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公开(公告)号：US06551387B2
公开(公告)日：2003-04-22
申请号：US09915915
申请日：2001-07-26
IPC分类号： B01D5302
CPC分类号： B01D53/02 , B01D53/04 , B01D2253/102 , B01D2253/106 , B01D2257/2066 , B01D2259/40086 , Y02C20/30 , Y02P70/605
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).
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公开(公告)号：US07527676B2
公开(公告)日：2009-05-05
申请号：US10566489
申请日：2004-06-02
IPC分类号： B01D53/02
CPC分类号： B01D53/025 , Y02C20/30 , Y02P70/605
摘要： A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.
摘要翻译： 一种用于分离在生产过程中产生的包含CF4和C2F6的PFC气体的排气的单元，其中废气在浓缩装置中浓缩，然后在使用氮气作为载气的色谱分离装置中色谱分离。 色谱分离装置装有分子筛13X或F-9等。 该单元能够有效分离CF4和C2F6。
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公开(公告)号：US06530980B2
公开(公告)日：2003-03-11
申请号：US09915473
申请日：2001-07-26
IPC分类号： B01D1508
摘要： A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).
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公开(公告)号：US20070084345A1
公开(公告)日：2007-04-19
申请号：US10566489
申请日：2004-06-02
IPC分类号： B01D53/02
CPC分类号： B01D53/025 , Y02C20/30 , Y02P70/605
摘要： A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.
摘要翻译： 一种用于分离在生产过程中产生的包含CF 4和C 2 F 6 F 6的PFC气体的废气的单元，其中废气是 浓缩在浓缩装置中，然后在使用氮气作为载气的色谱分离装置中色谱分离。 色谱分离装置装有分子筛13X或F-9等。 该单元能够有效地分离CF 4和C 2 H 6 F 6。
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公开(公告)号：US07892322B2
公开(公告)日：2011-02-22
申请号：US11912125
申请日：2006-04-19
CPC分类号： B01D53/047 , B01D53/0423 , B01D53/75 , B01D2253/102 , B01D2253/108 , B01D2256/10 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/40001 , B01D2259/402 , B01D2259/416 , C23C16/4412 , Y02C20/30
摘要： An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.
摘要翻译： 一种用于从含有至少一种成分的特定气体的待处理气体中分离特定气体的装置和方法，其包括使得待处理的气体在不使用另一种气体的情况下流经柱而将气体转移到 同时在减压下保持填充有填料的柱的内部。 上述装置和方法可以适当地用于以低成本分离具有高纯度的特定气体。
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公开(公告)号：US20090056540A1
公开(公告)日：2009-03-05
申请号：US11912125
申请日：2006-04-19
CPC分类号： B01D53/047 , B01D53/0423 , B01D53/75 , B01D2253/102 , B01D2253/108 , B01D2256/10 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/40001 , B01D2259/402 , B01D2259/416 , C23C16/4412 , Y02C20/30
摘要： An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.
摘要翻译： 一种用于从含有至少一种成分的特定气体的待处理气体中分离特定气体的装置和方法，其包括使得待处理的气体在不使用另一种气体的情况下流经柱而将气体转移到 同时在减压下保持填充有填料的柱的内部。 上述装置和方法可以适当地用于以低成本分离具有高纯度的特定气体。
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公开(公告)号：US20070234692A1
公开(公告)日：2007-10-11
申请号：US11709919
申请日：2007-02-22
申请人： Youhei Midorikawa , Satoshi Miki , Tetsuya Abe , Takashi Arai , Masahiro Nemoto , Seiji Hiroki
发明人： Youhei Midorikawa , Satoshi Miki , Tetsuya Abe , Takashi Arai , Masahiro Nemoto , Seiji Hiroki
IPC分类号： B01D46/28
CPC分类号： B01D46/12 , B01D39/1615 , B01D46/0015 , B01D46/0024 , B01D46/008 , B01D2267/30 , G21F9/02 , G21F9/28 , Y10S55/30
摘要： An exhaust gas filter comprises an outer tube, a plurality of center-closing filter units each having an isolation plate; and a plurality of center-opening filter units having an annular isolation plate, two kinds of filter units being arranged alternately in the outer tube. The isolation plate and annular isolation plate are enclosed by flammable fibers. When a contaminated gas goes through the flammable fibers, it can be filtrated.
