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公开(公告)号：US20070295966A1
公开(公告)日：2007-12-27
申请号：US11750719
申请日：2007-05-18
IPC分类号： H01L29/04
CPC分类号： H01L27/14665
摘要： A conversion apparatus comprises a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, each pixel having a conversion element that converts radiation into electric signals and a switching element, wherein the switching element has a structure comprising a gate electrode, a first insulating layer, a second insulating layer and a semiconductor layer from the substrate side in this order, and the conversion element has a structure comprising a bottom electrode, the second insulating layer and a semiconductor layer on the first insulating layer from the substrate side in this order.
摘要翻译： 转换装置包括在基板上的像素区域，包括以矩阵排列的多个像素，每个像素具有将辐射转换成电信号的转换元件和开关元件，其中开关元件具有包括栅电极 第一绝缘层，第二绝缘层和半导体层，并且转换元件具有包括底部电极，第二绝缘层和第一绝缘层上的与衬底的半导体层的结构 这个顺序。
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公开(公告)号：US07282719B2
公开(公告)日：2007-10-16
申请号：US11227149
申请日：2005-09-16
CPC分类号： H01L27/14663 , H01L27/14692 , H04N5/32 , H04N5/374
摘要： A reset method of a conversion element is improved, and the simplification of wiring and the improvement of an open area ratio of the conversion element by means of an image pickup apparatus including a plurality of pixels arranged on an insulating substrate, each of the pixels including a conversion element, a first switching element connected to the conversion element in order to transfer an electric signal obtained by the conversion element, and a second switching element connected to the conversion element in order to reset the conversion element by giving constant potential to the conversion element, wherein the second switching element includes a gate electrode, and a source electrode and a drain electrode, and one of the source electrode and the drain electrode is electrically connected to the gate electrode.
摘要翻译： 改进了转换元件的复位方法，并且通过包括布置在绝缘基板上的多个像素的图像拾取装置，简化布线和改善转换元件的开口面积比，每个像素包括 转换元件，连接到转换元件以便传送由转换元件获得的电信号的第一开关元件和连接到转换元件的第二开关元件，以便通过给转换元件赋予恒定电位来复位转换元件 元件，其中所述第二开关元件包括栅极，以及源极和漏极，并且所述源电极和所述漏电极中的一个电连接到所述栅电极。
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公开(公告)号：US20060255239A1
公开(公告)日：2006-11-16
申请号：US11486102
申请日：2006-07-14
IPC分类号： H01J40/14
CPC分类号： H01L27/14643 , H01L27/14676
摘要： In an image pick-up apparatus, a plurality of pixels, each pairing a semiconductor conversion element for converting an incident electromagnetic wave to an electric signal and a thin film transistor connected to the semiconductor conversion element, is arranged in a two-dimensional state on a substrate. The image pick-up apparatus includes gate wiring to which gate electrodes of thin film transistors of a plurality of pixels arranged in one direction are commonly connected, and signal wiring to which source electrodes or drain electrodes of thin film transistors of a plurality of pixels arranged in a direction different from the one direction are commonly connected on the substrate. Protection layers are arranged on the thin film transistors, the gate wiring and the signal wiring. The protection layers formed at least at the same time. Then, the protection layers are removed in at least a part or all of regions in which the semiconductor conversion elements are formed.
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74.发明申请公开(公告)号：US20050263709A1
公开(公告)日：2005-12-01
申请号：US10954194
申请日：2004-10-01
IPC分类号： G01T1/20 , A61B6/00 , G01T1/24 , H01L27/14 , H01L27/146 , H01L31/036 , H04N5/32
CPC分类号： H01L27/14643 , H01L27/14676
摘要： In an image pick-up apparatus, a plurality of pixels, each pairing a semiconductor conversion element for converting an incident electromagnetic wave to an electric signal and a thin film transistor connected to the semiconductor conversion element, is arranged in a two-dimensional state on a substrate. The image pick-up apparatus includes gate wiring to which gate electrodes of thin film transistors of a plurality of pixels arranged in one direction are commonly connected, and signal wiring to which source electrodes or drain electrodes of thin film transistors of a plurality of pixels arranged in a direction different from the one direction are commonly connected on the substrate. Protection layers are arranged on the thin film transistors, the gate wiring and the signal wiring. The protection layers formed at least at the same time. Then, the protection layers are removed in at least a part or all of regions in which the semiconductor conversion elements are formed.
