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公开(公告)号：US20050210659A1
公开(公告)日：2005-09-29
申请号：US10807280
申请日：2004-03-24
CPC分类号： G11B5/1877 , G11B5/31 , Y10T29/49032 , Y10T29/49039 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： The method of manufacturing a thin-film magnetic head in accordance with the present invention comprises the steps of forming a first magnetic pole layer; removing both sides in a track width direction of the first magnetic pole layer so as to leave a predetermined residual area in the first magnetic pole layer; forming an insulating layer about the residual area of the first magnetic pole layer; forming a gap layer made of a nonmagnetic material; forming a second magnetic pole layer magnetically connected to the first magnetic pole; and patterning the second magnetic pole layer by etching while using a mask. As a consequence, even if an area relatively far from the second magnetic pole layer is eliminated from the gap layer, the insulating layer is mainly exposed from this area. This can prevent magnetic materials from adhering to the root of the second magnetic pole layer and its vicinity during etching.
摘要翻译： 根据本发明的制造薄膜磁头的方法包括以下步骤：形成第一磁极层; 去除第一磁极层的轨道宽度方向上的两侧，以便在第一磁极层中留下预定的残留区域; 围绕第一磁极层的剩余区域形成绝缘层; 形成由非磁性材料制成的间隙层; 形成磁性地连接到所述第一磁极的第二磁极层; 并且在使用掩模时通过蚀刻对第二磁极层进行图案化。 因此，即使从间隙层去除与第二磁极层相对较远的区域，绝缘层主要从该区域露出。 这可以防止磁性材料在蚀刻期间粘附到第二磁极层及其附近的根部。
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52.发明申请Magnetic head, method of manufacturing the same, a head gimbal assembly, and a hard disk drive 有权磁头，制造方法，头万向架组件和硬盘驱动器公开(公告)号：US20050088780A1
公开(公告)日：2005-04-28
申请号：US10692731
申请日：2003-10-27
CPC分类号： G11B5/17 , G11B5/1877
摘要： The magnetic head in accordance with the present invention comprises first and second magnetic pole layers, a link part for magnetically linking the first and second magnetic pole layers, and a thin-film coil helically wound about at least one of the first and second magnetic pole layers. The thin-film coil comprises a plurality of inner conductor parts arranged in parallel with each other with an insulating film interposed therebetween, a plurality of first outer conductor parts located on the side of the first or second magnetic pole layer opposite from the side where the inner conductor parts are located, a plurality of second outer conductor parts located on the side of the first outer conductor parts opposite from the side where the inner conductor parts are located, and a plurality of connecting parts for connecting their corresponding inner conductor parts and first and second outer conductor parts.
摘要翻译： 根据本发明的磁头包括第一和第二磁极层，用于磁耦合第一和第二磁极层的连接部分和围绕第一和第二磁极中的至少一个螺旋缠绕的薄膜线圈 层。 薄膜线圈包括彼此平行布置的多个内部导体部件，绝缘膜插入其间，多个第一外部导体部件位于第一或第二磁极层的与侧面相反的一侧 内导体部分位于多个第二外部导体部分中，多个第二外部导体部分位于第一外部导体部分与内部导体部分所在的一侧相对的一侧，以及多个连接部分，用于连接其相应的内部导体部分和第一 和第二外部导体部分。
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公开(公告)号：US06865059B2
公开(公告)日：2005-03-08
申请号：US10807260
申请日：2004-03-24
CPC分类号： G11B5/6005 , G11B5/3106 , G11B5/3967 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49055
摘要： A slider comprises a slider section and an element section. The slider section has a first medium facing surface and an air inflow end. The element section has a second medium facing surface, an air outflow end, and a thin-film magnetic head element. The slider section and the element section are produced separately, and bonded to each other so that the air inflow end and the air outflow end are disposed on opposite sides with the first and second medium facing surfaces in between.
摘要翻译： 滑块包括滑块部分和元件部分。 滑块部分具有第一介质面向表面和空气流入端。 元件部分具有第二介质面向表面，空气流出端和薄膜磁头元件。 滑块部分和元件部分分别制造，并且彼此结合，使得空气流入端和空气流出端设置在其间的第一和第二介质面对表面的相对侧上。
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公开(公告)号：US06762911B2
公开(公告)日：2004-07-13
申请号：US10068877
申请日：2002-02-11
IPC分类号： G11B5147
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3166 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： On a surface of a bottom pole, a write gap film and first magnetic material film having a high saturation magnetic flux density are formed, and the first magnetic material film is etched to remain a portion extending from an air bearing surface to a throat height zero reference position and a first non-magnetic film is formed in a removed portion. The first non-magnetic material film is polished to obtain a flat surface which is coplanar with a surface of the first magnetic material film. A second magnetic material film having a high saturation magnetic flux density is formed on the flat surface. The second magnetic material film, first magnetic material film, write gap film and bottom pole are partially removed by RIE using a mask formed on the flat surface in accordance with a given pattern to form a track pole having a double-layer structure consisting of bottom and to track poles and a trim structure in a self-aligned manner. A second non-magnetic material film is formed in a space formed by the etching, and a surface of the second non-magnetic material film is polished to have a flat coplanar surface with the top track pole. A thin film coil is formed on the flat surface, and a top pole is formed such that one end is magnetically coupled with the top track pole and the other end is magnetically coupled with the first pole.
