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    MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    2.
    发明申请
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号：US20070040547A1

    公开(公告)日：2007-02-22

    申请号：US11506988

    申请日：2006-08-18

    申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

    发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

    IPC分类号： G01R1/20

    CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

    摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

    MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    4.
    发明申请
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号：US20050270013A1

    公开(公告)日：2005-12-08

    申请号：US10863442

    申请日：2004-06-07

    申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

    发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

    IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

    CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

    摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS
    5.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS 有权
    基于微电子系统（MEMS）的电流和具有电容感测元件的磁场传感器

    公开(公告)号：US20080070338A1

    公开(公告)日：2008-03-20

    申请号：US11939589

    申请日：2007-11-14

    申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

    发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugal Berkcan ,  Wei-Cheng Tian

    IPC分类号： H01L21/02

    CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

    摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

    摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

    MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    6.
    发明授权
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号：US07466121B2

    公开(公告)日：2008-12-16

    申请号：US11506493

    申请日：2006-08-18

    申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

    发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

    IPC分类号： G01R33/00

    CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

    摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

    MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    8.
    发明授权
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号：US07495430B2

    公开(公告)日：2009-02-24

    申请号：US11506988

    申请日：2006-08-18

    申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

    发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

    IPC分类号： G01R33/00

    CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

    摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测部件感测成形的磁场 并且提供第一导体中的电流的指示。