Electric gradient force drive and sense mechanism for a micro-electro-mechanical-system gyroscope
    51.
    发明授权
    Electric gradient force drive and sense mechanism for a micro-electro-mechanical-system gyroscope 有权
    用于微机电系统陀螺仪的电梯度力驱动和感测机构

    公开(公告)号:US09404748B2

    公开(公告)日:2016-08-02

    申请号:US13930769

    申请日:2013-06-28

    CPC classification number: G01C19/5755 G01C19/5726 G01P15/125

    Abstract: An apparatus for driving and sensing motion in a gyroscope including a dielectric mass, an anchor, a spring coupled between the anchor and the dielectric mass, a substrate adjacent the dielectric mass, an insulator layer on the substrate, and a first electrode and a second electrode on the insulator layer. When an alternating current voltage is applied between the first and second electrodes, an electric field gradient is generated in the dielectric mass and causes the dielectric mass to move relative to the anchor. When the dielectric mass has motion relative to the anchor and a voltage is applied between the first and second electrodes, the movement of the dielectric mass generates a current at the first and second electrodes proportional to the motion.

    Abstract translation: 一种用于在陀螺仪中驱动和感测运动的装置,包括介电质量块,锚固体,耦合在锚固体和电介质块之间的弹簧,与介电质量块相邻的衬底,衬底上的绝缘体层,以及第一电极和第二电极 绝缘体层上的电极。 当在第一和第二电极之间施加交流电压时,在电介质中产生电场梯度,并使介质质量相对于锚移动。 当介电质量具有相对于锚的运动并且在第一和第二电极之间施加电压时,电介质的运动在第一和第二电极处产生与运动成比例的电流。

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