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    Optical system having a diffractive optical element, and optical apparatus
    2.
    发明授权
    Optical system having a diffractive optical element, and optical apparatus 失效

    公开(公告)号：US06825979B2

    公开(公告)日：2004-11-30

    申请号：US10156960

    申请日：2002-05-30

    申请人： Hideki Ogawa

    发明人： Hideki Ogawa

    IPC分类号： G02B2744

    CPC分类号： G02B5/1895 ,  G02B27/4211

    摘要： An optical system includes a diffractive optical element having a diffraction grating provided, on a lens surface having a curvature, in a concentric-circles shape rotationally-symmetrical with respect to an optical axis. The sign of the curvature of the lens surface having the diffraction grating provided thereon is the same as the sign of a focal length, at a design wavelength, of a system composed of, in the optical system, a surface disposed nearest to an object side to a surface disposed immediately before the lens surface having the diffraction grating provided thereon, and is different from the sign of the distance from the optical axis to a position where the center ray of an off-axial light flux enters the lens surface having the diffraction grating provided thereon. Further, the apex of an imaginary cone formed by extending a non-effective surface of the diffraction grating is located adjacent to the center of curvature of the lens surface having the diffraction grating provided thereon.

    Optical element
    3.
    发明授权
    Optical element 失效
    光学元件

    公开(公告)号：US06476968B1

    公开(公告)日：2002-11-05

    申请号：US09672316

    申请日：2000-09-29

    申请人： Hideo Kato ,  Hiroshi Maehara

    发明人： Hideo Kato ,  Hiroshi Maehara

    IPC分类号： G02B2744

    CPC分类号： G02B5/1876 ,  G02B1/02

    摘要： Disclosed is an optical element including a substrate made of a monocrystal of a fluoride compound, and a fine structure formed on the substrate and made of a non-monocrystal of metal fluoride. Also disclosed are an optical system having such optical element, and an exposure apparatus having such optical system incorporated therein.

    摘要翻译： 公开了一种光学元件，包括由氟化物的单晶制成的基板和形成在基板上并由金属氟化物的非单晶构成的微细结构。 还公开了具有这种光学元件的光学系统，以及其中并入有这种光学系统的曝光装置。

    Optical system including diffraction optical element
    4.
    发明授权
    Optical system including diffraction optical element 失效
    光学系统包括衍射光学元件

    公开(公告)号：US06449094B1

    公开(公告)日：2002-09-10

    申请号：US08638759

    申请日：1996-04-29

    申请人： Tetsuya Ishii

    发明人： Tetsuya Ishii

    IPC分类号： G02B2744

    CPC分类号： G02B27/4211 ,  G02B27/4288

    摘要： An optical system including a diffraction optical element and for forming an image of an object by light having a given wavelength width includes at least one diffraction optical element and a diffraction light selection element for transmitting a diffraction light of given order to an output side of the diffraction optical element and for attenuating the diffraction light of orders other than the given order.

    摘要翻译： 包括衍射光学元件和用于通过具有给定波长宽度的光形成物体的图像的光学系统包括至少一个衍射光学元件和衍射光选择元件，用于将给定顺序的衍射光传输到所述衍射光学元件的输出侧 衍射光学元件，并用于衰减除给定顺序以外的次序的衍射光。

    Diffractive-refractive achromatic lens
    5.
    发明授权
    Diffractive-refractive achromatic lens 失效
    衍射折射消色差透镜

    公开(公告)号：US06366405B2

    公开(公告)日：2002-04-02

    申请号：US09873332

    申请日：2001-06-05

    申请人： Tetsuya Abe

    发明人： Tetsuya Abe

    IPC分类号： G02B2744

    CPC分类号： G02B27/0056 ,  G02B27/0037 ,  G02B27/4211

    摘要： A diffractive-refractive achromatic lens that has a positive resultant power includes a refractive lens system and a positive diffractive grating. The refractive lens system is provided with a positive lens having relatively small dispersion, a negative lens having relatively large dispersion and an additional refractive lens. The additional refractive lens is a positive lens. The refractive lens system exhibits longitudinal chromatic aberration that is substantially proportional to wavelength such that the back focus of the refractive lens system decreases as the wavelength becomes shorter. The positive diffractive grating corrects the longitudinal chromatic aberration of the refractive lens system. The condition 0.005

    摘要翻译： 具有正合成功率的衍射 - 折射无彩色透镜包括折射透镜系统和正衍射光栅。 折射透镜系统设置有具有相对小的色散的正透镜，具有相对较大色散的负透镜和附加的折射透镜。 额外的折射透镜是正透镜。 折射透镜系统呈现与波长基本成比例的纵向色差，使得折射透镜系统的后焦点随波长变短而减小。 正衍射光栅校正折射透镜系统的纵向色差。 满足条件0.005

    DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER
    6.
    发明授权
    DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER 失效
    衍射光学元件，制造元件的方法，提供元件的照明装置，投影曝光装置，曝光方法，光学均匀物和制备光学均匀物的方法

    公开(公告)号：US06836365B2

    公开(公告)日：2004-12-28

    申请号：US09549720

    申请日：2000-04-14

    申请人： Akihiro Goto

    发明人： Akihiro Goto

    IPC分类号： G02B2744

    CPC分类号： G03F7/70075 ,  G02B5/1866 ,  Y10S359/90

    摘要： A diffractive optical element efficiently converts an input light beam into an output light beam having a specified cross-sectional shape. The diffractive optical element includes a plurality of partial optical elements. The plurality of partial optical elements convert the input light beam to respective partial light beams, each of which has a shape that does not correspond to the specified cross-sectional shape. The sum of the partial light beams matches the shape of the output light beam (i.e., having the specified cross-sectional shape).

