公开(公告)号：US06452309B1

公开(公告)日：2002-09-17

申请号：US09627260

申请日：2000-07-28

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/0946 ,  H01L41/27

摘要： A piezoelectric/electrostrictive device is disclosed comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by a drive of the driving portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions, and a piezoelectric/electrostrictive element including a piezoelectric/electrostrictive operating portion comprising at least a pair or more of electrodes and a piezoelectric/electrostrictive layer formed on at least a part of the outer surface of at least one thin plate portion out of the thin plate portions, one end of the piezoelectric/electrostrictive operating portion in a direction in which the fixing portion is connected with the movable portion exists on the fixing portion or the movable portion, and the other end of the piezoelectric/electrostrictive operating portion is arranged on the thin plate portion, and at least a piezoelectric/electrostrictive layer of the piezoelectric/electrostrictive element exists extending over the movable portion and the fixing portion. The device of the present invention, having high rigidity in the width direction of the thin plate portions, namely in the Y-axis direction, enables rigid joining when functional parts such as sensors, magnetic heads, or the like are fixed to the present device, and further when the present device per se is fixed to another structure.

摘要翻译： 公开了一种压电/电致伸缩器件，其包括驱动部分，该驱动部分由压电/电致伸缩元件的位移驱动，通过驱动部分的驱动而操作的可动部分，用于保持驱动部分和可动部分的固定部分 所述可移动部分经由所述驱动部分与所述固定部分联接，以及由所述驱动部分的内壁，所述可移动部分的内壁和所述固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分，以及包括压电/电致伸缩操作部分的压电/电致伸缩元件，所述压电/电致伸缩操作部分包括至少一对或多个电极和形成在外部的至少一部分上的压电/电致伸缩层 至少一个薄板部分的表面在薄板部分之外，压电/电致伸缩操作部分的固定部分与可动部分连接的方向的一端存在于固定部分或可移动部分上，并且 压电/电致伸缩操作部分的另一端设置在薄板部分上，至少压电/电致伸缩元件的压电/电致伸缩层存在于可移动部分和固定部分上方延伸。 本发明的薄板部的宽度方向的刚性即Y轴方向的本发明的装置能够在诸如传感器，磁头等功能部件被固定在本装置上时进行刚性接合 并且当本装置本身固定到另一结构时。

公开(公告)号：US06441537B1

公开(公告)日：2002-08-27

申请号：US08384469

申请日：1995-02-02

申请人： Yukihisa Takeuchi ,  Koji Kimura ,  Masato Komazawa

发明人： Yukihisa Takeuchi ,  Koji Kimura ,  Masato Komazawa

IPC分类号： H01L4108

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14258 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/0973 ,  H01L41/314 ,  H01L41/335 ,  Y10T29/42

摘要： A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.

摘要翻译： 一种包括陶瓷基板的压电/电致伸缩致动器以及形成在基板的至少一个表面的至少一部分上的至少一个压电/电致伸缩致动器单元，每个压电/电致伸缩致动器单元具有第一电极膜，压电/电致伸缩 膜和第二电极膜，按照说明书的顺序层压，通过热处理在基板上形成压电/电致伸缩致动器单元。

公开(公告)号：US06440174B1

公开(公告)日：2002-08-27

申请号：US08809042

申请日：1997-03-07

申请人： Minoru Usui ,  Takahiro Katakura ,  Fujio Akahane ,  Kazumi Kamoi ,  Satoshi Shinada ,  Yukihisa Takeuchi ,  Nobuo Takahashi

发明人： Minoru Usui ,  Takahiro Katakura ,  Fujio Akahane ,  Kazumi Kamoi ,  Satoshi Shinada ,  Yukihisa Takeuchi ,  Nobuo Takahashi

IPC分类号： H01L4108

CPC分类号： B41J2/1637 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14306 ,  B41J2002/14387 ,  B41J2002/14491

摘要： A piezo-electric/electrostrictive film type chip (50) includes: a ceramic substrate (70) having a spacer plate (74) having a windows-disposed pattern (100) having a plurality of window portions (75) and a thin closure plate (72) for closing the window portions (75) which is unitarily connected with the spacer plate; and a piezo-electric/electrostrictive working portion (71) having a lower electrode (81), a piezo-electric/electrostrictive layer (82), and an upper electrode (83), each being formed in the form of a layer and laminated in this order at a closure portion of the window (75) on the outer surface of the closure plate (72) by a film formation method. A pin hole (52) for positioning is formed in or near the center of gravity of the windows-disposed pattern (100). Deterioration of positional preciseness of the pin hole and a through hole of the piezo-electric/electrostrictive actuator can be minimized, and the piezo-electric/electrostrictive actuator can be unitarily connected with an ink nozzle member with high positional preciseness.

