公开(公告)号：US07867559B2

公开(公告)日：2011-01-11

申请号：US11664342

申请日：2005-11-25

Applicant: Katsuto Taniguchi ,  Kazuhiro Kojima ,  Atsuko Noya

Inventor： Katsuto Taniguchi ,  Kazuhiro Kojima ,  Atsuko Noya

IPC: B05D3/12 ,  B05C13/02 ,  B05C11/10

CPC classification number: G03F7/162 ,  B05C11/10

Abstract: This invention provides a photoresist coating liquid supplying apparatus and a photoresist coating liquid supplying method, for supplying a photoresist coating liquid having a low particle content to a photoresist coating apparatus, and a photoresist coating apparatus using such a photoresist coating liquid supplying apparatus, which can realize coating without causing significant defects in a cost-effective manner.The photoresist coating liquid supplying apparatus comprises a buffer vessel for a photoresist coating liquid, a circulation filtering apparatus for drawing a part of the coating liquid from the buffer vessel, filtering the coating liquid, and then returning the filtered coating liquid to the buffer vessel, and a pipe for supplying the coating liquid from the buffer vessel or the circulation apparatus to a coating apparatus. The photoresist coating liquid supplying method uses the photoresist coating liquid supplying apparatus. The photoresist coating apparatus comprises a combination of the coating liquid supplying apparatus with a slit coating apparatus.

Abstract translation: 本发明提供一种光致抗蚀剂涂布液供给装置和光致抗蚀剂涂敷液供给方法，用于向光致抗蚀剂涂布装置供给具有低颗粒含量的光致抗蚀剂涂布液，以及使用这种光致抗蚀剂涂布液供给装置的光致抗蚀剂涂敷装置， 实现涂层，而不会以成本有效的方式引起显着的缺陷。 光致抗蚀剂涂布液供给装置包括光致抗蚀剂涂布液用缓冲容器，用于从缓冲容器中拉出一部分涂布液的循环过滤装置，过滤涂布液，然后将过滤后的涂布液返回缓冲容器， 以及用于将涂布液从缓冲容器或循环装置供给到涂布装置的管道。 光致抗蚀剂涂布液供给方法使用光刻胶涂布液供给装置。 光刻胶涂布装置包括涂布液供给装置与狭缝涂布装置的组合。

公开(公告)号：US07785655B2

公开(公告)日：2010-08-31

申请号：US11987741

申请日：2007-12-04

Applicant: Joung-Ho Ryu ,  Soo-Min Kwak ,  Hae-Joon Son ,  Man-Ho An ,  Joon-Young Kim ,  Do-Hyun Ryu ,  Seung-Soo Lee

Inventor： Joung-Ho Ryu ,  Soo-Min Kwak ,  Hae-Joon Son ,  Man-Ho An ,  Joon-Young Kim ,  Do-Hyun Ryu ,  Seung-Soo Lee

IPC: C23C16/52

CPC classification number: G02F1/1303 ,  B05C11/10 ,  B05C11/1034 ,  G01F11/021 ,  G01F11/024 ,  G01F11/22 ,  G02F1/1341 ,  G02F2001/13415

Abstract: A liquid crystal dispensing system includes a container to contain liquid crystal to be dispensed, a discharge pump to receive the liquid crystal from the container and to discharge the liquid crystal, a nozzle to dispense the liquid crystal discharged from the discharge pump onto a substrate, and a control unit to control a dispensing amount of liquid crystal discharged from the discharge pump and to compensate the dispensing amount when the dispensing amount of liquid crystal exceeds a limitation value.

Abstract translation: 液晶分配系统包括容纳待分配液晶的容器，从容器接收液晶并排出液晶的排出泵，将从排出泵排出的液晶分配到基板上的喷嘴， 以及控制单元，用于控制从排出泵排出的液晶的分配量，并且当液晶的分配量超过限制值时补偿分配量。

公开(公告)号：US07757629B2

公开(公告)日：2010-07-20

申请号：US11105827

申请日：2005-04-14

Applicant: Michael T. Lydon ,  William P. Blackburn ,  Ernesto Maldonado ,  James R. Kausch ,  Lex E. Pace

Inventor： Michael T. Lydon ,  William P. Blackburn ,  Ernesto Maldonado ,  James R. Kausch ,  Lex E. Pace

IPC: B05B13/02

CPC classification number: B05C5/005 ,  B05C5/002 ,  B05C11/10 ,  B05C11/1015 ,  B05C13/02 ,  Y10S118/04

Abstract: Methods and apparatus for coating optical articles, such as optical lenses, are provided. In one aspect, an optical article is placed in a holder and a sheet of coating material is discharged from a nozzle, such as from a fan coater nozzle, onto the optical article to form a coating on the optical article.

