LIQUID MATERIAL DISCHARGE DEVICE
    1.
    发明公开

    公开(公告)号:US20240326084A1

    公开(公告)日:2024-10-03

    申请号:US18735743

    申请日:2024-06-06

    Abstract: A discharge device capable of suppressing pressure fluctuation of a compressed gas supplied to a container in which a liquid material is stored. The device includes a storage container in which a liquid material is stored; a discharge port through which the liquid material is discharged; a pressure control valve that adjusts a pressure of a compressed gas supplied from an external compressed gas source to a desired level; a discharge valve that establishes or cuts off communication between the pressure control valve and the storage container; a control device that controls operation of the discharge valve; a first flow line connecting the pressure control valve and the discharge valve; and a second flow line connecting the discharge valve and the storage container. The device further includes a third flow line branched from the first flow line, and a leak mechanism connected to the third flow line.

    Assembly, method for using assembly, applying device, method for using applying device, method for replenishing material

    公开(公告)号:US12076744B2

    公开(公告)日:2024-09-03

    申请号:US17293031

    申请日:2019-10-16

    Inventor: Hiroaki Sakai

    CPC classification number: B05C11/10 F04B15/02

    Abstract: An assembly is used for an applying device having a first pressurizing member that can pressurize a viscous material stored in a first container, and a second container having the viscous material stored, the second container being relatively approachable and separatable with respect to the first pressurizing member. The first pressurizing member includes a first contact unit contactable with the second container and a first passage through which the viscous material stored in the first container is circulatable to the second container. The second container includes a second contact unit contactable with the first contact unit, and a second passage provided on the second contact unit, the second passage being interrupted from the first passage when the first contact unit is brought into contact with the second contact unit, the second passage communicating with the first passage when the first contact unit is separated from the second contact unit.

    SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, TREATMENT LIQUID, AND TREATMENT LIQUID EVALUATION METHOD

    公开(公告)号:US20240290635A1

    公开(公告)日:2024-08-29

    申请号:US18437852

    申请日:2024-02-09

    CPC classification number: H01L21/67034 B05C11/10 B05C13/02

    Abstract: The present invention relates to a substrate treating method, a substrate treating apparatus, a treatment liquid, and a treatment liquid evaluation method. The substrate treating method includes a treatment liquid supply step, a solidified film forming step, and a sublimation step. In the treatment liquid supply step, the treatment liquid is supplied to a substrate. The treatment liquid contains a sublimable substance and a solvent. In the solidified film forming step, the solvent evaporates from the treatment liquid on the substrate. In the solidified film forming step, a solidified film is formed on the substrate. The solidified film contains the sublimable substance. In the sublimation step, the solidified film sublimates. The substrate is dried by sublimation of the solidified film. Here, the sublimable substance has a maximum positive partial charge of 0.22 or more and less than 0.34.

    Automatic fluid replacement device and fluid convey joint

    公开(公告)号:US11975958B2

    公开(公告)日:2024-05-07

    申请号:US17975520

    申请日:2022-10-27

    CPC classification number: B67C3/34 B05C11/10

    Abstract: An automatic fluid replacement device is adapted to be mounted on an opening of a storage barrel. The automatic fluid replacement device includes a robotic arm, at least one fluid convey joint and a controller. The robotic arm has a gripper. The fluid convey joint includes a convey pipe, a sleeve and a sealing bag. The convey pipe is configured to deliver a fluid. The sleeve is sleeved on the convey pipe. The gripper clamps the sleeve. The sealing bag is sleeved on the sleeve. The controller is configured for automatically controlling the robotic arm to move the fluid convey joint into the opening and controlling the sealing bag to be inflated to seal the opening.

    COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM

    公开(公告)号:US20240050977A1

    公开(公告)日:2024-02-15

    申请号:US18260575

    申请日:2022-01-04

    Inventor: Shogo INABA

    CPC classification number: B05C11/10 B05C11/08 H01L21/6838

    Abstract: A coating treatment apparatus for applying a coating solution to a peripheral portion of a substrate, includes: a holding and rotating part holding and rotating the substrate; a coating solution supply nozzle supplying the coating solution to the peripheral portion of the substrate; a moving mechanism moving the coating solution supply nozzle; and a controller controlling the holding and rotating part, coating solution supply nozzle, and moving mechanism, wherein the controller performs control of, while rotating the holding and rotating part: by controlling the moving mechanism while supplying the coating solution by the coating solution supply nozzle, both moving the coating solution supply nozzle from an outside of a perimeter of the substrate to a predetermined position at a periphery on the substrate at a first speed and then moving the coating solution supply nozzle from the predetermined position to the outside of the perimeter at a higher second speed.

    COATING DEVICE
    7.
    发明公开
    COATING DEVICE 审中-公开

    公开(公告)号:US20240024912A1

    公开(公告)日:2024-01-25

    申请号:US18043359

    申请日:2021-08-18

    CPC classification number: B05C5/0258 B05C5/0262 B05C11/10

    Abstract: A coating device comprises a die with a slit that is longer in a width direction and discharges a coating liquid to form a coating film on a substrate, a first flow path that supplies the coating liquid toward the die, a first manifold that is linked to the first flow path and holds the coating liquid that flows in from the first flow path, a plurality of second flow paths that are linked to the first manifold, a second manifold that is linked to the second flow paths and the slit, is longer in the width direction, and holds the coating liquid that flows in from the second flow paths, and an adjustment unit that is provided along at least one of the second flow paths and adjusts a flow of the coating liquid flowing through the at least one of the second flow paths.

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