    摘要翻译： 衍射光学元件将输入光束有效地转换为具有规定横截面形状的输出光束。 衍射光学元件包括多个部分光学元件。 多个部分光学元件将输入光束转换成各自的部分光束，每个部分光束具有不对应于规定横截面形状的形状。 部分光束的总和匹配输出光束的形状（即具有规定的横截面形状）。

    Apparatus and methods for generating multiple exit-pupil images in an expanded exit pupil
    8.
    发明授权
    Apparatus and methods for generating multiple exit-pupil images in an expanded exit pupil 有权
    用于在扩展的出射光瞳中产生多个出射 - 瞳孔图像的装置和方法

    公开(公告)号：US06768588B2

    公开(公告)日：2004-07-27

    申请号：US10206177

    申请日：2002-07-26

    申请人： Hakan Urey

    发明人： Hakan Urey

    IPC分类号： G02B2744

    CPC分类号： G02B19/0066 ,  G02B19/0014 ,  G02B27/0081 ,  G02B27/0172 ,  G02B27/1086

    摘要： A display system includes a diffraction grating that generates exit-pupil images, where one of the exit-pupil images has a first intensity and the remaining exit-pupil images each have or approximately have a second intensity that is less than the first intensity. The system also includes a filter that attenuates the intensity of the one exit-pupil image. In one example, the filter attenuates the 0th-order exit-pupil image so that all of the exit-pupil images have the same or approximately the same intensities.

    摘要翻译： 显示系统包括衍射光栅，其产生出射光瞳图像，其中出射光瞳图像之一具有第一强度，并且剩余的出射瞳孔图像各自具有或近似具有小于第一强度的第二强度。 该系统还包括滤波器，其衰减一个出射 - 瞳孔图像的强度。 在一个示例中，滤波器衰减0阶退出光瞳图像，使得所有出射光瞳图像具有相同或近似相同的强度。

    Polarization control of UV writing
    9.
    发明授权
    Polarization control of UV writing 失效
    UV写入的极化控制

    公开(公告)号：US06747798B2

    公开(公告)日：2004-06-08

    申请号：US09861907

    申请日：2001-05-21

    申请人： Martin Kristensen ,  Jörg Hübner

    发明人： Martin Kristensen ,  Jörg Hübner

    IPC分类号： G02B2744

    CPC分类号： G02B6/02138 ,  G02B6/02109 ,  G02B6/02133 ,  G02B6/124

    摘要： A system and method are provided for writing refractive index structures, such as gratings, in an optical waveguide. There is no requirement for structures having interferometric stability of the control elements. The method includes providing first and second light beams, the first beam having a first polarization state and a first wavevector, the second beam having a second polarization state different from the first polarization state, and a second wavevector different from the first wavevector. The method also includes illuminating a diffractive optical element by at least a part of the first beam and a part of the second beam so as to diffract parts of the first and second beams, and positioning the medium in relation to the diffractive element so as to illuminate the first part of the medium by the diffracted parts of the first and second beams.

    摘要翻译： 提供了一种用于在光波导中写入诸如光栅的折射率结构的系统和方法。 不需要具有控制元件的干涉稳定性的结构。 该方法包括提供第一和第二光束，第一光束具有第一偏振状态和第一波矢，第二光束具有不同于第一偏振状态的第二偏振态，以及与第一波矢不同的第二波矢。 该方法还包括通过第一光束的至少一部分和第二光束的一部分来照射衍射光学元件，以便衍射第一和第二光束的部分，并相对于衍射元件定位介质，以便 通过第一和第二光束的衍射部分照射介质的第一部分。

    Dual-lens hybrid diffractive/refractive imaging system
    10.
    发明授权
    Dual-lens hybrid diffractive/refractive imaging system 有权
    双透镜混合衍射/折射成像系统

    公开(公告)号：US06724532B1

    公开(公告)日：2004-04-20

    申请号：US10339335

    申请日：2003-01-10

    申请人： Chiun-Lern Fu ,  Tsung-Hsin Lin ,  Hsin-Yih Lin ,  Mao-Hong Lu ,  Deh-Ming Shyu

    发明人： Chiun-Lern Fu ,  Tsung-Hsin Lin ,  Hsin-Yih Lin ,  Mao-Hong Lu ,  Deh-Ming Shyu

    IPC分类号： G02B2744

    CPC分类号： G02B27/0037 ,  G02B13/001 ,  G02B13/003 ,  G02B27/4211

    摘要： The present invention discloses a dual-lens hybrid diffractive/refractive imaging system comprising: a first lens including a concave surface and a convex surface; and the second lens including a convex surface and a concave surface. The concave surface of the first lens is an objective surface facing the object. The convex surface faces the convex surface of the second lens, while the concave surface of the second lens faces the charge-coupled device (CCD) through a filter. Any surface of the first lens and the second lens is spheric or aspheric. Moreover, the imaging system comprises at least one diffractive surface, referred to as a hybrid diffractive/refractive surface, formed on any surface of the two lenses. Therefore, aberration is eliminated and image quality is improved without increasing the number of lenses.

    摘要翻译： 本发明公开了一种双透镜混合衍射/折射成像系统，包括：第一透镜，包括凹面和凸面; 并且所述第二透镜包括凸面和凹面。 第一透镜的凹面是面向物体的物镜面。 凸面面对第二透镜的凸面，而第二透镜的凹面通过滤光器面对电荷耦合器件（CCD）。 第一透镜和第二透镜的任何表面是球形或​​非球面。 此外，成像系统包括形成在两个透镜的任何表面上的至少一个被称为混合衍射/折射表面的衍射表面。 因此，不增加透镜数量就能消除像差并提高图像质量。