公开(公告)号：US4789425A

公开(公告)日：1988-12-06

申请号：US82417

申请日：1987-08-06

申请人： Donald J. Drake ,  William G. Hawkins ,  Stephen F. Pond ,  Michael R. Campanelli ,  Pamela J. Hartman ,  Raymond E. Bailey

发明人： Donald J. Drake ,  William G. Hawkins ,  Stephen F. Pond ,  Michael R. Campanelli ,  Pamela J. Hartman ,  Raymond E. Bailey

IPC分类号： B23P15/00 ,  B41J2/05 ,  B41J2/16 ,  G01D15/16

CPC分类号： B41J2/1628 ,  B23P15/00 ,  B41J2/1603 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  Y10T29/49083

摘要： A thermal ink jet printhead of the type which expels droplets on demand towards a recording medium from nozzles located above and generally parallel with the bubble generating heating elements contained therein is disclosed, together with fabrication processes therefor. The droplets are propelled along trajectories that are perpendicular to the heating element surfaces and from nozzles located in the printhead roof; such configuration is generally referred to as "roofshooter". Each printhead comprises a silicon heater plate and a fluid directing structural member. The heater plate has a linear array of heating elements associated addressing electrodes, and an elongated ink fill hole parallel with the heating element array. The structural member contains at least one recessed cavity, a plurality of nozzles, and a plurality of parallel walls within the recessed cavity which define individual ink channels for directing ink to the nozzles. The recessed cavity and fill hole are in communication with each other and form the ink reservoir within the printhead. The ink holding capacity of the fill hole is larger than that of the recessed cavity. The fill hole is precisely formed and positioned within the heater plate by anisotropic etching. The structural member may be fabricated either from two layers of photoresist, a two-stage flat nickel electroform, or a single photoresist layer and a single stage flat nickel electroform.

摘要翻译： 公开了一种根据需要将液滴从记录介质喷出的类型的热喷墨打印头，其喷嘴位于包含在其中的产生发泡元件的上方并大致平行的喷嘴及其制造工艺。 液滴沿着垂直于加热元件表面和位于打印头顶部的喷嘴的轨迹推进; 这种构造通常被称为“屋顶运动器”。 每个打印头包括硅加热器板和流体引导结构构件。 加热器板具有与寻址电极相关联的加热元件的线性阵列和与加热元件阵列平行的细长的墨水填充孔。 结构构件在凹腔内包含至少一个凹腔，多个喷嘴和多个平行壁，其限定用于将墨引导到喷嘴的各个墨通道。 凹腔和填充孔彼此连通并在打印头内形成墨水容器。 填充孔的油墨保持能力大于凹腔的油墨保持能力。 填充孔通过各向异性蚀刻精确地形成并定位在加热器板内。 结构构件可以由两层光致抗蚀剂，两级平面镍电铸或单一光致抗蚀剂层和单级平面镍电铸制成。

公开(公告)号：US4639748A

公开(公告)日：1987-01-27

申请号：US781554

申请日：1985-09-30

申请人： Donald J. Drake ,  William G. Hawkins ,  Michael R. Campanelli

发明人： Donald J. Drake ,  William G. Hawkins ,  Michael R. Campanelli

IPC分类号： B41J2/01 ,  B41J2/015 ,  B41J2/05 ,  B41J2/16 ,  B41J2/17 ,  B41J2/175 ,  G01D15/18

CPC分类号： B41J2/1604 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/17563

摘要： An ink jet printhead having an internal, integrated filtering system and fabricating process therefor is disclosed. Each printhead is composed of two parts aligned and bonded together. One part is a substantially flat substrate which contains on a surface thereof a linear array of heating elements and addressing electrodes. The other part is a flat substrate having a set of concurrently etched recesses in one surface. The set of recesses include a parallel array of elongated recesses for use as capillary filled, ink channels having ink droplet emitting nozzles at one end and having interconnection with a common ink supplying manifold recess at the other ends. The manifold recess contains an internal, closed wall defining a chamber with an ink fill hole. Small passageways are formed in the internal chamber walls to permit passage of ink therefrom into the manifold. Each of the passageways have smaller cross-sectional flow areas than the nozzles to filter the ink, while the total cross-sectional flow area of the passageways is larger than the total cross-sectional flow area of the nozzles. Many printheads can be made simultaneously by producing a plurality of sets of heating element arrays with their addressing electrodes on a silicon wafer and by placing alignment marks thereon at predetermined locations. A corresponding plurality of sets of channels and associated manifolds with internal filters are produced in a second silicon wafer and, in one embodiment, alignment openings are etched thereon at predetermined locations. The two wafers are aligned via the alignment openings and alignment marks, then bonded together and diced into many separate printheads.

摘要翻译： 公开了一种具有内部集成过滤系统及其制造方法的喷墨打印头。 每个打印头由对准和粘合在一起的两个部件组成。 一部分是基本平坦的基板，其在其表面上包含加热元件和寻址电极的线性阵列。 另一部分是在一个表面中具有一组同时蚀刻的凹槽的平坦基底。 这组凹槽包括用作毛细管填充的墨水通道的细长凹槽的平行阵列，墨水通道在一端具有喷墨嘴，并且在另一端具有与公共墨水供应歧管凹槽的互连。 歧管凹槽包含限定具有墨水填充孔的室的内部封闭壁。 在内部室壁中形成小通道，以允许墨水从歧管中通过。 每个通道具有比用于过滤油墨的喷嘴更小的横截面流动面积，而通道的总截面流动面积大于喷嘴的总横截面积面积。 可以通过在硅晶片上产生多组加热元件阵列及其寻址电极并且通过在预定位置放置对准标记来同时制造许多打印头。 在第二硅晶片中产生相应的多组具有内部滤波器的通道和相关联的歧管，并且在一个实施例中，在预定位置处蚀刻对准开口。 两个晶片通过对准开口和对准标记对齐，然后粘合在一起并切成许多单独的打印头。

公开(公告)号：US4388145A

公开(公告)日：1983-06-14

申请号：US316210

申请日：1981-10-29

申请人： William G. Hawkins ,  Jerry G. Black

发明人： William G. Hawkins ,  Jerry G. Black

IPC分类号： H01L27/12 ,  H01L21/02 ,  H01L21/20 ,  H01L21/268 ,  C30B13/06

CPC分类号： H01L21/268 ,  Y10S117/902 ,  Y10S117/904

摘要： A method for laser induced conversion of large predefined areas of amorphous or polycrystalline semiconductor material, upon a substrate, into single crystal areas by using an infrared laser energy source to cause the bulk of heating to occur in the substrate and not in the predefined areas so that the areas are heated to melting by the substrate. The substrate comprises a material which is highly absorptive of the laser wavelength and the predefined areas comprise a material substantially transparent to laser wavelength, and the substrate and areas have different refractive indexes.

摘要翻译： 通过使用红外激光能量源将基板上的大的非晶或多晶半导体材料预定区域的激光诱导转换成单晶区域的方法，使得大量的加热发生在衬底中，而不是在预定区域内 这些区域被基底加热熔化。 衬底包括高度吸收激光波长的材料，并且预定区域包括对激光波长基本上透明的材料，并且衬底和区域具有不同的折射率。