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公开(公告)号：US08858809B2
公开(公告)日：2014-10-14
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US09099143B2
公开(公告)日：2015-08-04
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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公开(公告)号：US09028704B2
公开(公告)日：2015-05-12
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130065083A1
公开(公告)日：2013-03-14
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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公开(公告)号：US20140002929A1
公开(公告)日：2014-01-02
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130248485A1
公开(公告)日：2013-09-26
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US08703621B2
公开(公告)日：2014-04-22
申请号：US13542072
申请日：2012-07-05
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium according to one embodiment includes forming a mask layer having a pattern regularly arranged in a longitudinal direction on a magnetic recording medium containing a substrate and a magnetic recording layer, forming a recording portion having a magnetic pattern and a non-recording portion by patterning the magnetic recording layer, and submitting the mask layer to a peeling liquid to peel the mask layer. The mask layer contains a lamination layer of a lift-off layer, a first hard mask, and a second hard mask. The second hard mask is formed of a material that is different from the material of the first hard disk and the material is dissolvable in the same peeling liquid as the peeling liquid that dissolves the lift-off layer.
摘要翻译： 根据一个实施例的磁记录介质的制造方法包括在包含基板和磁记录层的磁记录介质上形成具有沿纵向规则排列的图案的掩模层，形成具有磁性图案的记录部分和 通过图案化磁记录层，并将掩模层提交到剥离液体以剥离掩模层，从而形成非记录部分。 掩模层包含剥离层，第一硬掩模和第二硬掩模的层压层。 第二硬掩模由与第一硬盘的材料不同的材料形成，并且该材料可溶解在与溶解剥离层的剥离液相同的剥离液中。
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公开(公告)号：US20130056441A1
公开(公告)日：2013-03-07
申请号：US13542072
申请日：2012-07-05
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium according to one embodiment includes forming a mask layer having a pattern regularly arranged in a longitudinal direction on a magnetic recording medium containing a substrate and a magnetic recording layer, forming a recording portion having a magnetic pattern and a non-recording portion by patterning the magnetic recording layer, and submitting the mask layer to a peeling liquid to peel the mask layer. The mask layer contains a lamination layer of a lift-off layer, a first hard mask, and a second hard mask. The second hard mask is formed of a material that is different from the material of the first hard disk and the material is dissolvable in the same peeling liquid as the peeling liquid that dissolves the lift-off layer.
摘要翻译： 根据一个实施例的磁记录介质的制造方法包括在包含基板和磁记录层的磁记录介质上形成具有沿纵向规则排列的图案的掩模层，形成具有磁性图案的记录部分和 通过图案化磁记录层，并将掩模层提交到剥离液体以剥离掩模层，从而形成非记录部分。 掩模层包含剥离层，第一硬掩模和第二硬掩模的层压层。 第二硬掩模由与第一硬盘的材料不同的材料形成，并且该材料可溶解在与溶解剥离层的剥离液相同的剥离液中。
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公开(公告)号：US20130252029A1
公开(公告)日：2013-09-26
申请号：US13599569
申请日：2012-08-30
申请人： Kazutaka Takizawa , Akira Watanabe , Kaori Kimura , Akihiko Takeo
发明人： Kazutaka Takizawa , Akira Watanabe , Kaori Kimura , Akihiko Takeo
摘要： In a removing step, a phase-separated release solution including a first phase containing a first solvent capable of dissolving a release layer and a second phase containing a second solvent having a property of separating from the first solvent is prepared, and a patterned magnetic recording medium is dipped in the first phase together with a release layer, mask layer, and resist layer remaining on a magnetic recording layer, thereby removing the release layer. After that, the patterned magnetic recording medium is moved to the second phase, and separated from the first phase containing the release layer and the layers remaining on the release layer.
摘要翻译： 在去除步骤中，制备包括含有能够溶解脱模层的第一溶剂的第一相和含有具有与第一溶剂分离的性质的第二溶剂的第二相的相分离的脱模溶液，以及图案化磁记录 将介质与保留在磁记录层上的剥离层，掩模层和抗蚀剂层一起浸渍在第一相中，从而除去剥离层。 之后，图案化的磁记录介质移动到第二相，并且从包含剥离层的第一相和保留在剥离层上的层分离。
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公开(公告)号：US20120050920A1
公开(公告)日：2012-03-01
申请号：US13186389
申请日：2011-07-19
申请人： Akihiko Takeo , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami , Hideaki Fukuzawa
发明人： Akihiko Takeo , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami , Hideaki Fukuzawa
CPC分类号： G11B5/3903 , B82Y25/00 , B82Y40/00 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3983 , H01F10/3259 , H01F10/3272 , H01F10/3295 , H01F41/303 , H01F41/325 , H01L43/12 , Y10T428/1129
摘要： According to one embodiment, a method of manufacturing a magnetoresistive element includes a layered structure and a pair of electrodes, the layered structure including a cap layer, a magnetization pinned layer, a magnetization free layer, a spacer layer and a functional layer provided in the magnetization pinned layer, between the magnetization pinned layer and the spacer layer, between the spacer layer and the magnetization free layer, in the magnetization free layer, or between the magnetization free layer and the cap layer and including an oxide, the method including forming a film including a base material of the functional layer, performing an oxidation treatment on the film using a gas containing oxygen in a form of at least one selected from the group consisting of molecule, ion, plasma and radical, and performing a reduction treatment using a reducing gas on the film after the oxidation treatment.
摘要翻译： 根据一个实施例，制造磁阻元件的方法包括层状结构和一对电极，所述层叠结构包括盖层，磁化固定层，磁化自由层，间隔层和功能层 在磁化被钉扎层和间隔层之间，在间隔层和磁化自由层之间，在磁化自由层中，或在磁化自由层和覆盖层之间并包括氧化物的磁化钉扎层，该方法包括形成 膜，其包括功能层的基材，使用含有选自分子，离子，等离子体和自由基中的至少一种形式的含氧气体，对膜进行氧化处理，并使用 在氧化处理后还原气膜。
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