公开(公告)号：US08544500B2

公开(公告)日：2013-10-01

申请号：US13108909

申请日：2011-05-16

Applicant: Hiroshi Itafuji ,  Masayuki Kouketsu

Inventor： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC: F16K11/10 ,  B08B9/032

CPC classification number: F16K27/003 ,  F16K27/0236 ,  Y10T137/4259 ,  Y10T137/8158 ,  Y10T137/87249 ,  Y10T137/87925

Abstract: This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve.

Abstract translation: 本发明提供一种化学流体流动通道联接装置，其耦合和分离化学流体流动通道。 联接装置包括：第一联接单元; 和第二耦合单元。 第一联接单元包括第一化学流体阀构件室和构造成打开和关闭与第一化学流体流动通道连通的第一化学流体开口的第一阀构件; 以及构造成打开和关闭清洗流体供给流动通道的清洗液供应控制阀。 第二联接单元包括第二化学流体阀构件室和构造成打开和关闭连接到第二化学流体流动通道的第二化学流体开口的第二阀构件; 和清洗液排出控制阀。

公开(公告)号：USD687515S1

公开(公告)日：2013-08-06

申请号：US29412269

申请日：2012-02-01

Applicant: Hiroki Iwata ,  Akina Imamura ,  Hiroyuki Murase ,  Hideyuki Takeda ,  Shinji Ikenoya

Designer： Hiroki Iwata ,  Akina Imamura ,  Hiroyuki Murase ,  Hideyuki Takeda ,  Shinji Ikenoya

公开(公告)号：US08444111B2

公开(公告)日：2013-05-21

申请号：US12874692

申请日：2010-09-02

Applicant: Katsunori Hirose

Inventor： Katsunori Hirose

IPC: F16K31/00 ,  F16K35/00

CPC classification number: F16K51/02 ,  F16K31/1221 ,  F16K31/1225 ,  F16K31/1226 ,  Y10T137/7256 ,  Y10T137/7762

Abstract: A combined valve includes a pilot mechanism and a manual mechanism. The manual mechanism includes: a flange formed with a communication passage; a housing including a holding hole formed in an axial direction for rotatably holding the manual mechanism and a storage opening part having a wider diameter than the holding hole and housing the flange in position; an operation port located in a position corresponding to the holding hole and internally holding a joint; and an exhaust port opening in an inner wall of the storage opening. The manual mechanism further includes a first sealing member forming a connecting passage to connect the operation port and the communication passage between the housing and the manual mechanism; and a second sealing member sealingly separating an opening portion of the exhaust port opening in the inner wall of the storage opening part from the connecting passage.

Abstract translation: 组合阀包括导向机构和手动机构。 手动机构包括：形成有连通通道的凸缘; 壳体，其包括沿轴向形成的用于可旋转地保持手动机构的保持孔和具有比保持孔更宽的直径的容纳开口部，并将凸缘容纳在适当位置; 位于与保持孔对应的位置并且内部保持接头的操作口; 以及在所述存储开口的内壁中开口的排气口。 所述手动机构还包括形成连接所述操作口和所述壳体与所述手动机构之间的所述连通路的连接路的第一密封构件; 以及第二密封构件，其将所述存储开口部的内壁中的所述排气口开口的开口部与所述连接通路密封。

公开(公告)号：US20130092269A1

公开(公告)日：2013-04-18

申请号：US13602719

申请日：2012-09-04

Applicant: Akiko NAKADA ,  Yoji MORI ,  Naoya SHIROYAMA ,  Minoru ITO

Inventor： Akiko NAKADA ,  Yoji MORI ,  Naoya SHIROYAMA ,  Minoru ITO

IPC: G05D7/00

CPC classification number: G05D7/0635 ,  G01F1/00 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/87917

Abstract: A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device.