摘要翻译： 压电/电致伸缩薄膜型芯片（50）包括：具有隔板（74）的陶瓷基板（70），所述间隔板具有具有多个窗口部分（75）的窗口布置图案（100）和薄的封闭板 （72），用于封闭与间隔板一体连接的窗口部分（75）; 以及具有下电极（81），压电/电致伸缩层（82）和上电极（83）的压电/电致伸缩工作部分（71），每个都以层的形式形成并层压 按照这种顺序，通过成膜方法在封闭板（72）的外表面上的窗口（75）的封闭部分处。 用于定位的销孔（52）形成在窗户布置图案（100）的重心附近或附近。 压电/电致伸缩致动器的销孔和通孔的位置精度的恶化可以最小化，并且压电/电致伸缩致动器可以与具有高位置精度的墨喷嘴构件一体地连接。

公开(公告)号：US06407481B1

公开(公告)日：2002-06-18

申请号：US09516947

申请日：2000-03-01

申请人： Yukihisa Takeuchi ,  Kazuhiro Yamamoto ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Kazuhiro Yamamoto ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： H01L41/0926 ,  Y10S310/80

摘要： A piezoelectric/electrostrictive device is formed with a connecting plate, a diaphragm, and a substrate which are mutually joined. A joining direction of the connecting plate with the substrate and a joining direction of the connecting plate with the diaphragm are mutually intersected to form a cross. The diaphragm is straddled between the connecting plate and the substrate. A piezoelectric element is arranged on a surface of the diaphragm, and the diaphragm is convexly curved in a direction perpendicular to the two directions forming the cross. The piezoelectric/electrostrictive device is an element for converting electrical energy into mechanical energy such as a mechanical displacement, force or vibrations. Conversely, the piezoelectric/electrostrictive device may be employed to convert mechanical energy into electrical energy, as well as improve the operational characteristics thereof.

摘要翻译： 压电/电致伸缩器件形成有相互连接的连接板，隔膜和基板。 连接板与基板的接合方向和连接板与隔膜的接合方向相互交叉形成十字形。 隔膜横跨连接板和基板之间。 压电元件布置在隔膜的表面上，并且隔膜在垂直于形成十字的两个方向的方向上凸起地弯曲。 压电/电致伸缩器件是用于将电能转换成诸如机械位移，力或振动的机械能的元件。 相反，可以使用压电/电致伸缩器件将机械能转换成电能，以及改善其操作特性。

公开(公告)号：US06395117B1

公开(公告)日：2002-05-28

申请号：US09409703

申请日：1999-10-01

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Hisanori Yamamoto ,  Katsuyuki Takeuchi

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Hisanori Yamamoto ,  Katsuyuki Takeuchi

IPC分类号： B32B3126

CPC分类号： C04B35/111 ,  C04B35/486 ,  C04B35/626 ,  C04B35/64 ,  H05K1/0306 ,  H05K3/4611 ,  H05K3/4629

摘要： Provided are a method for producing ceramic green sheets used for making a ceramic substrate which is reduced in cracking failure and improved in adhesion between laminated layers and is high in lamination property, high in strength and excellent in surface roughness, said method including heat-treating the ceramic powder having a specific particle size by dry grinding a ceramic powder to prepare ceramic powder having a specific average degree of aggregation and preparing a slurry using the ceramic powder so that a green density of the resulting ceramic green sheets is in a desired range, and a method for making a ceramic laminated substrate having excellent various properties by laminating the above ceramic green sheets and firing the laminate.

摘要翻译： 本发明提供一种制造陶瓷基板的方法，所述陶瓷生片用于制造陶瓷基板，所述陶瓷基板的开裂破坏性降低，层压层之间的粘合性提高，层压性高，强度高，表面粗糙度优异，所述方法包括热处理 陶瓷粉末通过干法研磨陶瓷粉末而制备具有特定粒度的陶瓷粉末，以制备具有特定平均聚集度的陶瓷粉末，并使用陶瓷粉末制备浆料，使得所得陶瓷生片的生坯密度在期望的范围内， 以及通过层叠上述陶瓷生片并烧制层压体来制造具有优异的各种性能的陶瓷层叠基板的方法。