摘要翻译： 在图像拾取装置中，将与入射电磁波进行转换的半导体转换元件和电连接的半导体转换元件和与半导体变换元件连接的薄膜晶体管的多个像素配置成二维状态 底物。 图像拾取装置包括栅极配线，多个像素排列的多个像素的薄膜晶体管的栅电极共同连接到该栅极布线，多个像素的薄膜晶体管的源电极或漏电极布置在其上 在与该方向不同的方向上共同连接在基板上。 保护层布置在薄膜晶体管，栅极布线和信号布线上。 保护层至少在同一时间形成。 然后，在其中形成有半导体转换元件的区域的至少一部分或全部中去除保护层。
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公开(公告)号：US08368027B2
公开(公告)日：2013-02-05
申请号：US12493776
申请日：2009-06-29
IPC分类号： G01T1/24
CPC分类号： G01T1/2018
摘要： A radiation detection apparatus comprises a plurality of pixels each including a conversion element which converts incident radiation into a charge, a switching element which transfers the charge, and an interlayer insulation film disposed between the conversion element and the switching element, a gate line to drive the switching element, and a signal line located to intersect with the gate line and configured to read out the charge transferred from the switching element, wherein Ca≧∈0×∈×S/d and 7d≦P/2 is satisfied, where P is a pixel pitch, Ca is a sum total of coupling capacitances between the signal line and the gate line, S is an overlapping area of the signal line and the conversion element, d is a thickness of the interlayer insulation film, ∈ is a relative dielectric constant of the interlayer insulation film, and ∈0 is a vacuum dielectric constant.
摘要翻译： 辐射检测装置包括多个像素，每个像素包括将入射辐射转换为电荷的转换元件，传送电荷的开关元件和设置在转换元件和开关元件之间的层间绝缘膜，驱动栅极线 所述开关元件和与所述栅极线相交并且被配置为读出从所述开关元件传递的电荷的信号线，其中，Ca≥∈0×∈×S / d和7d＆nlE; P / 2，其中P 是像素间距，Ca是信号线和栅极线之间的耦合电容的总和，S是信号线和转换元件的重叠面积，d是层间绝缘膜的厚度，ε是相对的 层间绝缘膜的介电常数，∈0为真空介电常数。
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公开(公告)号：US08164065B2
公开(公告)日：2012-04-24
申请号：US12896704
申请日：2010-10-01
IPC分类号： G01T1/20
CPC分类号： H01L27/14663 , H01L27/14623 , H01L27/14692 , H01L31/117 , H01L31/119 , H04N5/32
摘要： In a radiation detecting apparatus of the invention, plural pixels are arranged, and the pixel has a conversion element converting a radiation into an electric signal and a switching element connected to the conversion element. The conversion element includes a first electrode disposed on a first surface of an insulating substrate, a second electrode disposed on the first electrode, and a semiconductor layer disposed between the first electrode and the second electrode. The first electrode is made of a light-transmitting conductive material which transmits light emitted from a light source, and the first electrode is formed form a light transmitting electroconductive material transmitting light emitted form a light source disposed on a second surface of the insulating substrate opposite to the first surface. The switching element has a light shielding member which prevents incidence of the light from the light source to the switching element.
摘要翻译： 在本发明的放射线检测装置中，配置有多个像素，像素具有将辐射转换为电信号的转换元件和与转换元件连接的开关元件。 转换元件包括设置在绝缘基板的第一表面上的第一电极，设置在第一电极上的第二电极以及设置在第一电极和第二电极之间的半导体层。 第一电极由透光的光透射导电材料制成，该透光导电材料透射从光源发射的光，并且第一电极形成为透光导电材料，透光导电材料透射从光源发射的光，所述光源设置在绝缘衬底的相对的第二表面上 到第一个表面。 开关元件具有防止从光源到开关元件的入射的遮光部件。
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公开(公告)号：US20110017919A1
公开(公告)日：2011-01-27
申请号：US12896704
申请日：2010-10-01
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14663 , H01L27/14623 , H01L27/14692 , H01L31/117 , H01L31/119 , H04N5/32
摘要： In a radiation detecting apparatus of the invention, plural pixels are arranged, and the pixel has a conversion element converting a radiation into an electric signal and a switching element connected to the conversion element. The conversion element includes a first electrode disposed on a first surface of an insulating substrate, a second electrode disposed on the first electrode, and a semiconductor layer disposed between the first electrode and the second electrode. The first electrode is made of a light-transmitting conductive material which transmits light emitted from a light source, and the first electrode is formed form a light transmitting electroconductive material transmitting light emitted form a light source disposed on a second surface of the insulating substrate opposite to the first surface. The switching element has a light shielding member which prevents incidence of the light from the light source to the switching element.
