公开(公告)号：US06305895B1

公开(公告)日：2001-10-23

申请号：US09468112

申请日：1999-12-21

申请人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Makoto Ohara

发明人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Makoto Ohara

IPC分类号： B65G4907

CPC分类号： H01L21/67742 ,  H01L21/67748 ,  Y10S414/139 ,  Y10S414/141

摘要： A transfer system 7 for carrying a wafer W into/out of a process chamber 4 is provided in a box 10 defining a load-lock chamber 3. The box 10 is divided into a first chamber 11 and a second chamber 12. A transfer arm 21 for carrying the wafer W is provided in the first chamber 11. A linearly moving system 14 for linearly moving the transfer arm 21 is provided in the second chamber 12. The internal pressure in the first chamber is set to be higher than the internal pressure in the second chamber.

摘要翻译： 用于将晶片W输入/离开处理室4的传送系统7设置在限定了负载锁定室3的盒子10中。盒子10被分成第一室11和第二室12.传送臂 在第一室11中设置有用于承载晶片W的21。在第二室12中设置有用于使传送臂21直线移动的线性移动系统14.第一室中的内部压力被设定为高于内部压​​力 在第二个房间。

公开(公告)号：US06746196B1

公开(公告)日：2004-06-08

申请号：US09889148

申请日：2001-07-12

申请人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Hiroshi Koizumi

发明人： Jun Ozawa ,  Jun Hirose ,  Eiji Hirose ,  Hiroshi Koizumi

IPC分类号： B65G4907

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  H01L21/6835 ,  Y10S414/139

摘要： A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum treatment chamber (1), wherein a transfer arm (5) and first and second buffers (6, 7) for temporarily supporting the wafer (W) are installed in the preliminary vacuum chamber (2), the transfer arm (5) is provided with a flexible arm part (5a) and a support part (16) supporting the wafer (W), the arm part (5a) is extended and retracted by the rotations of a drive side swing arm (14) and a driven side swing arm (15) forming the arm (5a) so as to move the support part (16) straight forward and backward while maintaining it in its attitude, and the first and second buffers (6, 7) are disposed on the motion route of the support part (16) of the transfer arm (5).

摘要翻译： 1.一种真空处理装置，其特征在于，具备对作为被处理体的半导体晶片（W）进行蚀刻的真空处理室（1）和与所述真空处理室（1）连通的预备真空室（2），其特征在于， ）和用于临时支撑晶片（W）的第一和第二缓冲器（6,7）安装在预备真空室（2）中，传送臂（5）设置有柔性臂部分（5a）和支撑部分 （16）支撑晶片（W）时，通过驱动侧摆臂（14）和形成臂（5a）的从动侧摆臂（15）的旋转使臂部（5a）伸长和缩回，从而 在保持其姿态的同时将支撑部（16）向前后方向移动，第一缓冲器（6,7）设置在传送臂（5）的支撑部（16）的运动路径上。

公开(公告)号：USD459254S1

公开(公告)日：2002-06-25

申请号：US29131294

申请日：2000-10-19

申请人： Jun Hirose ,  Eiji Hirose ,  Jun Ozawa ,  Takaaki Hirooka

设计人： Jun Hirose ,  Eiji Hirose ,  Jun Ozawa ,  Takaaki Hirooka

公开(公告)号：US07025554B2

公开(公告)日：2006-04-11

申请号：US10614777

申请日：2003-07-07

申请人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

发明人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

IPC分类号： B65G49/07

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67745 ,  Y10S414/139

摘要： A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheric pressure level, and including a first transfer device that is movable and transfers the object into/from the load port, the first transfer device being disposed within the internal space; and a process unit having one process chamber for subjecting the object to a predetermined process, and a vacuum transfer chamber connected to the process chamber, having an internal space set at a vacuum pressure level, and including a second transfer device for transferring the object into/from the process chamber, the second transfer device being disposed within the internal space. The process units are individually connected to the common transfer chamber such that the process units are substantially parallel to each other. The vacuum chamber of each process unit is connected to the common transfer chamber. Each process unit extends linearly in a direction substantially perpendicular to the common transfer chamber. The object is transferred into/from the vacuum transfer chamber by means of the first transfer device.

