公开(公告)号：US20060170014A1

公开(公告)日：2006-08-03

申请号：US11393317

申请日：2006-03-30

申请人： Lowell Smith ,  David Mills ,  Jeffrey Fortin ,  Wei-Cheng Tian ,  John Logan

发明人： Lowell Smith ,  David Mills ,  Jeffrey Fortin ,  Wei-Cheng Tian ,  John Logan

IPC分类号： H01L21/00 ,  H01L29/82 ,  H01L27/14

CPC分类号： B06B1/0292

摘要： A capacitive micromachined ultrasound transducer (cMUT) cell is presented. The cMUT cell includes a lower electrode. Furthermore, the cMUT cell includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode, wherein the diaphragm comprises one of a first epitaxial layer or a first polysilicon layer. In addition, a stress reducing material is disposed in the first epitaxial layer.

公开(公告)号：US20050270014A1

公开(公告)日：2005-12-08

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20050270013A1

公开(公告)日：2005-12-08

申请号：US10863442

申请日：2004-06-07

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。