ADVANCED BATCH CONTROL
    2.
    发明申请
    ADVANCED BATCH CONTROL 有权
    高级批量控制

    公开(公告)号:US20110276164A1

    公开(公告)日:2011-11-10

    申请号:US12773485

    申请日:2010-05-04

    IPC分类号: G05B13/04

    CPC分类号: G05B13/042 G05B2219/32017

    摘要: A method for advanced batch control of a batch process. The method discloses completing at least one cycle of the batch process and collecting data on at least one process variable and at least one product property. A model is created based on the data, wherein the model comprises inputs. Thereafter the batch process is initiated. At one or more decision points the model is utilized to obtain outputs. A controller utilizes the model outputs to control the batch in accordance with the model outputs. Final product properties are reached at decreased variability compared to the prior art.

    摘要翻译: 用于批处理的高级批次控制的方法。 该方法公开了完成批处理过程的至少一个循环并收集关于至少一个过程变量和至少一个产品属性的数据。 基于数据创建模型,其中模型包括输入。 此后启动批处理。 在一个或多个决策点,该模型用于获得输出。 控制器利用模型输出根据模型输出控制批次。 与现有技术相比,最​​终产品的性能可以降低。

    Online modular parameterization and successive linear programming for improving manufacturing plant operations
    3.
    发明授权
    Online modular parameterization and successive linear programming for improving manufacturing plant operations 有权
    在线模块化参数化和连续线性规划,用于改进制造工厂的运行

    公开(公告)号:US08036759B2

    公开(公告)日:2011-10-11

    申请号:US12112339

    申请日:2008-04-30

    摘要: Methods and systems for substantially optimizing plant operations within a manufacturing environment. The method can include separating the manufacturing environment into two or more individual modules, wherein each individual module contains a fundamental principles-based model, and wherein the totality of the individual modules represents the entire manufacturing environment. Each individual module can be independently parameterized upon said module reaching steady state, wherein inter-module data flow can be provided to at least one of the individual modules during parameterization, and wherein an output of the parameterization comprises an individual, calibrated steady-state model of each individual module. A reduced order model can be derived from each parameterized module, and the reduced order models can be assembled to provide a facility reduced order model. The facility reduced order model can then be solved to provide improved or new operating conditions or operating condition targets.

    摘要翻译: 在制造环境中大幅优化设备运行的方法和系统。 该方法可以包括将制造环境分成两个或多个单独的模块,其中每个单独的模块包含基本的基于原理的模型,并且其中各个模块的总体表示整个制造环境。 每个单独的模块可以在所述模块达到稳定状态时被独立地参数化,其中模块间数据流可在参数化期间提供给至少一个单独的模块,并且其中参数化的输出包括单独的,校准的稳态模型 的每个模块。 可以从每个参数化模块导出一个简化的订单模型,并且可以组合降序模型以提供一个设施简化的订单模型。 然后可以解决设施降级订单模型,以提供改进的或新的操作条件或操作条件目标。

    Optimal operation of a power plant
    5.
    发明授权
    Optimal operation of a power plant 失效
    发电厂的最佳运行

    公开(公告)号:US07426456B2

    公开(公告)日:2008-09-16

    申请号:US10298573

    申请日:2002-11-19

    IPC分类号: G06F17/10

    摘要: In a method and computer program product for optimal operation of a power plant and a power plant optimising system an optimisation mode (1) minimises a cost function (J[u],J[P]) that comprises a deviation of lifetime of plant components (LTp(τ)) from a desired nominal lifetime trajectory (LTn(τ)). This is done by, at a given time, determining future values of input values (u(τ),P(τ)) such as control values (P(τ)) or process values (u(τ)) to the plant and simulating, in a simulation modulate (2), the behaviour of the plant up to a given future time. Corresponding lifetime values are determined in the simulation, and incorporated in an objective function. The optimisation module (1) minimises the cost function (J[u],J[P]) by varying the input values (u(τ),P(τ)). As a result, it is possible to operate the plant such that component lifetime (LTp(τ)) follows the desired trajectory (LTn(τ)).

    摘要翻译: 在用于发电厂和发电厂优化系统的最佳运行的方法和计算机程序产品中,优化模式(1)使包括工厂部件的寿命偏差的成本函数(J [u],J [P])最小化 (LTp(τ))从期望的标称寿命轨迹(LTn(τ))。 这通过在给定时间来确定植物的输入值(u(τ),P(τ))的未来值(例如控制值(P(τ))或过程值(u(τ))) 模拟,在模拟调制(2)中,植物的行为直到给定的未来时间。 相应的寿命值在模拟中确定,并入目标函数。 优化模块(1)通过改变输入值(u(τ),P(τ))来最小化成本函数(J [u],J [P])。 因此,可以使设备操作,使得组件寿命(LTp(τ))遵循期望的轨迹(LTn(τ))。

    Synthesizing semiconductor process flow models
    6.
    发明申请
    Synthesizing semiconductor process flow models 失效
    合成半导体工艺流程模型

    公开(公告)号:US20030216827A1

    公开(公告)日:2003-11-20

    申请号:US10150988

    申请日:2002-05-17

    发明人: Chandra V. Mouli

    IPC分类号: G06F019/00

    摘要: Systems and methods of modeling a best-guess semiconductor process flow for fabricating a desired s semiconductor device are provided. The best-guess process flow is modeled using an inverse modeling technique. This technique reverse engineers a desired semiconductor device to synthesize a model of a fabrication process that is likely to produce the desired semiconductor device. First, a desired device having one or more desired characteristics is modeled. Then, various process and material parameters, constraints, and actual measured data are used to synthesize one or more unique software models that represent a process flow likely to fabricate the desired device. If more than one process flow is modeled, various parameters are modified iteratively until a unique process flow model is synthesized.