摘要翻译： 真空处理系统包括：设置待处理对象的装载端口; 与负载端口相邻设置的公共传送室，具有设定在大气压力水平的内部空间，并且包括第一传送装置，该第一传送装置可移动并将物体传送到/从所述装载端口传送，所述第一传送装置设置在所述传送室内 内部空间; 以及处理单元，其具有用于使物体经受预定处理的一个处理室和连接到处理室的真空传送室，其具有设置在真空压力水平的内部空间，并且包括用于将物体传送到 /从处理室，第二传送装置设置在内部空间内。 处理单元分别连接到公共传送室，使得处理单元基本上彼此平行。 每个处理单元的真空室连接到公共传送室。 每个处理单元在基本上垂直于公共传送室的方向上线性地延伸。 物体通过第一传送装置传送到/从真空传送室传送。

公开(公告)号：US20060182539A1

公开(公告)日：2006-08-17

申请号：US11332653

申请日：2006-01-13

申请人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

发明人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

IPC分类号： H01L21/677

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67745 ,  Y10S414/139

摘要： A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheric pressure level, and including a first transfer device that is movable and transfers the object into/from the load port, the first transfer device being disposed within the internal space; and a process unit having one process chamber for subjecting the object to a predetermined process, and a vacuum transfer chamber connected to the process chamber, having an internal space set at a vacuum pressure level, and including a second transfer device for transferring the object into/from the process chamber, the second transfer device being disposed within the internal space. The process units are individually connected to the common transfer chamber such that the process units are substantially parallel to each other. The vacuum chamber of each process unit is connected to the common transfer chamber. Each process unit extends linearly in a direction substantially perpendicular to the common transfer chamber. The object is transferred into/from the vacuum transfer chamber by means of the first transfer device.

公开(公告)号：US07198448B2

公开(公告)日：2007-04-03

申请号：US11332653

申请日：2006-01-13

申请人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

发明人： Jun Ozawa ,  Jun Hirose ,  Masaki Narushima

IPC分类号： B65G49/07

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67745 ,  Y10S414/139

摘要： A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheric pressure level, and including a first transfer device that is movable and transfers the object into/from the load port, the first transfer device being disposed within the internal space; and a process unit having one process chamber for subjecting the object to a predetermined process, and a vacuum transfer chamber connected to the process chamber, having an internal space set at a vacuum pressure level, and including a second transfer device for transferring the object into/from the process chamber, the second transfer device being disposed within the internal space. The process units are individually connected to the common transfer chamber such that the process units are substantially parallel to each other. The vacuum chamber of each process unit is connected to the common transfer chamber. Each process unit extends linearly in a direction substantially perpendicular to the common transfer chamber. The object is transferred into/from the vacuum transfer chamber by means of the first transfer device.

摘要翻译： 真空处理系统包括：设置待处理对象的装载端口; 与负载端口相邻设置的公共传送室，具有设定在大气压力水平的内部空间，并且包括第一传送装置，该第一传送装置可移动并将物体传送到/从所述装载端口传送，所述第一传送装置设置在所述传送室内 内部空间; 以及处理单元，其具有用于使物体经受预定处理的一个处理室和连接到处理室的真空传送室，其具有设置在真空压力水平的内部空间，并且包括用于将物体传送到 /从处理室，第二传送装置设置在内部空间内。 处理单元分别连接到公共传送室，使得处理单元基本上彼此平行。 每个处理单元的真空室连接到公共传送室。 每个处理单元在基本上垂直于公共传送室的方向上线性地延伸。 物体通过第一传送装置传送到/从真空传送室传送。

公开(公告)号：US09395709B2

公开(公告)日：2016-07-19

申请号：US13396693

申请日：2012-02-15

申请人： Jun Ozawa ,  Tsuyoshi Inoue

发明人： Jun Ozawa ,  Tsuyoshi Inoue

IPC分类号： G05B15/02

CPC分类号： G05B15/02

摘要： Provided is a utilization-time changing support device including: a household-electrical-appliance power record storage unit storing records of power consumption for each household electrical appliance used in a living space; a power record writing unit receiving information indicating the power consumption of the household electrical appliance from a measuring device that measures the power consumption, and writing, into the household-electrical-appliance power record storage unit, a record of the information as one of the records of the power consumption; a regular use determining unit determining whether or not the household electrical appliance used during a predetermined period is regularly used, based on the records of the power consumption; and a period change possibility determining unit outputting (i) whether or not a utilization period of the household electrical appliance can be changed and (ii) another utilization period as a result of the determination, based on the records of the power consumption.

摘要翻译： 本发明提供一种利用时间变更支援装置，具备：家用电力记录存储单元，存储在生活空间中使用的各家用电器的电力消耗记录; 电力记录写入单元，从测量功率的测量装置接收表示家用电器的功耗的信息，并将该信息的记录写入家用电器功率记录存储单元 功耗记录; 基于功耗记录，定期使用确定单元，确定在预定时段期间使用的家用电器是否经常使用; 以及周期变化可能性确定单元，输出（i）是否可以改变家用电器的使用期限，以及（ii）作为所述确定的结果的另一利用期间，基于所述功耗的记录。

公开(公告)号：US08438479B2

公开(公告)日：2013-05-07

申请号：US12865919

申请日：2009-10-22

申请人： Tsuyoshi Inoue ,  Jun Ozawa

发明人： Tsuyoshi Inoue ,  Jun Ozawa

IPC分类号： G06F3/00

CPC分类号： G11B27/32 ,  G06F3/04895 ,  G06F9/453 ,  G11B27/34 ,  H04N5/4403 ,  H04N5/44543 ,  H04N21/4147 ,  H04N21/42204 ,  H04N21/4334 ,  H04N21/44222 ,  H04N21/4667 ,  H04N21/47214 ,  H04N21/482