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55.发明授权公开(公告)号：US06718623B2
公开(公告)日：2004-04-13
申请号：US10146924
申请日：2002-05-17
IPC分类号： G11B517
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B2005/3996 , H01L43/08 , H01L43/12 , Y10T29/49044 , Y10T29/49052
摘要： A reproducing head of a thin-film magnetic head incorporates an MR element, a pair of bias field applying layers located to be adjacent to the side portions of the MR element, and a pair of electrode layers that are located on the bias field applying layers and overlap the MR element. The electrode layers each have a first layer that is laid over part of the top surface of the MR element via a protection layer, and a second layer that overlaps the first layer. In the method of manufacturing the reproducing head, after forming the protection layer on an element-to-be film to make the MR element, a first electrode-to-be film to make the first layers is formed continuously without interposing a step of exposing the protection layer to the air.
摘要翻译： 薄膜磁头的再现头包括MR元件，位于与MR元件的侧部相邻的一对偏置电场施加层和位于偏置场施加层上的一对电极层 并与MR元件重叠。 电极层各自具有通过保护层铺设在MR元件的顶表面的一部分上的第一层，以及与第一层重叠的第二层。 在制造再现头的方法中，在要成膜的元件上形成保护层以制造MR元件之后，连续地形成用于制造第一层的第一电极待形成膜，而不会介入曝光步骤 保护层到空气中。
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公开(公告)号：US07308753B2
公开(公告)日：2007-12-18
申请号：US11063837
申请日：2005-02-23
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/6082 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A slider comprises a slider body and a head element. The slider body has an air bearing surface, an air inflow end and an air outflow end. The air bearing surface has: a first surface including two portions extending in a direction of air passage; a second surface including a portion disposed between the two portions of the first surface; and a third surface located closer to the air outflow end than the first surface is. The first surface and the second surface have such a difference in level that the second surface is located farther from a recording medium than the first surface is. The difference in level varies gradually so as to increase with decreasing distance from the air outflow end. A method of manufacturing the slider includes forming a slider material containing a portion to be the slider body and the head element, and processing the material so as to form the air bearing surface.
摘要翻译： 滑块包括滑块体和头元件。 滑块体具有空气轴承表面，空气流入端和空气流出端。 空气轴承表面具有：第一表面，包括在空气通道的方向上延伸的两个部分; 第二表面，包括设置在所述第一表面的两个部分之间的部分; 并且比第一表面更靠近空气流出端的第三表面是。 第一表面和第二表面具有这样的水平差，使得第二表面位于比第一表面更远离记录介质的位置。 水平差随着从空气流出端的距离减小而逐渐变化。 制造滑块的方法包括形成滑动材料，该滑块材料包含作为滑块体和头部元件的部分，并且处理该材料以形成空气支承表面。
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公开(公告)号：US07249408B2
公开(公告)日：2007-07-31
申请号：US10807280
申请日：2004-03-24
CPC分类号： G11B5/1877 , G11B5/31 , Y10T29/49032 , Y10T29/49039 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： The method of manufacturing a thin-film magnetic head in accordance with the present invention comprises the steps of forming a first magnetic pole layer; removing both sides in a track width direction of the first magnetic pole layer so as to leave a predetermined residual area in the first magnetic pole layer; forming an insulating layer about the residual area of the first magnetic pole layer; forming a gap layer made of a nonmagnetic material; forming a second magnetic pole layer magnetically connected to the first magnetic pole; and patterning the second magnetic pole layer by etching while using a mask.
摘要翻译： 根据本发明的制造薄膜磁头的方法包括以下步骤：形成第一磁极层; 去除第一磁极层的轨道宽度方向上的两侧，以便在第一磁极层中留下预定的残留区域; 围绕第一磁极层的剩余区域形成绝缘层; 形成由非磁性材料制成的间隙层; 形成磁性地连接到所述第一磁极的第二磁极层; 并且在使用掩模时通过蚀刻对第二磁极层进行图案化。
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公开(公告)号：US07141357B2
公开(公告)日：2006-11-28
申请号：US10786048
申请日：2004-02-26
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49032
摘要： A track width defining layer includes: a track width defining portion having an end located in the air bearing surface and the other end located opposite to the air bearing surface; and a wide portion coupled to the other end of the track width defining portion. The track width defining layer is formed by frame plating. A frame is formed by exposing and developing a resist layer. The step of exposing the resist layer includes: a first exposure step for forming a first latent image in the resist layer; and a second exposure step for forming a second latent image in the resist layer. The first latent image is made up of a first portion corresponding to the track width defining portion and a second portion adjoining the first portion and extending along the contour of the wide portion. The second latent image is intended for use in combination with the first latent image so as to form a latent image corresponding to the track width defining layer, and does not include a portion corresponding to the track width defining portion.