Abstract translation: 气体流量监测系统设置在处理气体管线中，每个气体管线布置成经由流量控制装置将气体供应到预定的处理室，该系统被配置为测量流量控制装置之前和之后的气体压力的下降或上升以监测流量 流量控制装置的速率。 该系统包括：第一流量监测单元，其位于处理气体管线中所选择的一个流量控制装置的上游，放置在处理室上游的排放通道中的第二流量监测单元，以及不断监测流量的控制器 的流量控制装置，并且当第一流量监视单元检测到流量异常两次以上时，命令第二流量监视单元重新验证流量异常是否存在于 流量控制装置。

公开(公告)号：US20120160344A1

公开(公告)日：2012-06-28

申请号：US13413593

申请日：2012-03-06

Applicant: Hiroshi ITAFUJI ,  Masayuki KOUKETSU

Inventor： Hiroshi ITAFUJI ,  Masayuki KOUKETSU

IPC: F15D1/00 ,  F16K1/00

CPC classification number: H01L21/6719 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/2562 ,  Y10T137/2572 ,  Y10T137/7758 ,  Y10T137/7761 ,  Y10T137/777

Abstract: The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.

Abstract translation: 本发明提供了一种配置成控制真空室中的真空压力的真空控制阀。 真空控制阀包括控制阀主体，操作单元，气缸，偏压单元和打开阀。 操作单元和气缸包括开阀操作室和关闭负载产生室。 关闭负荷产生室被构造成与阀打开操作室具有共同的轴向中心线，并且根据工作流体的供给沿着减小升程的方向产生施加到操作单元的负载。 并且关闭负载产生室可以形成在杆的内部。

公开(公告)号：US20120097881A1

公开(公告)日：2012-04-26

申请号：US13272705

申请日：2011-10-13

Applicant: Tatsuhito AOYAMA

Inventor： Tatsuhito AOYAMA

IPC: F16K51/00

CPC classification number: F16K1/425

Abstract: In a valve seat structure of a fluid control valve comprising a valve element, a body formed with an inlet port and an outlet port, and a valve seat member provided in the body, the fluid control valve being configured to bring the valve element into or out of contact with the valve seat member to control the flow of a fluid, the valve seat member is formed in a ring shape and includes a valve seat portion with which the valve element will come into our out of contact. Assuming that a thickness of the valve seat portion in a radial direction of the valve seat member is a first thickness t1 (0

Abstract translation: 在包括阀元件的流体控制阀的阀座结构中，形成有入口和出口的主体以及设置在主体中的阀座构件，所述流体控制阀构造成使阀元件进入或 与阀座构件不接触以控制流体的流动，阀座构件形成为环形，并且包括阀座部分，阀元件将与该阀座部分脱离接触。 假设阀座部分在阀座部件的径向方向上的厚度为第一厚度t1（0

公开(公告)号：US20110240672A1

公开(公告)日：2011-10-06

申请号：US13069300

申请日：2011-03-22

Applicant: Isao NAGASAKI ,  Akihiro ITO ,  Tetsuya TOYODA

Inventor： Isao NAGASAKI ,  Akihiro ITO ,  Tetsuya TOYODA

IPC: B67D1/00 ,  B65D88/54

CPC classification number: F04B43/073

Abstract: This invention provides a chemical supply system for supplying chemical solution from a chemical tank. The chemical supply system includes a chemical supply pump, a pressure adjuster configured to suction the chemical solution into the pump chamber by setting the pressure of working gas to a suction pressure, a switching controller configured to switch the suction-side opening-closing valve to the open state for starting to fill the pump chamber with the chemical solution, a pressure detector configured to detect at least one of a gas pressure in a space connected to the working chamber and a gas pressure in the working chamber when the suction-side opening-closing valve is switched to the open state and starts an inflow of the chemical solution to the pump chamber, and a suction controller configured to control the suction pressure applied to the working chamber by the pressure adjuster, based on a detection result of the pressure detector.

Abstract translation: 本发明提供了一种用于从化学罐供应化学溶液的化学品供应系统。 化学品供给系统包括化学品供给泵，压力调节器，其构造成通过将工作气体的压力设定为吸入压力而将化学溶液吸入泵室;切换控制器，其将吸入侧开闭阀切换为 用于开始用化学溶液填充泵室的打开状态;压力检测器，构造成检测连接到工作室的空间中的气体压力和当吸入侧开口处的工作室中的气体压力中的至少一个时 闭合阀切换到打开状态并开始将化学溶液流入泵室，以及吸入控制器，其构造成基于压力的检测结果来控制由压力​​调节器施加到工作室的吸入压力 探测器。