公开(公告)号：US06389877B1

公开(公告)日：2002-05-21

申请号：US09367294

申请日：1999-08-10

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01N1100

CPC分类号： G01G3/16

摘要： There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

摘要翻译： 提供了一种双头质量传感器（25），其中在与第二隔膜（21B）接合的第一连接板（22A）和与第二隔膜（21B）接合的第二连接板（22B）之间 相互的侧面，在至少一个平面上设置有主要元件（44）的第一传感板（41A）被桥接，并且包括隔膜（21A），（21B），连接板 22A），（22B），第一感测板（41A）和主要元件（44）接合到传感器基板（27）。 （21A），（21B）的质量的变化通过测量伴随着膜片（21A），（21B）的质量变化的共振部分的共振频率的变化来测量每个膜片（21A），（21B）的质量的变化。 本发明的质量传感器能够容易且高度精确地测量包括细菌和病毒等微生物，化学物质以及气相沉积膜的厚度的纳刻级的微小质量。

公开(公告)号：US06351056B1

公开(公告)日：2002-02-26

申请号：US09494075

申请日：2000-01-28

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： H01L41/43 ,  H01L41/0946 ,  H01L41/314

摘要： A piezoelectric/electrostrictive device including a driving portion, a movable portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, movable portion, and fixing portion. The driving portion includes a pair of mutually opposing thin plate portions and a piezoelectric/electrostrictive (P/E) element. A P/E operating portion of the P/E element is arranged on at least a part of an outer surface of at least one of the thin plate portions, such that one end thereof exists on the fixing portion or the movable portion and the other end thereof is arranged on the thin plate portion. At least one end of a P/E layer of the P/E element exists on the fixing portion or the movable portion, and the other end is arranged on the thin plate portion. The Young's modulus Y1 of a material composing the thin plate portions and the Young's modulus Y2 of a material composing the P/E layer have a relationship satisfying 1

摘要翻译： 一种压电/电致伸缩装置，包括驱动部分，可动部分，用于保持驱动部分和可动部分的固定部分，可动部分通过驱动部分与固定部分相连，以及由内壁形成的孔 驱动部分，可动部分和固定部分。 驱动部分包括一对相互相对的薄板部分和压电/电致伸缩（P / E）元件。 P / E元件的AP / E操作部分布置在至少一个薄板部分的外表面的至少一部分上，使得其一端存在于固定部分或可移动部分上，另一端 布置在薄板部分上。 P / E元件的P / E层的至少一端存在于固定部或可动部上，另一端配置在薄板部上。 构成薄板部分的材料的杨氏模量Y1和构成P / E层的材料的杨氏模量Y2具有满足1

公开(公告)号：US06348115B1

公开(公告)日：2002-02-19

申请号：US09382071

申请日：1999-08-24

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Katsuyuki Takeuchi

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Katsuyuki Takeuchi

IPC分类号： B32B3126

CPC分类号： B32B18/00 ,  C04B2237/32 ,  C04B2237/62 ,  C04B2237/66 ,  C04B2237/68 ,  H01L41/098

摘要： A method for forming a ceramic diaphragm structure includes providing a laminate of a ceramic green substrate having at least one window and a plurality of layers, and a thin ceramic green sheet superimposed on the ceramic green substrate to cover the at least one window. The laminate is fired so that the ceramic green sheet provides a diaphragm portion protruding in a direction away from the at least one window, and the fired laminate is subjected to a second firing step under load.

摘要翻译： 一种形成陶瓷膜结构的方法包括提供具有至少一个窗口和多个层的陶瓷生坯基板的层叠体和叠置在陶瓷生坯基板上以覆盖至少一个窗口的薄陶瓷生片。 对层压体进行烧制，使得陶瓷生片提供沿远离至少一个窗口的方向突出的隔膜部分，并且在负载下对烧制的层压体进行第二烧制步骤。

公开(公告)号：US06326563B1

公开(公告)日：2001-12-04

申请号：US09401625

申请日：1999-09-22

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G314

CPC分类号： G01G3/13

摘要： A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

摘要翻译： 质量传感器包括隔膜，具有布置在连接相应侧面的至少一个表面的至少一部分上的压电元件的感测板，由隔膜和感测板夹持的连接板，其中隔膜，感测板， 压电元件和连接板形成谐振部分。 连接板跨接在形成在传感器基板中的凹部的侧面，并且感测板至少与凹部的底部接合。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。 质量传感器能够容易且准确地测量包括诸如细菌和病毒等微生物或化学物质的纳刻级的微小质量或气相沉积膜的厚度。

公开(公告)号：US06323582B1

公开(公告)日：2001-11-27

申请号：US09473835

申请日：1999-12-28

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/43 ,  H01L41/0946 ,  H01L41/27

摘要： Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion.

摘要翻译： 本发明提供一种压电/电致伸缩器件，其特征在于，包括：驱动部，其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部;以及固定部， 可动部分，固定部分和可动部分经由驱动部分联接，以及由驱动部分的内壁，可移动部分的内壁和固定部分的内壁形成的孔。