摘要： The operation support apparatus includes: an operation load calculation unit (106) which calculates an operation load on a user in performing a selecting operation included in one of operation records, using the selecting operation and a previous selecting operation included in another one of the records, the calculation being performed for each of selecting operations included in the records; a non-thinking operation determination unit (107) which determines, for each selecting operation included in the records, whether or not it is a non-thinking operation that is a randomly-performed operation, by determining that the selecting operation is more likely to be the non-thinking operation when the operation load is smaller; and a target function inference unit (108) and a target function candidate storage unit (109) which provide the user with operation support based on the records of the selecting operations excluding the selecting operation determined as the non-thinking operation.

摘要翻译： 操作支持装置包括：操作负载计算单元，其使用包括在另一个记录中的选择操作和先前的选择操作来计算用户执行包括在一个操作记录中的选择操作的操作负载 对包括在记录中的每个选择操作执行计算; 一种非思考操作确定单元，其针对包括在记录中的每个选择操作确定是否是作为随机执行的操作的非思维操作，通过确定选择操作更可能 当操作负载较小时，是非思维操作; 以及目标函数推断单元（108）和目标函数候选存储单元（109），其基于除了被选择为非思考操作的选择操作之外的选择操作的记录来向用户提供操作支持。

公开(公告)号：US08131467B2

公开(公告)日：2012-03-06

申请号：US12048049

申请日：2008-03-13

申请人： Mototaka Yoshioka ,  Jun Ozawa

发明人： Mototaka Yoshioka ,  Jun Ozawa

IPC分类号： G01C21/00

CPC分类号： G01C21/3682 ,  G01C21/343 ,  G01C21/3484 ,  G01C21/3611 ,  G01C21/3632 ,  G01C21/3635 ,  G01C21/3641 ,  G01C21/3655 ,  G01C21/3673 ,  G01C21/3676 ,  G01C21/3697

摘要： A route information display device calculates a branch point in routes to a plurality of inputted destinations, and uses the branch point to control information modes. A route information display device includes: a departure point input unit that detects a current location of the user; a multiple destination input unit that accepts input of a plurality of destinations; a route search unit that searches for respective routes from the current location to the plurality of destinations; a branch point calculation unit that calculates a branch point of the respective searched routes; and a route information display unit that displays information regarding routes to the branch point and information regarding routes beyond the branch point in different modes, wherein the route information display device supports easy comprehension of information by the user by calculating a branch point of a plurality of inputted destinations and providing information in consideration of the branch point.

摘要翻译： 路线信息显示装置计算到多个输入目的地的路线中的分支点，并使用分支点来控制信息模式。 路线信息显示装置包括：检测用户的当前位置的出发点输入单元; 接收多个目的地的输入的多目的地输入单元; 路线搜索单元，搜索从当前位置到多个目的地的各路线; 分支点计算单元，计算各个搜索路线的分支点; 以及路线信息显示单元，其显示关于分支点的路线的信息和关于不同模式中的分支点以外的路线的信息，其中，路线信息显示装置通过计算多个分支点的分支点来支持用户容易理解的信息 考虑到分支点，输入目的地并提供信息。

公开(公告)号：US20110138202A1

公开(公告)日：2011-06-09

申请号：US13056758

申请日：2010-06-15

申请人： Tsuyoshi Inoue ,  Jun Ozawa

发明人： Tsuyoshi Inoue ,  Jun Ozawa

IPC分类号： G06F1/26

CPC分类号： G06Q10/06 ,  G06Q10/04 ,  G06Q50/06

摘要： An electric power control support device (101) includes: an electricity consumption receiving unit (102) that receives, from each of devices, operation data indicating a time period during which the device is operating; an electricity consumption history storage unit (103) storing the received operation data; a subordinate-superior relationship determination unit (105) that determines, from the devices, a superior device operating independently and a sub device operating in conjunction with the superior device, based on a temporal position relationship between operating sections temporally overlapping each other; a power-off forgetting determination unit (107) that specifies the sub device operating while the superior device is not operating; and the energy saving support execution unit (108) that supports energy saving for the sub device specified by the power-off forgetting determination unit (107).

摘要翻译： 电力控制支持装置（101）包括：电力消耗接收单元（102），其从每个设备接收指示所述设备正在操作的时间段的操作数据; 电力消耗历史存储单元，存储所接收的操作数据; 根据时间上彼此重叠的操作部分之间的时间位置关系，从所述装置确定独立操作的上级装置和与所述上级装置一起操作的子装置的下级上级关系确定单元（105） 电源关闭忘记确定单元，其指定所述子设备在所述上级设备不工作时操作; 以及支持由断电忘记确定单元（107）指定的子设备的节能的节能支持执行单元（108）。