公开(公告)号：US11296115B1

公开(公告)日：2022-04-05

申请号：US17524737

申请日：2021-11-11

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L27/11582 ,  H01L29/47 ,  H01L29/78 ,  H01L29/167 ,  H01L23/528 ,  H01L27/11565 ,  H01L27/02 ,  H01L27/11578 ,  H01L29/792 ,  H01L27/11514 ,  H01L27/11551 ,  H01L27/11519

Abstract: A 3D device, the device including: a first level including logic circuits; a second level including a plurality of memory circuits, where the first level is bonded to the second level, where the bonded includes oxide to oxide bonds, and where the device includes first redundancy circuits to replace a faulty logic circuit and a second redundancy circuit to replace a faulty memory circuit.

公开(公告)号：US20220093440A1

公开(公告)日：2022-03-24

申请号：US17542492

申请日：2021-12-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A semiconductor device, the device including: a first single crystal substrate and plurality of logic circuits, where the first single crystal substrate has a device area, where the device area is significantly larger than a reticle size, where the plurality of logic circuits include an array of processors, where the plurality of logic circuits include a first logic circuit, a second logic circuit, and third logic circuit, where the plurality of logic circuits include switching circuits to support replacing the first logic circuit and the second logic circuit by the third logic circuit; and a built-in-test-circuit (“BIST”), where the built-in-test-circuit is connected to test at least the first logic circuit and the second logic circuit.

公开(公告)号：US11276687B2

公开(公告)日：2022-03-15

申请号：US17472667

申请日：2021-09-12

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist

IPC: H01L27/06 ,  H01L23/36 ,  H01L23/50 ,  H01L23/60 ,  H01L21/324 ,  H01L23/522 ,  H01L23/528 ,  H01L23/00 ,  H01L29/78

Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; a plurality of connection paths, where the plurality of connection paths provide first connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, and where the third layer includes crystalline silicon; and at least one temperature sensor.

公开(公告)号：US20220028759A1

公开(公告)日：2022-01-27

申请号：US17492577

申请日：2021-10-02

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L23/48 ,  H01L27/06 ,  H01L27/088 ,  H01L27/11551 ,  H01L27/108 ,  H01L29/732 ,  H01L27/11526 ,  H01L27/118 ,  H01L29/10 ,  H01L29/808 ,  H01L27/11573 ,  H01L29/66 ,  H01L27/02 ,  H01L27/11578 ,  H01L29/78 ,  H01L21/74 ,  H01L23/544 ,  H01L23/34 ,  H01L23/50

Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where the via has a diameter of less than 400 nm and greater than 5 nm.

公开(公告)号：US20220013556A1

公开(公告)日：2022-01-13

申请号：US17487369

申请日：2021-09-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar

IPC: H01L27/146 ,  H01L33/16 ,  H01L25/075 ,  H01L27/15 ,  H01L33/62

Abstract: A 3D micro display, the 3D micro display including: a first single crystal layer including a first plurality of light emitting diodes (LEDs); a second single crystal layer including a second plurality of light emitting diodes (LEDs), where the first single crystal layer includes at least ten individual first LED pixels, where the second single crystal layer includes at least ten individual second LED pixels, where the first plurality of light emitting diodes (LEDs) emits a first light with a first wavelength, where the second plurality of light emitting diodes (LEDs) emits a second light with a second wavelength, where the first wavelength and the second wavelength differ by greater than 10 nm; and further including a third single crystal layer including at least one LED driving circuit.

公开(公告)号：US11211279B2

公开(公告)日：2021-12-28

申请号：US17140130

申请日：2021-01-03

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H01L23/00 ,  H01L23/367 ,  H01L25/00 ,  H01L25/065

Abstract: A method for processing a 3D integrated circuit, the method including: providing a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; processing a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; then forming a bonded structure by bonding the second level to the first level, where the bonding includes metal to metal bonding, where the bonding includes oxide to oxide bonding; and then performing a lithography process to define dice lines for the bonded structure; and etching the dice lines.

公开(公告)号：US11164811B2

公开(公告)日：2021-11-02

申请号：US17313986

申请日：2021-05-06

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L23/48 ,  H01L27/06 ,  H01L27/088 ,  H01L27/11551 ,  H01L27/108 ,  H01L29/732 ,  H01L27/11526 ,  H01L27/118 ,  H01L29/10 ,  H01L29/808 ,  H01L27/11573 ,  H01L29/66 ,  H01L27/02 ,  H01L27/11578 ,  H01L29/78 ,  H01L21/74 ,  H01L23/544 ,  H01L23/34 ,  H01L23/50 ,  H01L27/24

Abstract: A 3D semiconductor device, the device including: a first level including single crystal first transistors, and a first metal layer, where the first level is overlaid by a first isolation layer; a second level including second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, where the third level is bonded to the second isolation layer, and where the bonded includes at least one oxide to oxide bond.

公开(公告)号：US20210305079A1

公开(公告)日：2021-09-30

申请号：US17340004

申请日：2021-06-05

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer and control circuits; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source, and a drain having a same doping type.

公开(公告)号：US20210287941A1

公开(公告)日：2021-09-16

申请号：US17335081

申请日：2021-06-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach

IPC: H01L21/822 ,  H01L21/48 ,  H01L27/088 ,  H01L27/06 ,  H01L23/00 ,  H01L25/065

Abstract: A method to process a 3D device, the method including: providing a first wafer including first transistors and a plurality of first interconnecting metal layers; providing a second wafer; processing the second wafer to form second transistors and a plurality of second interconnecting metal layers; processing further the second wafer with a first singulation process providing a plurality of dies; placing the plurality of dies on top of the first wafer; performing a bonding process to simultaneously bond the plurality of dies to the first wafer thus forming a bonded structure; and processing the bonded structure with a second singulation process providing a plurality of bonded dies, where the bonded structure includes oxide to oxide bonding, and where the second singulation process includes an etch process.

公开(公告)号：US20210257245A1

公开(公告)日：2021-08-19

申请号：US17246639

申请日：2021-05-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16

Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits including first single crystal transistors; forming at least one second level above the first level; performing a first etch step including etching first holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching second holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the etching first holes includes performing a lithography step aligned to the first alignment marks.