Abstract translation: 提供了光学制品如光学透镜的涂敷方法和装置。 在一个方面，将光学制品放置在保持器中，并且将一片涂料从诸如风扇涂布机喷嘴的喷嘴排出到光学制品上以在光学制品上形成涂层。

公开(公告)号：US20100159710A1

公开(公告)日：2010-06-24

申请号：US12659071

申请日：2010-02-24

Applicant: Osamu Arisumi ,  Masahiro Kiyotoshi ,  Katsuhiko Hieda

Inventor： Osamu Arisumi ,  Masahiro Kiyotoshi ,  Katsuhiko Hieda

IPC: H01L21/469

CPC classification number: B05B9/04 ,  B05B9/047 ,  B05C11/08 ,  B05C11/10

Abstract: A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid container; a coating liquid supply tube airtightly supplying the coating liquid from the liquid container to the discharge portion using pressurization from the gas supply tube; a first connecting portion capable of attaching and detaching the liquid container to and from the coating liquid supply tube; a second connecting portion capable of attaching and detaching the liquid container to and from the gas supply tube; and a solvent supply tube supplying a solvent, which can dissolve the coating liquid, to the first connecting portion.

Abstract translation: 半导体制造装置包括将涂布液排出到基板上的排出部; 气体供给管，将惰性气体供给到容纳所述涂布液的液体容器内，对所述液体容器的内部进行加压; 涂料液体供给管通过来自气体供给管的加压将涂布液从液体容器密封地供给到排出部; 第一连接部分，其能够将液体容器附接到涂布液供应管和从涂布液供应管分离; 第二连接部分，其能够将液体容器附接到气体供应管和从气体供应管排出; 以及将能够溶解涂布液的溶剂供给到第一连接部的溶剂供给管。

公开(公告)号：US07648052B2

公开(公告)日：2010-01-19

申请号：US10498247

申请日：2002-12-12

Applicant: William Holm ,  Kenth Nilsson ,  Peter Svalling

Inventor： William Holm ,  Kenth Nilsson ,  Peter Svalling

IPC: B05C5/02 ,  B29C47/66

CPC classification number: B29C47/0877 ,  B05C5/02 ,  B05C11/10 ,  B29C47/0009 ,  B29C47/0818 ,  B29C47/66 ,  B29K2819/00

Abstract: A viscous medium feeder, which has an inlet, an outlet, a tubular portion, a rotatable cylindrical shaft arranged in and extending coaxially with the tubular portion, and a drive motor connected to the shaft. The tubular portion has an internal thread, which is connected, at one end thereof, to the inlet, and, at the other end thereof, to the outlet. Further, the tubular portion is elastic, and the shaft abuts the inner wall portions of the tubular portion.

Abstract translation: 一种粘性介质进料器，其具有入口，出口，管状部分，与管状部分同轴设置并延伸的可旋转圆柱形轴，以及连接到轴的驱动马达。 管状部分具有内螺纹，该内螺纹在其一端连接到入口，并且在另一端连接到出口。 此外，管状部分是弹性的，并且轴邻接管状部分的内壁部分。

公开(公告)号：US07591899B2

公开(公告)日：2009-09-22

申请号：US11387865

申请日：2006-03-24

Applicant: Junichi Uehara ,  Takashi Iwade

Inventor： Junichi Uehara ,  Takashi Iwade

IPC: B05C5/00 ,  B05B13/02 ,  B05B7/12

CPC classification number: B05C11/10 ,  B05C5/0254 ,  G03F7/16

Abstract: An applicator device comprises a reservoir tank trapping embrocation, a stage holding a substrate, a ferrule having a slit-shaped opening section above the stage, a fluid transfer pump guiding the embrocation within the reservoir tank to the ferrule, a first opening and closing valve between a suction opening of the fluid transfer pump and the reservoir tank, opening when a suction operation is carried out and closing when a discharge operation is carried out, a second opening and closing valve between a discharge opening of the fluid transfer pump and the ferrule, opening when a discharge operation is carried out and closing when a suction operation is carried out, and driving means relatively moving the ferrule and/or substrate when the slit-shaped opening section and the substrate are adjacent to one another, wherein the fluid transfer pump comprises a membranous sealing member sealing a gap between a cylinder and a plunger.

Abstract translation: 一种施药装置，其特征在于，包括贮存槽捕集栓塞，保持基板的台架，在台架上方具有狭缝状的开口部的套管，将储存罐内的插入件引导到套圈的流体输送泵，第一开闭阀 在进行抽吸操作时的打开和排出操作之间的关闭之间，在流体输送泵的排出口和套圈之间的第二开闭阀 当执行排出操作时打开，当进行抽吸操作时关闭，以及当狭缝状开口部和基板彼此相邻时驱动装置相对移动套圈和/或基板，其中流体转移 泵包括密封气缸和柱塞之间的间隙的膜密封构件。

公开(公告)号：US20090159617A1

公开(公告)日：2009-06-25

申请号：US12083323

申请日：2006-09-18

Applicant: Grant Mcguffey ,  Mel Steven Lesley ,  Daniel D. Bourget

Inventor： Grant Mcguffey ,  Mel Steven Lesley ,  Daniel D. Bourget

IPC: B67D5/52 ,  F04C13/00 ,  F04C2/18 ,  F04C11/00 ,  G01F11/00

CPC classification number: F04C13/002 ,  B05C11/10 ,  B05C11/1044 ,  F01C21/10 ,  F04C2/18 ,  F04C11/001 ,  F04C2240/30 ,  Y10T137/87885

