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公开(公告)号：US09028704B2
公开(公告)日：2015-05-12
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130216864A1
公开(公告)日：2013-08-22
申请号：US13597608
申请日：2012-08-29
CPC分类号： G11B5/855
摘要： According to at least one embodiment, a release layer, a first mask layer containing a first metal material, an antidiffusion layer containing an oxide or nitride of the first metal material, and a second mask layer containing a second metal material are formed on a magnetic recording layer, a resist layer is formed on the second mask layer, and projections pattern is formed in the resist layer and sequentially transferred to the second mask layer, antidiffusion layer, first mask layer, release layer, and magnetic recording layer. After that, the release layer is removed.
摘要翻译： 根据至少一个实施方式，在磁性体上形成剥离层，含有第一金属材料的第一掩模层，含有第一金属材料的氧化物或氮化物的防扩散层，以及含有第二金属材料的第二掩模层 在第二掩模层上形成抗蚀剂层，并且在抗蚀剂层中形成突起图案，并依次转印到第二掩模层，反扩散层，第一掩模层，剥离层和磁记录层。 之后，去除释放层。
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公开(公告)号：US20140002929A1
公开(公告)日：2014-01-02
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130248485A1
公开(公告)日：2013-09-26
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US08858809B2
公开(公告)日：2014-10-14
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US20130065083A1
公开(公告)日：2013-03-14
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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公开(公告)号：US09099143B2
公开(公告)日：2015-08-04
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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8.发明授权公开(公告)号：US09012046B2
公开(公告)日：2015-04-21
申请号：US13294130
申请日：2011-11-10
CPC分类号： G11B5/855 , G11B5/7325
摘要： According to one embodiment, a magnetic recording medium is formed by performing gas ion irradiation by using a magnetism deactivating gas on a stack including a perpendicular magnetic recording layer, an Ru nonmagnetic underlayer containing a magnetism deactivating element selected from chromium, titanium, and silicon, and a nonmagnetic substrate. Before gas ion irradiation, the perpendicular magnetic recording layer contains platinum and at least one of iron and cobalt. Gas ion irradiation is performed using nitrogen gas alone or a gas mixture of nitrogen gas and at least one gas selected from the group consisting of helium, hydrogen, and B2H6.
摘要翻译： 根据一个实施例，通过在包括垂直磁记录层，含有选自铬，钛和硅的磁性去活化元素的Ru非磁性底层的堆叠上使用磁性去活化气体进行气体离子照射来形成磁记录介质， 和非磁性基板。 在气体离子照射之前，垂直磁记录层含有铂和至少一种铁和钴。 使用单独的氮气或氮气和选自由氦，氢和B2H6组成的组中的至少一种气体的气体混合物进行气体离子照射。
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9.发明申请公开(公告)号：US20120052328A1
公开(公告)日：2012-03-01
申请号：US13166718
申请日：2011-06-22
CPC分类号： B44C1/22 , G11B5/746 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a method of manufacturing a patterned medium includes forming an implantation depth-adjusting layer above a magnetic recording layer, the magnetic recording layer being made of a material that is deactivated when implanted with a chemical species, and the implantation depth-adjusting layer being made of a material that is etched when irradiated with an ion beam of the chemical species and irradiating the implantation depth-adjusting layer with the ion beam to implant the chemical species into a part of the magnetic recording layer through the implantation depth-adjusting layer while etching the implantation depth-adjusting layer by an action of the ion beam to decrease a thickness of the implantation depth-adjusting laver.
摘要翻译： 根据一个实施例，制造图案化介质的方法包括在磁记录层上形成注入深度调节层，所述磁记录层由在注入化学物质时失活的材料制成， 所述调整层由当被所述化学物质的离子束照射时被蚀刻的材料制成，并且用所述离子束照射所述注入深度调节层，以通过所述植入深度调制层将所述化学物质注入到所述磁记录层的一部分中， 同时通过离子束的作用蚀刻植入深度调节层，以减小植入深度调节紫菜的厚度。
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10.发明授权公开(公告)号：US08980451B2
公开(公告)日：2015-03-17
申请号：US13185880
申请日：2011-07-19
申请人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
摘要： According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
摘要翻译： 根据一个实施例，在制造磁记录介质的方法中，磁记录介质被构造为使得铁磁记录部分以期望的轨迹图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后 在铁磁膜上形成掩模，该掩模在磁道或位之间隔离铁磁膜的区域之上具有开口。 随后，通过打开掩模，在铁磁膜的区域上辐射B基气体，从而增加该区域的B含量以使该区域不磁化。
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