摘要翻译： 在本发明的放射线检测装置中，配置有多个像素，像素具有将辐射转换为电信号的转换元件和与转换元件连接的开关元件。 转换元件包括设置在绝缘基板的第一表面上的第一电极，设置在第一电极上的第二电极以及设置在第一电极和第二电极之间的半导体层。 第一电极由透光的光透射导电材料制成，该透光导电材料透射从光源发射的光，并且第一电极形成为透光导电材料，透光导电材料透射从光源发射的光，所述光源设置在绝缘衬底的相对的第二表面上 到第一个表面。 开关元件具有防止从光源到开关元件的入射的遮光部件。
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公开(公告)号：US20100277630A1
公开(公告)日：2010-11-04
申请号：US12095674
申请日：2007-01-11
CPC分类号： G01T1/2018 , H01L27/14603 , H01L27/14632 , H01L27/14663
摘要： Pixels including a photoelectric conversion element 1, a signal transfer TFT (thin film transistor) 2 electrically connected to the photoelectric conversion element, and a reset TFT 3 electrically connected to the photoelectric conversion element and for applying a bias to the photoelectric conversion element are two-dimensionally disposed on the insulating substrate, and the photoelectric conversion element 1, signal transfer TFT 2, and reset TFT 3 are electrically connected through a common contact hole 9. A source or drain electrode of the signal transfer TFT 2 and the source or drain electrode of the reset TFT 3 are formed from a common electroconductive layer.
摘要翻译： 电连接到光电转换元件的光电转换元件1，信号转移TFT（薄膜晶体管）2和与光电转换元件电连接并用于向光电转换元件施加偏压的复位TFT 3的像素是两个 并且光电转换元件1，信号传输TFT 2和复位TFT 3通过公共接触孔9电连接。信号传输TFT 2的源极或漏极和源极或漏极 复位TFT 3的电极由公共导电层形成。
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公开(公告)号：US20100072381A1
公开(公告)日：2010-03-25
申请号：US12627635
申请日：2009-11-30
IPC分类号： G01T1/24
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20090283689A1
公开(公告)日：2009-11-19
申请号：US11917334
申请日：2006-07-21
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14663 , H01L27/14623 , H01L27/14692 , H01L31/117 , H01L31/119 , H04N5/32
摘要： In a radiation detecting apparatus of the invention, plural pixels are arranged, and the pixel has a conversion element converting a radiation into an electric signal and a switching element connected to the conversion element. The conversion element includes a first electrode disposed on a first surface of an insulating substrate, a second electrode disposed on the first electrode, and a semiconductor layer disposed between the first electrode and the second electrode. The first electrode is made of a light-transmitting conductive material which transmits light emitted from a light source, and the first electrode is formed from a light transmitting electroconductive material transmitting light emitted from a light source disposed on a second surface of the insulating substrate opposite to the first surface. The switching element has a light shielding member which prevents incidence of the light from the light source to the switching element.
摘要翻译： 在本发明的放射线检测装置中，配置有多个像素，像素具有将辐射转换为电信号的转换元件和与转换元件连接的开关元件。 转换元件包括设置在绝缘基板的第一表面上的第一电极，设置在第一电极上的第二电极以及设置在第一电极和第二电极之间的半导体层。 第一电极由透光从光源发射的光的透光导电材料制成，第一电极由透光导电材料形成，透光导电材料透射从布置在绝缘衬底的相对的绝缘衬底的第二表面上的光源发射的光 到第一个表面。 开关元件具有防止从光源到开关元件的入射的遮光部件。
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