公开(公告)号：US06758085B2

公开(公告)日：2004-07-06

申请号：US10463128

申请日：2003-06-17

Applicant: Yasunari Nagaike ,  Yasushi Nakamura ,  Yoshiaki Ito

Inventor： Yasunari Nagaike ,  Yasushi Nakamura ,  Yoshiaki Ito

IPC: G01B528

CPC classification number: G01B5/008 ,  G01B3/008 ,  G01B5/004 ,  G01B5/20

Abstract: An apparatus for measuring a surface profile of an object to be measured includes a measuring probe positioned to contact the surface of the object to be measured, a guide mechanism for supporting and guiding the measuring probe in an axial direction of the measuring probe, a tilt angle adjustment mechanism for tilting the guide mechanism at a predetermined tilt angle with respect to a horizontal direction so that the measuring probe contacts the surface of the object to be measured with a predetermined contact force, and a drive mechanism for relatively driving at least one of the measuring probe and the object to scan the surface of the object to be measured with the measuring probe. The contact force is derived from a tilt direction component of the gravity of the measuring probe generated when the measuring probe is tilted.

Abstract translation: 用于测量被测量物体的表面轮廓的装置包括：测量探头，定位成接触待测物体的表面，用于在测量探针的轴向方向上支撑和引导测量探针的引导机构，倾斜 角度调节机构，用于使引导机构相对于水平方向倾斜预定的倾斜角度，使得测量探针以预定的接触力与被测量物体的表面接触;以及驱动机构，用于相对地驱动至少一个 测量探头和物体用测量探头扫描待测物体的表面。 接触力来源于测量探头倾斜时产生的测量探头的重力的倾斜方向分量。

公开(公告)号：US06622114B1

公开(公告)日：2003-09-16

申请号：US09599522

申请日：2000-06-23

Applicant: Franz Szenger ,  Günter Grupp ,  Ralf Bernhardt

Inventor： Franz Szenger ,  Günter Grupp ,  Ralf Bernhardt

IPC: G06F1500

CPC classification number: B25J9/1638 ,  G01B3/008 ,  G01B7/012

Abstract: The invention is directed to a method for determining the weight of a probe of a coordinate measuring machine wherein the probe is connected to a probe head (1) of the machine. The machine includes a control unit and the weight of the probe (3) is preferably statically determined without active control of the movement of the probe. Signals from the probe (3) and/or the probe head (1) are supplied to the control unit (51).

Abstract translation: 本发明涉及一种用于确定坐标测量机的探头的重量的方法，其中所述探头连接到所述机器的探头（1）。 该机器包括控制单元，并且探针（3）的重量优选静态地确定，而不主动地控制探头的移动。 来自探头（3）和/或探头（1）的信号被提供给控制单元（51）。

公开(公告)号：US06505414B2

公开(公告)日：2003-01-14

申请号：US09879140

申请日：2001-06-13

Applicant: Yuji Fujikawa

Inventor： Yuji Fujikawa

IPC: G01B318

CPC classification number: G01B3/18 ,  G01B3/008

Abstract: A comparator (1) has: a frame (2); a spindle and an anvil (4) supported by the frame (2) to be advanceable and retractable in the axial direction thereof; a biaser (39) for biasing the anvil (4) toward the spindle; a release (6) for retracting the anvil relative to the spindle against the biaser (39); an indicator (7); and an indicator driver (8) for transmitting the movement of the anvil (4) to the indicator (7), where a seal member (40, 43, 47) provided on the border between an outer surface of the frame (2) and at least one of the anvil (4), the biaser (39), the release (6) and the indicator (7) and a biasing force adjuster (5) for varying the biasing force of the biaser (39) are provided.

Abstract translation: 比较器（1）具有：框架（2）; 由所述框架（2）支撑的主轴和砧座（4）能够沿其轴向前进和后退; 用于将所述砧座（4）偏压到所述心轴的冲击器（39） 用于相对于所述冲击器（39）相对于所述心轴回缩所述砧座的释放件（6）; 指标（7）; 以及用于将砧座（4）的运动传递到指示器（7）的指示器驱动器（8），其中设置在框架（2）的外表面和框架（2）的外表面之间的边界上的密封构件（40,43,47） 提供了砧座（4），冲击器（39），释放件（6）和指示器（7）中的至少一个以及用于改变冲击器（39）的偏置力的偏置力调节器（5）。