摘要翻译： 排气过滤器包括外管，多个具有隔离板的中心关闭过滤器单元; 以及具有环状隔离板的多个中心开口过滤器单元，在外管中交替设置两种过滤单元。 隔离板和环形隔离板由易燃纤维包围。 当受污染的气体通过可燃纤维时，可以过滤。
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公开(公告)号：US5373157A
公开(公告)日：1994-12-13
申请号：US965258
申请日：1993-01-05
申请人： Seiji Hiroki , Tetsuya Abe , Yoshio Murakami , Yoshishige Takano , Akira Yamakawa , Masaya Miyake
发明人： Seiji Hiroki , Tetsuya Abe , Yoshio Murakami , Yoshishige Takano , Akira Yamakawa , Masaya Miyake
CPC分类号： H01J49/4215 , H01J49/068
摘要： The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.
摘要翻译： PCT No.PCT / JP92 / 01141 Sec。 371日期：1993年1月5日 102（e）日期1993年1月5日PCT提交1992年9月7日PCT公布。 出版物WO93 / 05532 日本1993年3月18日。本发明涉及用于质谱仪等的四极电极的改进，其中两对电极棒1,2,3和4以这样的方式形成： 每个杆的相对面是双曲线或圆形，并且每个电极棒由陶瓷制成，并且电极的表面涂覆有导电金属的涂层5。 此外，本发明涉及一种制造方法，其特征在于以预定间隔并入这四个电极。 由于电极主要由能够以高尺寸精度容易地形成的陶瓷制成，因此可以在组装期间电极之间的位置关系的调整不需要太多的努力，这使得能够提供具有高性能的四极电极 以低成本实现良好的再现性。
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9.发明授权Double wrap dry scroll vacuum pump having a compressed gas cooling passage disposed in the scroll shaft 失效具有设置在涡旋轴中的压缩气体冷却通道的双层卷绕真空泵
公开(公告)号：US6149405A
公开(公告)日：2000-11-21
申请号：US123289
申请日：1998-07-28
申请人： Tetsuya Abe , Seiji Hiroki , Shuji Haga
发明人： Tetsuya Abe , Seiji Hiroki , Shuji Haga
CPC分类号： F04C29/0064 , F04C18/0223 , F04C23/008 , F04C29/04
摘要： A double-wrap dry scroll vacuum pump for use as a vacuum pump for nuclear power equipment. The pump has a pump body including a suction port capable of being communicated with a vessel to be evacuated and a discharge port for discharging wrap compressed gas to an outside of the pump body after an operation of gas compression by the progressive volume reduction of a sealed space, formed by a revolving scroll and a pair of stationary scrolls. The pump further includes a pair of enclosing members which cover opposite end portions of a drive shaft and are mounted in a gas-tight state around the revolving scroll. The pump has compressed gas feed ports for feeding compressed gas therethrough to the enclosing members, the compressed gas having a higher pressure than the wrap compressed gas and is discharged together with the wrap compressed gas through the discharge port. To attain high performance and durability, the double-wrap dry scroll vacuum pump has a gas bearing in fluid communication with the compressed gas feed ports to rotatably support the drive shaft. A contact-less torque transmission means is implemented for transmitting torque from a driving source to the drive shaft.
摘要翻译： 用于核电设备的真空泵的双卷干式涡旋真空泵。 该泵具有一泵体，该泵体包括能够与要抽真空的容器连通的吸入口，以及用于将气体压缩操作后的压缩气体排放到泵体外部的排出口， 空间，由旋转涡卷和一对固定涡卷形成。 该泵还包括一对封闭构件，该封闭构件覆盖驱动轴的相对端部并围绕回转涡卷以气密状态安装。 泵具有用于将压缩气体通过其中的压缩气体供给口压缩到封闭构件，压缩气体具有比包裹压缩气体更高的压力，并且与包裹压缩气体一起排出通过排出口。 为了获得高性能和耐久性，双卷干式涡旋真空泵具有与压缩气体进料口流体连通的气体轴承，以可旋转地支撑驱动轴。 实现用于将扭矩从驱动源传递到驱动轴的无接触转矩传递装置。
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公开(公告)号：US5632597A
公开(公告)日：1997-05-27
申请号：US623014
申请日：1996-03-28
申请人： Seiji Hiroki , Tetsuya Abe , Yoshio Murakami , Junichi Nakamura , Masashi Iguchi
发明人： Seiji Hiroki , Tetsuya Abe , Yoshio Murakami , Junichi Nakamura , Masashi Iguchi
CPC分类号： F04D19/044
摘要： A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.
摘要翻译： 螺旋槽型真空泵，其中转子和定子之间的间隙不受转子温度的任何影响，因此泵送性能在核聚变反应堆的等离子体燃烧期间不会劣化。 螺纹槽泵送部分形成为圆锥体，使得转子的膨胀和收缩沿着圆锥体的母线发生。 由于转子和定子之间的间隙由于不同的转子引起的转子温度变化导致的热膨胀变化，因此转子和定子之间的间隙保持恒定，泵在整个运行模式下表现出最高的泵送性能 气体负荷。
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