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公开(公告)号：US08703621B2
公开(公告)日：2014-04-22
申请号：US13542072
申请日：2012-07-05
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium according to one embodiment includes forming a mask layer having a pattern regularly arranged in a longitudinal direction on a magnetic recording medium containing a substrate and a magnetic recording layer, forming a recording portion having a magnetic pattern and a non-recording portion by patterning the magnetic recording layer, and submitting the mask layer to a peeling liquid to peel the mask layer. The mask layer contains a lamination layer of a lift-off layer, a first hard mask, and a second hard mask. The second hard mask is formed of a material that is different from the material of the first hard disk and the material is dissolvable in the same peeling liquid as the peeling liquid that dissolves the lift-off layer.
摘要翻译： 根据一个实施例的磁记录介质的制造方法包括在包含基板和磁记录层的磁记录介质上形成具有沿纵向规则排列的图案的掩模层，形成具有磁性图案的记录部分和 通过图案化磁记录层，并将掩模层提交到剥离液体以剥离掩模层，从而形成非记录部分。 掩模层包含剥离层，第一硬掩模和第二硬掩模的层压层。 第二硬掩模由与第一硬盘的材料不同的材料形成，并且该材料可溶解在与溶解剥离层的剥离液相同的剥离液中。
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公开(公告)号：US20130056441A1
公开(公告)日：2013-03-07
申请号：US13542072
申请日：2012-07-05
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium according to one embodiment includes forming a mask layer having a pattern regularly arranged in a longitudinal direction on a magnetic recording medium containing a substrate and a magnetic recording layer, forming a recording portion having a magnetic pattern and a non-recording portion by patterning the magnetic recording layer, and submitting the mask layer to a peeling liquid to peel the mask layer. The mask layer contains a lamination layer of a lift-off layer, a first hard mask, and a second hard mask. The second hard mask is formed of a material that is different from the material of the first hard disk and the material is dissolvable in the same peeling liquid as the peeling liquid that dissolves the lift-off layer.
摘要翻译： 根据一个实施例的磁记录介质的制造方法包括在包含基板和磁记录层的磁记录介质上形成具有沿纵向规则排列的图案的掩模层，形成具有磁性图案的记录部分和 通过图案化磁记录层，并将掩模层提交到剥离液体以剥离掩模层，从而形成非记录部分。 掩模层包含剥离层，第一硬掩模和第二硬掩模的层压层。 第二硬掩模由与第一硬盘的材料不同的材料形成，并且该材料可溶解在与溶解剥离层的剥离液相同的剥离液中。
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63.发明申请公开(公告)号：US20120237798A1
公开(公告)日：2012-09-20
申请号：US13294130
申请日：2011-11-10
CPC分类号： G11B5/855 , G11B5/7325
摘要： According to one embodiment, a magnetic recording medium is formed by performing gas ion irradiation by using a magnetism deactivating gas on a stack including a perpendicular magnetic recording layer, an Ru nonmagnetic underlayer containing a magnetism deactivating element selected from chromium, titanium, and silicon, and a nonmagnetic substrate. Before gas ion irradiation, the perpendicular magnetic recording layer contains platinum and at least one of iron and cobalt. Gas ion irradiation is performed using nitrogen gas alone or a gas mixture of nitrogen gas and at least one gas selected from the group consisting of helium, hydrogen, and B2H6.
摘要翻译： 根据一个实施例，通过在包括垂直磁记录层，含有选自铬，钛和硅的磁性去活化元素的Ru非磁性底层的堆叠上使用磁性去活化气体进行气体离子照射来形成磁记录介质， 和非磁性基板。 在气体离子照射之前，垂直磁记录层含有铂和至少一种铁和钴。 使用单独的氮气或氮气和选自由氦，氢和B2H6组成的组中的至少一种气体的气体混合物进行气体离子照射。
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64.发明授权公开(公告)号：US09012046B2
公开(公告)日：2015-04-21
申请号：US13294130
申请日：2011-11-10
CPC分类号： G11B5/855 , G11B5/7325
摘要： According to one embodiment, a magnetic recording medium is formed by performing gas ion irradiation by using a magnetism deactivating gas on a stack including a perpendicular magnetic recording layer, an Ru nonmagnetic underlayer containing a magnetism deactivating element selected from chromium, titanium, and silicon, and a nonmagnetic substrate. Before gas ion irradiation, the perpendicular magnetic recording layer contains platinum and at least one of iron and cobalt. Gas ion irradiation is performed using nitrogen gas alone or a gas mixture of nitrogen gas and at least one gas selected from the group consisting of helium, hydrogen, and B2H6.