公开(公告)号：US20010047682A1

公开(公告)日：2001-12-06

申请号：US09900806

申请日：2001-07-06

Inventor： Amin Samsavar ,  William R. Wheeler ,  Steven G. Eaton

IPC: G01B005/28

CPC classification number: G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

Abstract: A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

公开(公告)号：US06226883B1

公开(公告)日：2001-05-08

申请号：US09297817

申请日：1999-05-10

Applicant: Guido Golinelli

Inventor： Guido Golinelli

IPC: G01B300

CPC classification number: G01B7/001 ,  G01B3/008

Abstract: Gauging head and apparatus for the linear dimension checking of mechanical pieces comprising an integral element (1) that defined an arm (5) carrying a feeler (25), a reference portion (3), and a fulcrum (13) that enables rotations of arm (5) with respect to the reference portion (3), and a differential transformer position transducer with a cylindrical shaped casing (35; 82), carrying the windings (34; 83), fixed to the reference portion (3), and a ferromagnetic core (32; 84) movable together with the arm (5). The integral element (1) is locked in an adjustable way to a support (67), by means of the cylindrical casing (35; 82). The integral fulcrum is achieved by work hardening the material and subsequently grinding it.

Abstract translation: 用于机械件的线性尺寸检查的测量头和装置，包括限定了承载探头（25）的臂（5），参考部分（3）和支点（13）的整体元件（1），其支撑 臂（5）相对于基准部分（3）的差动变压器位置换能器和带有固定到参考部分（3）上的绕组（34; 83）的圆柱形壳体（35; 82） 与臂（5）一起移动的铁磁芯（32; 84）。 整体元件（1）通过圆柱形壳体（35; 82）以可调节的方式锁定到支撑件（67）。 整体支点通过加工硬化材料并随后研磨来实现。

公开(公告)号：US6158136A

公开(公告)日：2000-12-12

申请号：US264413

申请日：1999-03-08

Applicant: Klaus-Dieter Gotz ,  Otto Ruck

Inventor： Klaus-Dieter Gotz ,  Otto Ruck

IPC: G01B5/008 ,  G01B7/008 ,  G01B21/04 ,  G06F3/033

CPC classification number: G01B3/008 ,  G01B21/047 ,  G01B5/008

Abstract: A coordinate measuring apparatus measures a workpiece in accordance with a measuring sequence. The apparatus has a probe unit for scanning the workpiece and a mechanical assembly for moving the probe unit in three coordinate directions (X, Y, Z). Drives are provided for driving the mechanical assembly to move the probe unit and a manually actuable control element controls the drives. A force unit superposes a force onto the control element in correspondence to specific conditions in the measuring sequence.

Abstract translation: 坐标测量装置根据测量顺序测量工件。 该装置具有用于扫描工件的探针单元和用于在三个坐标方向（X，Y，Z）上移动探针单元的机械组件。 提供驱动器用于驱动机械组件以移动探针单元，并且可手动致动的控制元件控制驱动器。 力单元根据测量顺序中的特定条件将力叠加到控制元件上。

公开(公告)号：US5705741A

公开(公告)日：1998-01-06

申请号：US362818

申请日：1994-12-22

Applicant: Steven G. Eaton ,  Rusmin Kudinar ,  William R. Wheeler

Inventor： Steven G. Eaton ,  Rusmin Kudinar ,  William R. Wheeler

IPC: G01B3/00 ,  G01B7/34 ,  G01B5/28

CPC classification number: G01B3/008 ,  G01B7/34

Abstract: A profilometer has a constant force mechanism for biasing of the stylus arm. The mechanism has a centrally-aligned configuration of the moving magnet relative to the magnetic coil and also has a magnetic shield isolating these elements from other ferromagnetic materials in the assembly. The moving magnet is made of a material that is hard magnetically and the magnetic shield is made of a series of low hysteresis, high permeability materials. The force thus generated by the stylus biasing device is very linear with the drive current upon the magnetic coil at any particular position of the stylus, thereby allowing for control and predictability of the stylus force upon the surface to be profiled. This predictability is used for dynamic stylus force adjustments during profiling of a specimen. The profilometer is also equipped with a balanced, spring-loaded stylus-stabilizing sensor assembly, task-specific dual-view optics for protection of the delicate stylus assembly, and a temperature drift compensator.