公开(公告)号：US20110216186A1

公开(公告)日：2011-09-08

申请号：US13006101

申请日：2011-01-13

Applicant: Takayuki Shinyama

Inventor： Takayuki Shinyama

IPC: H04N7/18 ,  G06K9/00

CPC classification number: G06K9/00 ,  H04N7/18

Abstract: A solder printing inspection apparatus for inspection of solder printed on a circuit board has a multiplicity of lands for mounting of electronic components. The apparatus includes an irradiation unit for irradiating a light on the circuit board, an imaging unit for imaging the circuit board irradiated by the light, a solder bridge detection unit for detecting a solder bridge connecting two of the lands based on an image data imaged by the imaging unit, a distance calculation unit for calculating a bridge distance as distance between two lands contacting the solder bridge or solder bridging regions or solder detection frames corresponding to the two lands contacting the solder bridge, and a distance determination unit for determination of whether or not the bridge distance is within a permissible range.

Abstract translation: 用于检查印刷在电路板上的焊料的焊料印刷检查装置具有用于安装电子部件的多个焊盘。 该装置包括用于照射电路板上的光的照射单元，用于对由该光照射的电路板进行摄像的成像单元，用于检测连接两个平台的焊接桥的焊接桥检测单元，基于由 所述成像单元，距离计算单元，用于计算桥接距离，作为与所述焊接桥或焊料桥接区域接触的两个平台之间的距离或与所述焊接桥接触的所述两个焊盘相对应的焊料检测框架的距离;以及距离确定单元， 桥距不在允许范围内。

公开(公告)号：US07969109B2

公开(公告)日：2011-06-28

申请号：US12336152

申请日：2008-12-16

Applicant: Shuzo Masuo ,  Tsuyoshi Kanada

Inventor： Shuzo Masuo ,  Tsuyoshi Kanada

IPC: H02K23/00 ,  H02K37/00

CPC classification number: G05B19/0423 ,  B23Q5/40 ,  G05B19/054 ,  G05B2219/41309 ,  G05B2219/41311 ,  G05B2219/45006 ,  G05B2219/45083 ,  G05B2219/45207

Abstract: An electric actuator includes a motion conversion mechanism and a position detector. The motion conversion mechanism converts rotation of a rotary shaft of a motor into linear motion of an output shaft. The position detector detects a permanent magnet M, which moves integrally with the output shaft. A motor control portion controls the motor based on commands from a host command unit. A control program for controlling the motor includes, as control modes, six fluid pressure cylinder modes, according to which the motor is controlled. Specifically, each of the control modes corresponds to one of the cases where the fluid pressure cylinder is controlled by three solenoid valves, or a two-position single solenoid valve, a two-position double solenoid valve, and a three-position double solenoid valve. The motor is controlled according to the selected control mode.

Abstract translation: 电致动器包括运动转换机构和位置检测器。 运动转换机构将马达的旋转轴的旋转转换为输出轴的线性运动。 位置检测器检测与输出轴一体移动的永磁体M。 马达控制部根据来自主机指令单元的命令来控制马达。 用于控制电动机的控制程序包括作为控制模式的六个流体压力缸模式，根据该模式控制电动机。 具体地说，每个控制模式对应于流体压力缸由三个电磁阀或两位单电磁阀，两位双电磁阀和三位双电磁阀控制的情况之一 。 电机根据所选择的控制模式进行控制。

公开(公告)号：US20100312405A1

公开(公告)日：2010-12-09

申请号：US12787762

申请日：2010-05-26

Applicant: Tetsujiro KONO ,  Minoru Itoh

Inventor： Tetsujiro KONO ,  Minoru Itoh

IPC: G05D11/02 ,  G05D7/00 ,  G05D16/00

CPC classification number: G05D7/0635 ,  G05D16/206

Abstract: A fluid control method for maintaining a split flow ratio of main gas to be split from a main line into first and second sublines constant before and after additive gas is supplied to one of the sublines is achieved by controlling a flow rate of the main gas to be supplied from the main line to a chamber through the first and second sublines based on the pressure in each of the first and second sublines when the additive gas is to be supplied to the second subline. The pressure in the first subline not supplied with the additive gas is controlled to remain constant during supply of the additive gas to the second subline.

Abstract translation: 一种流体控制方法，通过将主气体的流量控制为：将主气体的流量控制为：将主气体的流量控制为 当将添加气体供给到第二子线路时，基于第一和第二子线路中的每一个中的压力，通过第一和第二子线路从主线路供应到室。 在向第二子线路供给添加剂气体的同时，控制未提供添加气体的第一子系统中的压力保持恒定。