公开(公告)号：US06517460B2

公开(公告)日：2003-02-11

申请号：US09847967

申请日：2001-05-03

申请人： Kenichi Takeuchi ,  Jun Hirose

发明人： Kenichi Takeuchi ,  Jun Hirose

IPC分类号： F16H132

CPC分类号： F16H1/32

摘要： An eccentric orbiting type speed reducer for the joint of the industrial machine has a plurality of crankshafts, a rotational driving force being input into one crankshaft alone among the plurality of crankshafts, in which the bearing capacity for one crankshaft among the plurality of crankshafts is greater than the bearing capacities for other crankshafts.

摘要翻译： 用于工业机器的接头的偏心轨道式减速器具有多个曲轴，旋转驱动力被输入到多个曲轴中的单个曲轴中，其中多个曲轴中的一个曲轴的承载能力较大 比其他曲轴的承载能力。

公开(公告)号：US06305895B1

公开(公告)日：2001-10-23

申请号：US09468112

申请日：1999-12-21

申请人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Makoto Ohara

发明人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Makoto Ohara

IPC分类号： B65G4907

CPC分类号： H01L21/67742 ,  H01L21/67748 ,  Y10S414/139 ,  Y10S414/141

摘要： A transfer system 7 for carrying a wafer W into/out of a process chamber 4 is provided in a box 10 defining a load-lock chamber 3. The box 10 is divided into a first chamber 11 and a second chamber 12. A transfer arm 21 for carrying the wafer W is provided in the first chamber 11. A linearly moving system 14 for linearly moving the transfer arm 21 is provided in the second chamber 12. The internal pressure in the first chamber is set to be higher than the internal pressure in the second chamber.

摘要翻译： 用于将晶片W输入/离开处理室4的传送系统7设置在限定了负载锁定室3的盒子10中。盒子10被分成第一室11和第二室12.传送臂 在第一室11中设置有用于承载晶片W的21。在第二室12中设置有用于使传送臂21直线移动的线性移动系统14.第一室中的内部压力被设定为高于内部压​​力 在第二个房间。

公开(公告)号：US06190495B1

公开(公告)日：2001-02-20

申请号：US09361992

申请日：1999-07-28

申请人： Kazuhiro Kubota ,  Shigeki Tozawa ,  Jun Hirose ,  Akira Koshiishi ,  Tomomi Kondo

发明人： Kazuhiro Kubota ,  Shigeki Tozawa ,  Jun Hirose ,  Akira Koshiishi ,  Tomomi Kondo

IPC分类号： B23K1000

CPC分类号： H01L21/67069 ,  C23F4/00 ,  H01J37/32082 ,  H01J37/3266

摘要： The magnetron plasma processing apparatus includes a vacuum chamber in which a semiconductor wafer is accommodated. In the chamber, a pair of electrodes are provided to face each other, and the wafer is placed on one electrode. Between a pair of the electrodes, a vertical electric field is formed, and a horizontal magnetic field is formed by the dipole ring magnet to cross perpendicularly to the electric field. The magnetic field has a gradient of the magnetic field intensity such that the intensity is high on the upstream side and is low on the downstream side in the electron-drift direction. Further, the magnetic field is formed such that the intensity is made uniform over a large area including the end portion of the wafer on the upstream side in the electron-drift direction and a region right outside it.

摘要翻译： 磁控管等离子体处理装置包括容纳半导体晶片的真空室。 在室内设置一对电极以彼此面对，并且将晶片放置在一个电极上。 在一对电极之间形成垂直电场，并且由偶极环磁体形成水平磁场以垂直于电场交叉。 磁场具有磁场强度的梯度，使得上游侧的强度高，并且在电子漂移方向的下游侧具有低的磁场强度。 此外，磁场形成为使得强度在包括晶片在电子漂移方向上游侧的晶片的端部和右侧的区域的大面积上均匀。

公开(公告)号：US5772494A

公开(公告)日：1998-06-30

申请号：US667130

申请日：1996-06-20

申请人： Shigehisa Muraki ,  Jun Hirose ,  Shotaro Kodaka

发明人： Shigehisa Muraki ,  Jun Hirose ,  Shotaro Kodaka

IPC分类号： B23P15/14 ,  F16H1/32 ,  B24B5/12

CPC分类号： F16H1/32 ,  Y10T29/49636

摘要： The invention relates to an eccentric orbiting type planetary gear device which requires no pre-load adjustment for the bearing, and is small in the number of components when compared with the conventional device, and is improved in performance and in assembling efficiency, and a method of manufacturing the device. In manufacturing an eccentric orbiting type planetary gear device in which a supporting block (31) is made up of a supporting member (32) having a plurality of pillar-like portions (32a), and a disk (33), the supporting member and the disk being fastened to each other with fastening members (35) with an external gear (21) between the supporting member and the disk in such a manner the external gear is engaged with an internal gear; the supporting member and the disk are abutted against each other through end faces thereof, and are fastened to each other to form the supporting block, and bearing rolling surfaces (32b) and (33a) corresponding to inner races are formed in the supporting member and the disk at a predetermined interval.

摘要翻译： 本发明涉及一种不需要对轴承进行预负荷调整的偏心轨道式行星齿轮装置，与常规装置相比数量少，并且性能和组装效率提高，方法 的制造设备。 在制造其中支撑块（31）由具有多个柱状部分（32a）的支撑构件（32）和盘（33）构成的偏心轨道式行星齿轮装置中，支撑构件和 所述盘通过所述支撑构件和所述盘之间的外齿轮（21）的紧固构件（35）彼此固定，所述外齿轮与内齿轮接合; 支撑构件和盘通过其端面彼此抵靠，并且彼此紧固以形成支撑块，并且在支撑构件中形成有与内圈对应的轴承滚动表面（32b）和（33a），并且 磁盘以预定间隔。