Abstract translation: 轮廓仪具有用于偏置触针臂的恒力机构。 该机构具有相对于电磁线圈的移动磁体的中心对准配置，并且还具有将这些元件与组件中的其它铁磁材料隔离的磁屏蔽。 移动磁铁由硬磁材料制成，磁屏蔽由一系列低磁滞，高磁导率材料制成。 由触针偏置装置产生的力与在触控笔的任何特定位置处的磁性线圈上的驱动电流非常线性，从而允许在要被刻蚀的表面上的触针力的控制和可预测性。 这种可预测性用于在样品成型期间的动态触针力调节。 轮廓仪还配备有平衡的弹簧加载的触控笔稳定传感器组件，用于保护精巧触针组件的任务特定双视点光学元件和温度漂移补偿器。

公开(公告)号：US5414940A

公开(公告)日：1995-05-16

申请号：US64605

申请日：1993-05-19

Applicant: Jay Sturdevant

Inventor： Jay Sturdevant

IPC: G01B3/00 ,  G01B7/00 ,  G01B7/28

CPC classification number: G01B3/008 ,  G01B7/001

Abstract: A force control system (50) and method are provided for controlling a position contact sensor (10) so as to produce a constant controlled contact force therewith. The system (50) includes a contact position sensor (10) which has a contact probe (12) for contacting the surface of a target to be measured and an output signal (V.sub.o) for providing a position indication thereof. An actuator (30) is provided for controllably driving the contact position sensor (10) in response to an actuation control signal (I). A controller (52) receives the position indication signal (V.sub.o) and generates in response thereto the actuation control signal (I) so as to provide a substantially constant selective force (F) exerted by the contact probe (12). The actuation drive signal (I) is generated further in response to substantially linear approximation curves based on predetermined force and position data attained from the sensor (10) and the actuator (30).

Abstract translation: 提供了一种力控制系统（50）和方法，用于控制位置接触传感器（10），从而与其产生恒定的受控接触力。 系统（50）包括接触位置传感器（10），该接触位置传感器（10）具有接触探针（12），用于接触被测量目标物的表面和用于提供其位置指示的输出信号（Vo）。 提供致动器（30），用于响应于致动控制信号（I）可控地驱动接触位置传感器（10）。 控制器（52）接收位置指示信号（Vo）并响应于此产生致动控制信号（I），从而提供由接触探针（12）施加的基本恒定的选择力（F）。 响应于基于从传感器（10）和致动器（30）获得的预定力和位置数据的基本线性近似曲线，进一步产生致动驱动信号（I）。

公开(公告)号：US5208994A

公开(公告)日：1993-05-11

申请号：US864355

申请日：1992-04-06

Applicant: David R. McMurtry ,  Stephen E. Lummes

Inventor： David R. McMurtry ,  Stephen E. Lummes

IPC: G01B5/00 ,  G01B3/00 ,  G01B5/012

CPC classification number: G01B3/008 ,  G01B5/012

Abstract: A stylus counterbalancing mechanism for a probe includes a stylus support member suspended on a resilient suspension system and connected to a spring which provides a force to counterbalance the weight of the stylus. The spring is connected to one end of a plate which is capable of sliding up and down a rod but is locked in position due to the clockwise moment produced by the spring force. The plate is unlocked from its position, when required, by movement of an actuating member. The actuating member is slidable up and down the rod and has bearing areas arranged to provide an anti-clockwise moment to the plate to unlock it and to move it along the rod to increase or decrease the spring force as required.In the probe, the actuating member includes a projection extending through the probe housing to be operable from the outside either manually or by the co-ordinate positioning machine, the machine being programmed to move the probe to engage the projection with a fixed ledge on the machine.

公开(公告)号：US4951370A

公开(公告)日：1990-08-28

申请号：US401702

申请日：1989-09-01

Applicant: Lee R. Reid

Inventor： Lee R. Reid

IPC: G01B3/00 ,  G01R1/067 ,  G01R1/073

CPC classification number: G01R1/07342 ,  G01B3/008 ,  G01R1/06705 ,  Y10T29/42

Abstract: An intelligent multiprobe tip comprising a mounting member comprised essentially of piezoelectric material wherein, through appropriately locating metalized areas, the characteristics of the piezoelectric material are employed to insulate selected regions from each other while providing an appropriate force-induced output signal responsive to the contact of an attached tip with a movable work piece.

Abstract translation: 一种智能型多针头，其包括基本上由压电材料组成的安装构件，其中通过适当地定位金属化区域，使用压电材料的特性来使所选择的区域彼此绝缘，同时提供适当的力感应输出信号， 具有可动工件的附接尖端。