摘要:
A method and computer readable medium for treating a dielectric film on one or more substrates includes disposing the one or more substrates in a process chamber configured to perform plural treatment processes on a dielectric film. The dielectric film is formed on at least one of said one or more substrates, wherein the dielectric film includes an initial dielectric constant having a value less than the dielectric constant of SiO2. A thermal treatment process that includes annealing the one or more substrates is performed in order to remove volatile constituents from the dielectric film on the one or more substrates and a chemical treatment process is performed on the one or more substrates, including: introducing a treating compound to the dielectric film on the one or more substrates, and heating the one or more substrates.
摘要:
Methods and circuits for measuring clock phase uniformity of multi-phase clock set, including by generating at least one DC phase difference signal such that the DC phase difference signal is, or the DC phase difference signals are, indicative of the phase difference between the clocks of each of multiple pairs of clocks of the clock set, and methods and circuitry for generating such DC phase difference signals. Preferably, multiplexer circuitry asserts to DC signal generation circuitry any selected one of a number of pairs of clocks of the clock set, and the DC signal generation circuitry includes logic (for generating a binary signal in response to each clock pair) and a low pass filter for generating a DC phase difference signal in response to the binary signal. Other aspects are receivers and transmitters that include circuitry for generating at least one DC phase difference signal, and systems including at least one such transmitter (or receiver) and a link (e.g., a multi-channel or single-channel serial link) coupled thereto.
摘要:
A system for facilitating hemostasis of a puncture site in a blood vessel delivers an absorbable sponge pledget in a hydrated state to a position at an exterior of the blood vessel puncture to facilitate hemostasis. The system includes a staging chamber, a delivery cannula, and a pusher. The staging chamber is used for hydrating a pledget of absorbable sponge, compressing the pledget, and delivering the pledget to the delivery cannula. The staging chamber may include a valve for facilitating hydration and staging of the pledget. The delivery cannula and pusher are used to accurately place the sponge pledget outside the blood vessel. An easy loader connector may be used to facilitate loading the dry pledget into the staging chamber.
摘要:
An interconnect structure in back end of line (BEOL) applications comprising a tunable etch resistant anti-reflective (TERA) coating is described. The TERA coating can, for example, be incorporated within a single damascene structure, or a dual damascene structure. The TERA coating can serve as part of a lithographic mask for forming the interconnect structure, or it may serve as a hard mask, a chemical mechanical polishing (CMP) stop layer, or a sacrificial layer during CMP.
摘要:
An interconnect structure in back end of line (BEOL) applications comprising a tunable etch resistant anti-reflective (TERA) coating is described. The TERA coating can, for example, be incorporated within a single damascene structure, or a dual damascene structure. The TERA coating can serve as part of a lithographic mask for forming the interconnect structure, or it may serve as a hard mask, a chemical mechanical polishing (CMP) stop layer, or a sacrificial layer during CMP.
摘要:
A robot calibration system for calibrating a robot and a method of determining a position of the robot to calibrate the robot are disclosed. The system includes an electrical ground defining a return for an electrical circuit. The robot, which is electrically connected to the ground, includes an arm having a tool surface operating within a robot workspace. The system also includes an electrical supply and a detection device. The electrical supply defines a source for the circuit and provides a charge and a reference voltage to the system. The detection device communicates with the electrical supply to detect variations in either the charge, the reference voltage, or both. The system further includes a calibration object. The calibration object is electrically insulated from the ground and is electrically connected to the electrical supply. The calibration object receives the charge and the reference voltage from the electrical supply to determine the position of the robot relative to the calibration object when the tool surface moves toward the calibration object to electrically interact with the calibration object.
摘要:
An access device having a single sheath is inserted into a body passage puncture, with an expandable member of the access device held to a minimum diameter. The expandable member is held to the minimum diameter using structure that does not increase the diameter of the access device, rather than a large-diameter external sheath. The structure for holding the expandable member to a minimum diameter can subsequently be removed from the lumen of the access device., once the expandable member has been expanded.
摘要:
A robot calibration system includes a calibration sensor that provides an indication of when a first reference point that remains fixed relative to a robot base is a fixed distance from a second reference point that is located on the robot arm. The robot arm is moved through a plurality of orientations and each time that the fixed distance between the two reference points is achieved, robot joint position information is determined. The preferred calibration sensor includes a string that extends between the two reference points and activates a signal generator each time that the string is taut as caused by the orientation of the robot arm. The generated signal indicates that the two reference points are separated by the fixed distance. The determined robot joint positions are then used to determine a calibration factor which varies depending on the needs of a particular situation. Example calibration factors are useful for correcting errors in robot kinematic information, locating the workcell reference frame and locating the tool center point reference frame.
摘要:
A vein-branch accessing device includes at least one probe adapted for contacting a surface of a vein of the patient. The probe is further adapted for moving along the surface of the vein, to thereby guide the vein-branch accessing device over the surface of the vein and along the length of the vein, beneath the skin. The vein-branch accessing device further includes a vein branch indicator, which is adapted for indicating to an operator of the vein-branch accessing device that the probe has moved along the surface of the vein to a vein branch. The vein-branch accessing device further includes accessing structure, which is adapted for facilitating access to the vein branch. The accessing structure may include a port, which is adapted for accommodating either a clip or a clip applier therethrough. The clip is adapted for fitting around and occluding the vein branch, and the clip applier is adapted for severing the vein branch from the vein. The probe includes a vein bed separator having a shovel-shaped blade at an end thereof.