Abstract: A hot melt adhesive metering pump assembly, and an integral reservoir tank fluidically connected thereto and the hot melt adhesive metering pump assembly comprises a plurality of rotary, gear-type metering pumps which are arranged in a compact, longitudinally spaced manner upon a drive gear manifold. All of the driven gears of pumps are respectively driven by manifold pump drive gears which are rotatably mounted upon a common motor-driven rotary drive shaft rotatably disposed within the drive gear manifold, and a first side wall member of a base portion of the reservoir tank is integrally connected to a side wall portion of the drive gear manifold, while a second side wall member of the base portion of the reservoir tank is provided with a plurality of hose connections to which hot melt adhesive delivery hoses are to be connected so as to respectively convey the precisely metered amounts of the hot melt adhesive material toward the applicator heads.

Abstract translation: 热熔粘合剂计量泵组件和与其流体连接的一体储存罐和热熔胶计量泵组件包括多个旋转式齿轮式计量泵，它们以紧凑的纵向间隔的方式布置在驱动齿轮歧管 。 泵的所有从动齿轮分别由可旋转地安装在可旋转地设置在驱动齿轮歧管内的共同的马达驱动的旋转驱动轴上的歧管泵驱动齿轮驱动，并且储罐的基部的第一侧壁构件 一体地连接到驱动齿轮歧管的侧壁部分，而储存箱的基部的第二侧壁构件设置有多个软管连接件，热熔胶输送软管将连接到该软管接头，以便 分别将精密计量的热熔粘合剂材料输送到施用头。

公开(公告)号：US07520967B2

公开(公告)日：2009-04-21

申请号：US10847441

申请日：2004-05-18

Applicant: Teruo Maruyama ,  Takashi Sonoda ,  Yoshimasa Takii

Inventor： Teruo Maruyama ,  Takashi Sonoda ,  Yoshimasa Takii

IPC: B05C5/00

CPC classification number: H01J11/10 ,  B05C5/02 ,  B05C11/10 ,  H01J9/02 ,  H01J2209/015

Abstract: A meniscus of applying fluid is controlled by applying a voltage to a discharge-nozzle side electrode and a counter electrode placed downstream of the discharge nozzle and by increasing or decreasing fluid pressure inside a pump chamber with use of a mechanism for rotational motion or rectilinear motion.

Abstract translation: 通过向放电喷嘴侧的放电喷嘴侧电极和对置电极施加电压并且通过使用用于旋转运动或直线运动的机构来增加或减小泵室内的流体压力来控制施加流体的弯月面 。

公开(公告)号：US20080286475A1

公开(公告)日：2008-11-20

申请号：US12219404

申请日：2008-07-22

Applicant: Ta-Jo Liu ,  E-Ron Chang

Inventor： Ta-Jo Liu ,  E-Ron Chang

IPC: B05D1/30 ,  B05D3/02

CPC classification number: B05C11/10 ,  B05C5/0258 ,  B05C5/0275 ,  B05C11/1034

Abstract: The present invention discloses an apparatus for block type extrusion coating, and a process for forming block coating or grid-type coating on a substrate. The present invention uses a die set composed of an upper mold, a lower mold and a shim therebetween, which can be used to form a plurality of coated stripes. The present invention further uses several control valves, pumps and a controller to intermittently extrude a coating solution from the die set, so that the stripe coating is converted to a block coating. The block coated substrate can be rotated 90 degrees, followed by a stripe coating process to form a grid-type coating on the substrate.

公开(公告)号：US20080217356A1

公开(公告)日：2008-09-11

申请号：US12126817

申请日：2008-05-23

Applicant: Timothy D. Strecker ,  Scott Breidenthal

Inventor： Timothy D. Strecker ,  Scott Breidenthal

IPC: G01F11/00 ,  B67D5/60 ,  B67D5/62 ,  G01F11/20 ,  B23P19/00

CPC classification number: B05C11/1034 ,  B05C11/10 ,  B05C11/1042 ,  B05C17/00553 ,  Y10T29/53

Abstract: A dispensing apparatus includes a ceramic body having a chamber and at least one inlet channel fluidically coupled to the chamber. The chamber has a first portion and an outlet portion. The dispensing apparatus also includes one or more feed screws having a helical thread disposed in the chamber. Rotation of the one or more feed screws urges a viscoelastic fluid in the chamber toward the outlet portion of the chamber.

Abstract translation: 一种分配装置包括具有腔室的陶瓷体和至少一个与该腔室流体连接的入口通道。 腔室具有第一部分和出口部分。 分配装置还包括一个或多个进料螺杆，其具有设置在室中的螺旋形螺纹。 一个或多个进料螺杆的旋转促使腔室中的粘弹性流体朝向腔室的出口部分。