Non-planar surface structures and process for microelectromechanical systems
    64.
    发明申请
    Non-planar surface structures and process for microelectromechanical systems 审中-公开
    微机电系统的非平面表面结构和工艺

    公开(公告)号:US20070249078A1

    公开(公告)日:2007-10-25

    申请号:US11406776

    申请日:2006-04-19

    IPC分类号: H01L21/00

    CPC分类号: B81B3/0008 G02B26/001

    摘要: Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Apertures are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. Other layers may be formed over the formed apertures. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area and/or a larger surface separation between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.

    摘要翻译: 制造包括干涉式调制器的MEMS器件的方法包括在衬底上沉积包括固定层,可移动层和牺牲层的各种层。 在一个或多个不同层中形成孔径,以便在可移动和/或固定层上形成非平面表面。 可以在所形成的孔上形成其它层。 从所得到的非平面可移动和/或固定层之间去除牺牲层导致当MEMS器件致动时,可释放的MEMS器件具有减小的接触面积和/或可移动层和固定层之间较大的表面间隔。 减小的接触面积导致MEMS器件的致动期间较低的粘附力和降低的静摩擦力。 这些方法可用于制造释放和未释放的干涉式调制器。

    Process control monitors for interferometric modulators
    65.
    发明授权
    Process control monitors for interferometric modulators 有权
    过程控制监视器用于干涉式调制器

    公开(公告)号:US07259865B2

    公开(公告)日:2007-08-21

    申请号:US11281136

    申请日:2005-11-17

    IPC分类号: G01B9/02

    摘要: Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.

    摘要翻译: 公开了使用用于制造MEMS器件的至少一些相同工艺步骤制造的过程控制监视器。 过程控制监视器的分析可以提供关于MEMS器件和器件中的部件或子部件的属性的信息。 该信息可用于识别处理中的错误或优化MEMS器件。 在一些实施例中,过程控制监视器的分析可以利用光学测量。

    Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
    66.
    发明申请
    Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 失效
    用于抑制干涉式调制器中的反射镜倾斜的方法和装置

    公开(公告)号:US20070040777A1

    公开(公告)日:2007-02-22

    申请号:US11589582

    申请日:2006-10-30

    申请人: William Cummings

    发明人: William Cummings

    IPC分类号: G09G3/34

    摘要: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

    摘要翻译: 公开了具有可分离调制器结构的干涉式调制器,其具有从空腔上的柔性层悬挂的反射层。 干涉式调制器具有一个或多个防倾斜构件,其阻止反射层的不期望的移动,例如卷曲和/或倾斜。 通过防倾斜构件稳定反射层可以提高干涉式调制器的光输出的质量,以及包括这种干涉式调制器的显示器。

    Measuring and modeling power consumption in displays
    67.
    发明申请
    Measuring and modeling power consumption in displays 审中-公开
    在显示器中测量和建模功耗

    公开(公告)号:US20060103643A1

    公开(公告)日:2006-05-18

    申请号:US11182424

    申请日:2005-07-15

    IPC分类号: G01R19/00 G09G5/00

    摘要: Methods and systems for determining power consumption in displays are described. In some cases, the power may be determined by determining the capacitance of each pixel in the display, where the capacitance may be different for pixels in bright and dark states and for pixels of different color. Methods and systems are also provided for modeling the power consumed by a display depicting a particular image.

    摘要翻译: 描述了用于确定显示器中功耗的方法和系统。 在一些情况下,可以通过确定显示器中每个像素的电容来确定功率,其中对于明暗状态下的像素和不同颜色的像素,电容可能不同。 还提供了用于对描绘特定图像的显示器消耗的功率进行建模的方法和系统。

    Method and device for manipulating color in a display
    70.
    发明申请
    Method and device for manipulating color in a display 失效
    用于操纵显示器中的颜色的方法和装置

    公开(公告)号:US20060077124A1

    公开(公告)日:2006-04-13

    申请号:US11178211

    申请日:2005-07-08

    IPC分类号: G09G3/00

    摘要: A method and device for manipulating color in a display includes a display in which one or more of the pixels includes one or more display elements, such as interferometric modulators, configured to output colored light and one or more display elements configured to output white light. Other embodiments include methods of making such displays. In addition, embodiments include color displays configured to provide a greater proportion of the intensity of output light in green portions of the visible spectrum in order to increase perceived brightness of the display.

    摘要翻译: 用于操纵显示器中的颜色的方法和装置包括其中一个或多个像素包括一个或多个显示元件(诸如干涉式调制器)的显示器,其被配置为输出彩色光和被配置为输出白光的一个或多个显示元件。 其他实施例包括制造这种显示器的方法。 此外,实施例包括被配置为在可见光谱的绿色部分中提供更大比例的输出光强度以便增加显示器的感知亮度的彩色显示器。