摘要:
A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).
摘要:
A viewing optical instrument includes a main barrel which supports an objective optical system, a movable member for focus adjustment which is supported by the main barrel to be movable along an optical axis of the objective optical system relative to the main barrel, a focusing mechanism which drives the movable member along the optical axis, a focus knob which actuates the focusing mechanism, an auxiliary unit provided separately from the viewing optical instrument including an auxiliary mechanism which is associated with the focusing mechanism when the auxiliary unit is connected to the viewing optical instrument, and a connecting device for detachably attaching the auxiliary unit to the viewing optical instrument.
摘要:
In this power output apparatus, an operation line lower in torque than the maximum torque line is adopted as a reference operation line for moving the motor operating point along the reference operation line in a steady state, and for controlling the motor operating point such that the power output from the motor becomes the required power by increasing the motor torque while substantially maintaining the motor rotation speed irrespective of the reference operation line when the power required of the motor increases. Therefore, according to this power output apparatus, even when the power required of the motor increases suddenly, the motor torque increases without increasing the motor rotation speed and the power output from the motor becomes equal to the required power immediately.
摘要:
A diffractive-refractive achromatic lens that has a positive resultant power includes a refractive lens system and a positive diffractive grating. The refractive lens system is provided with a positive lens having relatively small dispersion, a negative lens having relatively large dispersion and an additional refractive lens. The additional refractive lens is a positive lens. The refractive lens system exhibits longitudinal chromatic aberration that is substantially proportional to wavelength such that the back focus of the refractive lens system decreases as the wavelength becomes shorter. The positive diffractive grating corrects the longitudinal chromatic aberration of the refractive lens system. The condition 0.005
摘要:
An apparatus for measuring weight of a substance placed within a substrate space which is subjected to sever conditions, including a measuring unit having a transducer and placed within a measuring space, a partition member provided between the measuring space and the substance space and having hole through which said measuring space is communicated with said substance space, a rod-like member extending through said hole formed in the partition member such that a first end of said force transferring member situates within said substance space and a second end of said force transferring member situates within said measuring space, a parallel link mechanism arranged within the measuring space and connected with the rod-like member, a magnetic fluid provided in a space within said hole such that said substance space and measuring space is isolated from each other in a liquid tight manner by means of said magnetic fluid, and a magnetic force generating unit producing a magnetic force such that said magnetic fluid is kept in position by said magnetic force.
摘要:
A telescopic objective lens system comprises a positive first lens group and a second lens group, in this order from the object. The second lens group comprises a first sub-lens group and a second sub-lens group, wherein the first sub-lens group is combined with the first lens group to be used for correcting axial chromatic aberration, the second sub-lens group is combined with the first lens group to be used for correcting field curvature; and wherein the combination of the first lens group and the first sub-lens group, and the combination of the first lens group and the second sub-lens group can be alternatively selected.
摘要:
A double-wrap dry scroll vacuum pump for use as a vacuum pump for nuclear power equipment. The pump has a pump body including a suction port capable of being communicated with a vessel to be evacuated and a discharge port for discharging wrap compressed gas to an outside of the pump body after an operation of gas compression by the progressive volume reduction of a sealed space, formed by a revolving scroll and a pair of stationary scrolls. The pump further includes a pair of enclosing members which cover opposite end portions of a drive shaft and are mounted in a gas-tight state around the revolving scroll. The pump has compressed gas feed ports for feeding compressed gas therethrough to the enclosing members, the compressed gas having a higher pressure than the wrap compressed gas and is discharged together with the wrap compressed gas through the discharge port. To attain high performance and durability, the double-wrap dry scroll vacuum pump has a gas bearing in fluid communication with the compressed gas feed ports to rotatably support the drive shaft. A contact-less torque transmission means is implemented for transmitting torque from a driving source to the drive shaft.
摘要:
A zoom magnifier is composed of a positive first lens group, a negative second lens group, a positive third lens group, in this order from the eye side, wherein zooming is performed by moving the second lens group in the optical axis direction, and wherein the zoom magnifier satisfies the following condition:30 mm
摘要:
A viewfinder optical system for a real-image type viewfinder has a positive objective lens system for obtaining a finder-image, and an erecting optical system for converting the finder-image into an erected image. The erecting system includes a mirror for deflecting an optical axis of the objective lenses, and at least a part of the mirror is formed as a light-transmitting area. The viewfinder optical system further comprises an ocular lens for viewing the finder-image, and an optical system for optically producing an information pattern, such as a viewing-field-frame, to be superimposed on the finder-image. The projecting system includes a projecting lens which focuses and forms the frame-pattern on an image-forming plane, defined by the objective lens system, through the light-transmitting area of the mirror, so that the frame-pattern is superimposed on the finder-image.
摘要:
A casing of an optical reader comprises a reading head and a handle. The reading head includes a frame portion having a bottom opening constituted as a parallelogram. The optical reader comprises an angular speed sensor. The optical reading is controlled in accordance with the trembling speed of the casing sensed by the angular speed sensor.