摘要翻译： 根据一个实施例，通过在包括垂直磁记录层，含有选自铬，钛和硅的磁性去活化元素的Ru非磁性底层的堆叠上使用磁性去活化气体进行气体离子照射来形成磁记录介质， 和非磁性基板。 在气体离子照射之前，垂直磁记录层含有铂和至少一种铁和钴。 使用单独的氮气或氮气和选自由氦，氢和B2H6组成的组中的至少一种气体的气体混合物进行气体离子照射。
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65.发明申请公开(公告)号：US20120052328A1
公开(公告)日：2012-03-01
申请号：US13166718
申请日：2011-06-22
CPC分类号： B44C1/22 , G11B5/746 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a method of manufacturing a patterned medium includes forming an implantation depth-adjusting layer above a magnetic recording layer, the magnetic recording layer being made of a material that is deactivated when implanted with a chemical species, and the implantation depth-adjusting layer being made of a material that is etched when irradiated with an ion beam of the chemical species and irradiating the implantation depth-adjusting layer with the ion beam to implant the chemical species into a part of the magnetic recording layer through the implantation depth-adjusting layer while etching the implantation depth-adjusting layer by an action of the ion beam to decrease a thickness of the implantation depth-adjusting laver.
摘要翻译： 根据一个实施例，制造图案化介质的方法包括在磁记录层上形成注入深度调节层，所述磁记录层由在注入化学物质时失活的材料制成， 所述调整层由当被所述化学物质的离子束照射时被蚀刻的材料制成，并且用所述离子束照射所述注入深度调节层，以通过所述植入深度调制层将所述化学物质注入到所述磁记录层的一部分中， 同时通过离子束的作用蚀刻植入深度调节层，以减小植入深度调节紫菜的厚度。
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66.发明授权公开(公告)号：US08419952B2
公开(公告)日：2013-04-16
申请号：US13166718
申请日：2011-06-22
IPC分类号： B44C1/22
CPC分类号： B44C1/22 , G11B5/746 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a method of manufacturing a patterned medium includes forming an implantation depth-adjusting layer above a magnetic recording layer, the magnetic recording layer being made of a material that is deactivated when implanted with a chemical species, and the implantation depth-adjusting layer being made of a material that is etched when irradiated with an ion beam of the chemical species and irradiating the implantation depth-adjusting layer with the ion beam to implant the chemical species into a part of the magnetic recording layer through the implantation depth-adjusting layer while etching the implantation depth-adjusting layer by an action of the ion beam to decrease a thickness of the implantation depth-adjusting layer.
摘要翻译： 根据一个实施例，制造图案化介质的方法包括在磁记录层上形成注入深度调节层，所述磁记录层由在注入化学物质时失活的材料制成， 所述调整层由当被所述化学物质的离子束照射时被蚀刻的材料制成，并且用所述离子束照射所述注入深度调节层，以通过所述植入深度调制层将所述化学物质注入到所述磁记录层的一部分中， 同时通过离子束的作用蚀刻植入深度调节层，以减小注入深度调节层的厚度。
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公开(公告)号：US20130216864A1
公开(公告)日：2013-08-22
申请号：US13597608
申请日：2012-08-29
CPC分类号： G11B5/855
摘要： According to at least one embodiment, a release layer, a first mask layer containing a first metal material, an antidiffusion layer containing an oxide or nitride of the first metal material, and a second mask layer containing a second metal material are formed on a magnetic recording layer, a resist layer is formed on the second mask layer, and projections pattern is formed in the resist layer and sequentially transferred to the second mask layer, antidiffusion layer, first mask layer, release layer, and magnetic recording layer. After that, the release layer is removed.
摘要翻译： 根据至少一个实施方式，在磁性体上形成剥离层，含有第一金属材料的第一掩模层，含有第一金属材料的氧化物或氮化物的防扩散层，以及含有第二金属材料的第二掩模层 在第二掩模层上形成抗蚀剂层，并且在抗蚀剂层中形成突起图案，并依次转印到第二掩模层，反扩散层，第一掩模层，剥离层和磁记录层。 之后，去除释放层。
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公开(公告)号：US08858809B2
公开(公告)日：2014-10-14
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US09028704B2
公开(公告)日：2015-05-12
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130065083A1
公开(公告)日：2013-03-14
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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