摘要:
A composition comprising a compound of formula (I) or (II): wherein r and q are independently integers of 1 to 3; Rf is linear or branched chain perfluoroalkyl group having 1 to 6 carbon atoms; j is an integer 0 or 1, or a mixture thereof, x is 1 or 2, Z is —O— or —S—, X is hydrogen or M, and M is an ammonium ion, an alkali metal ion, or an alkanolammonium ion is disclosed.
摘要:
Methods for purifying liquid alkanes are provided. The methods produce alkanes having low absorbance, particularly at 193 nm. The alkane liquids are useful as immersion liquids in photomicrolithography employed for production of electronic circuits.
摘要:
The present invention provides a clean closed loop fluid transport system and methods for recycling low absorbance liquid alkanes. The alkanes can be advantageously employed as immersion liquids in the production of electronic or integrated optical circuit elements by photolithographic methods employing ultraviolet wavelengths.
摘要:
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要:
Processes for preparing high purity polycyclic fluoroalkanes are provided. The polycyclic fluoroalkanes are useful as solvents, cleaning agents, heat transfer fluids, refrigerants, lubricants, and, in a preferred embodiment, by virtue of high refractive index and high transparency to UV wavelengths, optical applications in the vacuum ultraviolet (VUV).
摘要:
A process comprising polymerizing in an aqueous medium at least one fluorinated olefin monomer other than vinylidene fluoride in the presence of a compound of formula (1): Rf(CH2CF2)m—(CH2)nSO3M (1) wherein Rf is a C1 to C4 linear or branched perfluoroalkyl group, m is an integer of from 1 to 6, n is from 0 to 4, M is H, NH4, Li, Na or K, and a method of altering the surface behavior of a liquid comprising adding to the liquid the composition of a compound of formula (1).
摘要:
Disclosed is a method of altering the surface behavior of a liquid by adding to the liquid a compound of a Formula (1): Rf—O—(CF2)x(CH2)y—O-(QO)z—H (1) Wherein Rf is a linear or branched perfluoroalkyl having 1 to 6 carbon atoms, optionally interrupted by one to three ether oxygen atoms, x is an integer of 1 to 6; y is an integer of 1 to 6; Q is a linear 1,2-alkylene group of the formula CmH2m where m is an integer of 2 to 10; and z is an integer of 1 to 30.
摘要:
A polymer having at least one urea linkage prepared by: (i) reacting (a) at least one diisocyanate, polyisocyanate, or mixture thereof, having isocyanate groups, and (b) at least one fluorinated compound selected from the formula (I): Rf(CH2CF2)p(CH2CH2)q(R1)r—XH Formula (I) wherein p and q are each independently an integer of 1 to 3; r is 0 or 1; X is —O—, —NH— or —S—; R1 is a divalent radical selected from the group consisting of —S(CH2)n—, n is an integer of 2 to 4; s is an integer of 1 to 50; R2, R3, and R4 are each independently hydrogen or an alkyl group containing 1 to 6 carbon atoms; and Rf is a perfluoroalkyl group having 1 to 6 carbon atoms; and (i) reacting with (c) water, a linking agent, or a mixture thereof and methods for treating substrates therewith.
摘要:
A composition comprising a compound of formula (I) or (II): wherein r and q are independently integers of 1 to 3; Rf is linear or branched chain perfluoroalkyl group having 1 to 6 carbon atoms; j is an integer 0 or 1, or a mixture thereof, x is 1 or 2, Z is —O— or —S—, X is hydrogen or M, and M is an ammonium ion, an alkali metal ion, or an alkanolammonium ion is disclosed.
摘要:
A composition comprising a compound of formula (I) or (II): wherein r and q are independently integers of 1 to 3; Rf is linear or branched chain perfluoroalkyl group having 1 to 6 carbon atoms; j is an integer 0 or 1, or a mixture thereof, x is 1 or 2, Z is —O— or —S—, X is hydrogen or M, and M is an ammonium ion, an alkali metal ion, or an alkanolammonium ion is disclosed.