    摘要翻译: 提供了用于制造期望的半导体器件的最佳猜测半导体工艺流程的系统和方法。 最好的猜测过程流程使用逆建模技术进行建模。 该技术逆向工程化所需的半导体器件以合成可能产生期望的半导体器件的制造工艺的模型。 首先,对具有一个或多个期望特性的期望的装置进行建模。 然后,使用各种过程和材料参数,约束和实际测量数据来合成表示可能制造所需设备的工艺流程的一个或多个独特软件模型。 如果对多个流程进行建模,则会反复修改各种参数,直到合成独特的流程模型。

    Optimal operation of a power plant
    7.
    发明申请
    Optimal operation of a power plant 失效
    发电厂的最佳运行

    公开(公告)号:US20030100974A1

    公开(公告)日:2003-05-29

    申请号:US10298573

    申请日:2002-11-19

    IPC分类号: G05B013/02

    摘要: In a method and computer program product for optimal operation of a power plant and a power plant optimising system an optimisation module (1) minimises a cost function (Jnullunull,JnullPnull) that comprises a deviation of lifetime of plant components (LTp(null)) from a desired nominal lifetime trajectory (LTn(null)). This is done by, at a given time, determining future values of input values (u(null),P(null)) such as control values (P(null)) or process values (u(null)) to the plant and simulating, in a simulation module (2), the behaviour of the plant up to a given future time. Corresponding lifetime values are determined in the simulation, and incorporated in an objective function. The optimisation module (1) minimises the cost function (Jnullunull,JnullPnull) by varying the input values (u(null),P(null)). As a result, it is possible to operate the plant such that component lifetime (LTp(null)) follows the desired trajectory (LTn(null)).

    摘要翻译: 在用于发电厂和发电厂优化系统的最佳运行的方法和计算机程序产品中,优化模块(1)使包括工厂部件的寿命偏差的成本函数(J [u],J [P])最小化 (LTp(τ))从期望的标称寿命轨迹(LTn(τ))。 这通过在给定时间来确定植物的输入值(u(τ),P(τ))的未来值(例如控制值(P(τ))或过程值(u(τ))) 在模拟模块(2)中模拟植物在给定的未来时间的行为。 相应的寿命值在模拟中确定,并入目标函数。 优化模块(1)通过改变输入值(u(τ),P(τ))来最小化成本函数(J [u],J [P])。 因此,可以使设备操作,使得组件寿命(LTp(τ))遵循期望的轨迹(LTn(τ))。

    Method and system for enhancing the yield in semiconductor manufacturing
    9.
    发明授权
    Method and system for enhancing the yield in semiconductor manufacturing 有权
    提高半导体制造产量的方法和系统

    公开(公告)号:US08090464B2

    公开(公告)日:2012-01-03

    申请号:US12208279

    申请日:2008-09-10

    IPC分类号: G06F19/00

    摘要: Roughly described, a manufacturing process is enhanced by using TCAD and TCAD-derived models. A TCAD simulation model of the process is developed, which predicts, in dependence upon a plurality of process input parameters, a value for a performance parameter of a product to be manufactured using the process. Estimated, predicted or desired values for a calculated subset of the parameters (including either process input parameters or product performance parameters or both), are determined in dependence upon the process model, and further in dependence upon actual, estimated or desired values for a different subset of the parameters (again either process input parameters or product performance parameters or both). The determination is preferably made using a process compact model of the process, itself developed in dependence upon the simulation model.

    摘要翻译: 粗略描述,通过使用TCAD和TCAD衍生的模型来增强制造过程。 开发了该过程的TCAD仿真模型,其根据多个过程输入参数预测将使用该过程制造的产品的性能参数的值。 根据过程模型确定计算的参数子集(包括过程输入参数或产品性能参数或两者)的估计值,预测值或期望值,并进一步根据实际估计值或期望值 参数子集(再次是过程输入参数或产品性能参数或两者)。 该确定优选地使用该过程的过程紧凑模型来进行,其本身根据模拟模型而开发。

    Mathematical model for a metallurgical plant, and method for optimizing the operation of a metallurgical plant using a model
    10.
    发明授权
    Mathematical model for a metallurgical plant, and method for optimizing the operation of a metallurgical plant using a model 失效
    冶金厂的数学模型,以及使用模型优化冶金设备运行的方法

    公开(公告)号:US07720653B2

    公开(公告)日:2010-05-18

    申请号:US11201712

    申请日:2005-08-11

    IPC分类号: G06F7/60 G06F7/48

    摘要: A method for optimizing the operation of a metallurgical plant using a model by modeling supply and discharge media streams, predetermining structure parameters which define the media streams, linking the media streams to one another, predetermining starting parameters which describe initial states, predetermining input operating parameters, determining and outputting output operating parameters, and determining and outputting end parameters, which describe end states of the units, by the model, predetermining the structure parameters to an optimization computer by a user and transmitting the parameters from the optimization computer to a model, and determining optimized operating parameters by the optimization computer on the basis of the starting parameters and an assessment criterion in accordance with an optimization algorithm using the model, wherein the assessment criterion is predetermined to the optimization computer by the user.

    摘要翻译: 一种用于通过建模供应和排出介质流来优化冶金设备的操作的方法,预先确定定义媒体流的结构参数,将媒体流彼此链接,预先确定描述初始状态的起始参数,预先确定输入操作参数 ,确定和输出输出操作参数,以及通过该模型确定和输出描述单元的终端状态的终端参数,由用户预先确定优化计算机的结构参数,并将参数从优化计算机发送到模型, 以及根据使用该模型的优化算法,基于起始参数和评估准则,由优化计算机确定优化的操作参数,其中评估准则由用户预先确定给优化计算机。