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    MEMS devices requiring no mechanical support
    7.
    发明授权
    MEMS devices requiring no mechanical support 失效
    不需要机械支撑的MEMS器件

    公开(公告)号：US07715079B2

    公开(公告)日：2010-05-11

    申请号：US11952873

    申请日：2007-12-07

    申请人： Lior Kogut ,  Ming-Hau Tung ,  Yeh-Jiun Tung

    发明人： Lior Kogut ,  Ming-Hau Tung ,  Yeh-Jiun Tung

    IPC分类号： G02B26/08

    CPC分类号： G02B26/001 ,  B81B3/0021 ,  B81B2201/042

    摘要： MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.

    摘要翻译： 描述了诸如干涉式调制器的MEMS器件具有机械隔离的可移动层。 可移动层是电吸引的，使得它们可以通过施加电压而选择性地在顶部和底部电极之间移动。 在干涉式调制器中，可移动层是反射性的，使得在该层和部分反射层之间形成光学谐振腔，从而提供可根据谐振腔中的反射层之间的距离而导通或截止的显示像素 。

    MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT
    8.
    发明申请
    MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT 失效
    不需要机械支持的MEMS器件

    公开(公告)号：US20090147343A1

    公开(公告)日：2009-06-11

    申请号：US11952873

    申请日：2007-12-07

    申请人： Lior Kogut ,  Ming-Hau Tung ,  Yeh-Jiun Tung

    发明人： Lior Kogut ,  Ming-Hau Tung ,  Yeh-Jiun Tung

    IPC分类号： G02F1/03 ,  B29D11/00

    CPC分类号： G02B26/001 ,  B81B3/0021 ,  B81B2201/042

    摘要： MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.

    摘要翻译： 描述了诸如干涉式调制器的MEMS器件具有机械隔离的可移动层。 可移动层是电吸引的，使得它们可以通过施加电压而选择性地在顶部和底部电极之间移动。 在干涉式调制器中，可移动层是反射性的，使得在该层和部分反射层之间形成光学谐振腔，由此提供可根据谐振腔中的反射层之间的距离而导通或截止的显示像素 。

    STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL
    9.
    发明申请
    STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL 审中-公开
    通过垂直应力梯度控制的集成式微型收音机的减速

    公开(公告)号：US20110090554A1

    公开(公告)日：2011-04-21

    申请号：US12975119

    申请日：2010-12-21

    申请人： Yeh-Jiun Tung

    发明人： Yeh-Jiun Tung

    IPC分类号： G02B26/00

    CPC分类号： G02B26/001 ,  B81B3/0008 ,  B81B3/0059 ,  B81B2201/047 ,  G02B26/0841

    摘要： The present disclosure relates to the mitigation of stiction in MEMS devices. In some embodiments, a MEMS device may be provided with one or more restoration features that provide an assisting mechanical force for mitigating stiction. The restoration feature may be implemented as one or more deflectable elements, where the deflectable elements may have various configurations or shapes, such as a chevron, cross, and the like. For example, the restoration feature can be a cantilever that deflects when at least one component comes into contact or proximity with another component. Multiple restoration features also may be employed and placed strategically within the MEMS device to maximize their effectiveness in mitigating stiction.

    摘要翻译： 本公开涉及减轻MEMS器件中的静电。 在一些实施例中，MEMS器件可以设置有一个或多个恢复特征，其提供用于减轻静脉的辅助机械力。 恢复特征可以被实现为一个或多个可偏转元件，其中可偏转元件可以具有各种构造或形状，例如人字纹，十字形等。 例如，恢复特征可以是当至少一个部件与另一部件接触或接近时偏转的悬臂。 可以采用多个恢复特征并将其置于MEMS装置中，以最大限度地提高其在减轻静脉阻力方面的有效性。