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    Synthesizing semiconductor process flow models
    52.
    发明申请
    Synthesizing semiconductor process flow models 失效
    合成半导体工艺流程模型

    公开(公告)号：US20040220693A1

    公开(公告)日：2004-11-04

    申请号：US10863966

    申请日：2004-06-08

    申请人： Micron Technology, Inc.

    发明人： Chandra V. Mouli

    IPC分类号： G06F019/00

    CPC分类号： G05B19/41885 ,  G05B2219/32017 ,  G05B2219/32338 ,  G05B2219/45031 ,  G06F17/505 ,  H01L21/67276 ,  Y02P90/26

    摘要： Systems and methods of modeling a best-guess semiconductor process flow for fabricating a desired semiconductor device are provided. The best-guess process flow is modeled using an inverse modeling technique. This technique reverse engineers a desired semiconductor device to synthesize a model of a fabrication process that is likely to produce the desired semiconductor device. First, a desired device having one or more desired characteristics is modeled. Then, various process and material parameters, constraints, and actual measured data are used to synthesize one or more unique software models that represent a process flow likely to fabricate the desired device. If more than one process flow is modeled, various parameters are modified iteratively until a unique process flow model is synthesized.

    摘要翻译： 提供了用于制造期望的半导体器件的最佳猜测半导体工艺流程的系统和方法。 最好的猜测过程流程使用逆建模技术进行建模。 该技术逆向工程化所需的半导体器件以合成可能产生期望的半导体器件的制造工艺的模型。 首先，对具有一个或多个期望特性的期望的装置进行建模。 然后，使用各种过程和材料参数，约束和实际测量数据来合成表示可能制造所需设备的工艺流程的一个或多个独特软件模型。 如果对多个流程进行建模，则会反复修改各种参数，直到合成独特的流程模型。

    Method and system for assessing adjustment factors in testing or monitoring process
    53.
    发明申请
    Method and system for assessing adjustment factors in testing or monitoring process 失效
    评估或监测过程调整因素的方法和系统

    公开(公告)号：US20020161544A1

    公开(公告)日：2002-10-31

    申请号：US09842509

    申请日：2001-04-26

    发明人： Edward Michael Yanosik JR. ,  William Larson Clifford ,  Timothy James Horejs ,  Ann Marie Yanosik

    IPC分类号： G01D003/00 ,  G06F019/00 ,  G01M019/00 ,  G01R035/00 ,  G01M009/00 ,  G01M015/00 ,  G01M017/00 ,  G01M010/00 ,  G01M007/00 ,  G01P021/00 ,  G01L025/00

    CPC分类号： G05B19/41885 ,  G05B19/406 ,  G05B19/4184 ,  G05B2219/32017 ,  G05B2219/32338 ,  Y02P90/14 ,  Y02P90/26

    摘要： A method and system for assessing whether adjustment factors used in a process for testing or monitoring an operational system need to be updated or changed, as well as changing and updating these adjustment factors if needed or desired. At least one current adjustment factor is selected, along with the relevant data. The relevant data is then analyzed to generate results that are collected so that a determination can be made as to whether the current adjustment factor(s) needs to be changed. If it is determined that the current adjustment factor(s) needs to be changed, an updated adjustment factor(s) is provided to replace it. Preferably, the updated adjustment factor(s) is validated before incorporating it into the testing or monitoring process.

    摘要翻译： 用于评估用于测试或监测操作系统的过程中所使用的调整因子是否需要更新或更改的方法和系统，以及如果需要或需要，更改和更新这些调整因子。 选择至少一个当前调整因子以及相关数据。 然后分析相关数据以生成被收集的结果，使得可以确定是否需要改变当前调整因子。 如果确定需要改变当前调整因子，则提供更新的调整因子来代替它。 优选地，更新的调整因子在将其并入测试或监测过程之前被验证。