摘要翻译： 轨道宽度限定层包括：轨道宽度限定部分，其具有位于空气轴承表面中的端部，而另一端位于与空气支承表面相对的位置; 并且宽部分联接到轨道宽度限定部分的另一端。 轨道宽度限定层通过框架电镀形成。 通过曝光和显影抗蚀剂层形成框架。 曝光抗蚀剂层的步骤包括：用于在抗蚀剂层中形成第一潜像的第一曝光步骤; 以及在抗蚀剂层中形成第二潜像的第二曝光步骤。 第一潜像由对应于轨道宽度限定部分的第一部分和与第一部分邻接并沿着宽部分的轮廓延伸的第二部分组成。 第二潜像旨在与第一潜像组合使用以形成对应于轨道宽度限定层的潜像，并且不包括对应于轨道宽度限定部分的部分。
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公开(公告)号：US07131186B2
公开(公告)日：2006-11-07
申请号：US10862371
申请日：2004-06-08
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3166 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： On a surface of a bottom pole, a write gap film and first magnetic material film having a high saturation magnetic flux density are formed, and the first magnetic material film is etched to remain a portion extending from an air bearing surface to a throat height zero reference position and a first non-magnetic film is formed in a removed portion. The first non-magnetic material film is polished to obtain a flat surface which is coplanar with a surface of the first magnetic material film. A second magnetic material film having a high saturation magnetic flux density is formed on the flat surface. The second magnetic material film, first magnetic material film, write gap film and bottom pole are partially removed by RIE using a mask formed on the flat surface.
摘要翻译： 在底极的表面上，形成具有高饱和磁通密度的写间隙膜和第一磁性材料膜，并且蚀刻第一磁性材料膜以保持从空气轴承表面延伸到喉部高度零的部分 参考位置和第一非磁性膜形成在去除部分中。 第一非磁性材料膜被抛光以获得与第一磁性材料膜的表面共面的平坦表面。 在平坦表面上形成具有高饱和磁通密度的第二磁性材料膜。 使用形成在平坦表面上的掩模，通过RIE部分地除去第二磁性材料膜，第一磁性材料膜，写入间隙膜和底部极。
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60.发明授权Thin-film magnetic head, method of manufacturing the same, head gimbal assembly, and hard disk drive 有权薄膜磁头，制造方法，磁头万向架组件和硬盘驱动器公开(公告)号：US07119989B2
公开(公告)日：2006-10-10
申请号：US10781827
申请日：2004-02-20
CPC分类号： G11B5/4826 , G11B5/33
摘要： A thin-film magnetic head comprises first and second magnetic pole groups, magnetically connected to each other, having respective magnetic pole parts opposing each other on a side of a medium-opposing surface; a recording gap layer formed between the magnetic pole parts; and a thin-film coil insulated from the first and second magnetic pole groups and wound helically about at least one of them or flatly spirally wound about a junction connecting the first and second magnetic pole groups to each other; which are laminated on a substrate. The thin-film coil comprises a first conductor group having a plurality of inner conductor parts disposed between the first and second magnetic pole groups, and a second conductor group having a plurality of outer conductor parts disposed outside the second magnetic pole group or junction. The first conductor group has an insulating contact structure in which the inner conductor parts are in contact with each other by way of an insulating film. An inner relaxing part comprising a material softer than at least one of the first, second conductor groups and the first, second magnetic pole groups and being in contact with the first conductor group by way of an insulating film is provided.
摘要翻译： 薄膜磁头包括彼此磁连接的第一和第二磁极组，它们在介质相对表面的一侧具有彼此相对的各自的磁极部分; 形成在所述磁极部之间的记录间隙层; 以及薄膜线圈，其与所述第一和第二磁极组绝缘并围绕其中的至少一个螺旋形地缠绕，或者围绕将所述第一和第二磁极组彼此连接的结的平面螺旋形缠绕; 其层压在基板上。 薄膜线圈包括具有设置在第一和第二磁极组之间的多个内部导体部分的第一导体组和具有设置在第二磁极组或接合部之外的多个外部导体部分的第二导体组。 第一导体组具有绝缘接触结构，其中内导体部分通过绝缘膜彼此接触。 提供了一种内部放松部分，其包括比第一，第二导体组和第一，第二磁极组中的至少一个更柔软的材料，并且通过绝缘膜与第一导体组接触。
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