测单元,其检测或估计电动机的角速度;以及驱动控制单元,其基于所确定的电流指令值来控制电动机,所述电动助力转向系统包括防止电动机过热的保护功能单元, 整个控制系统和响应控制单元,当判断为保持转向状态时,减小当前控制的响应。