摘要:
According to the present invention, there is provided an ink jet recording apparatus for recording an image on a recording medium by discharging ink to the surface of the recording medium, wherein ink is reserved in an ink tank including a negative pressure generating member, such as an absorber and a foaming member, and a function of accurately detecting the residual quantity such that depletion to a predetermined level can be detected is realized. Light emitted by a photointerrupter is allowed to pass through a portion of a wall surface of the ink tank made of transparent plastic or the like which is transmissible with respect to detection light emitted by the photointerrupter to detect change in the light reflectance in the boundary portion between the wall surface and the ink absorber. In accordance with reflectance obtained in a case where no ink exists in the detected portion and that obtained in a case where ink exists, the residual quantity of ink can be detected.
摘要:
A projection exposure method and apparatus, in which high precision focus detection is assured even when the manner of illumination is changed. The projection exposure apparatus includes an illumination optical system for defining an illumination light source for illuminating an original having a pattern, the illumination optical system including a device for changing the shape of the illumination light source. The apparatus further includes a projection optical system for projecting an image of the pattern, illuminated by the illumination light source, to a surface to be exposed, a focus detecting system for detecting the state of focus of the original and the surface to be exposed, and an adjusting device for adjusting the focus detecting system in accordance with the change of the shape of the illumination light source by the changing device.
摘要:
An alignment mark detecting device usable with an exposure apparatus for transferring a pattern of an original onto a workpiece having a radiation-sensitive layer, includes a holder for holding the workpiece, a radiation energy source for irradiating the workpiece held by the holder with radiation energy to remove a portion of the radiation-sensitive layer adjacent to an alignment mark formed on the workpiece, and a holder for detecting the alignment mark of the workpiece held by the holder.
摘要:
Step-and-repeat exposure apparatus for printing, by way of a projection optical system, images of a pattern formed on a reticle upon different portions of a semiconductor wafer, placed on a movable stage, is disclosed. On the portion of the movable stage other than the portion upon which the semiconductor wafer is placed, an erasably writable recording medium such as, for example, a magneto-optic recording material or a photochromic material is provided. An image of a mark of a reticle is formed on the recording medium by use of the projection optical system, the thus formed image being photoelectrically detected. From the result of the detection, alignment information concerning, for example, a magnification error, a focus error, a positional error between the reticle and the wafer, for example is obtained.
摘要:
An exposure apparatus and method for irradiating a mask having a circuit pattern with light emitted from an intermittently emitting type light source so that the mask pattern is photolithographically transferred onto a semiconductor wafer, wherein the output of the intermittent-emission type light source is detected prior to the photolithographic transfer of the mask pattern onto the wafer and, in accordance with the result of such detection, the amount of exposure of the wafer to the light beam from the mask is controlled.
摘要:
An illumination apparatus for illuminating, with a light beam of arcuate cross-section, a mask having an integrated-circuit pattern to transfer the integrated-circuit pattern onto a semiconductor wafer includes an illumination optical system having a light source, a plurality of cylindircal lenses and a collimator lens to illuminate, in the Kohler illumination manner, a rectangular region on a predetermined plane, a restricting member disposed in the predetermined plane to restrict the light beam incident on the predetermined plane so that a light beam of arcuate cross-section emerges from the predetermined plane, and an optical member for forming an image of the restricting member on the mask. With this arrangement, the pattern of the mask is transferred onto the wafer without any distortion.
摘要:
An image processing apparatus, an image processing method, an inkjet printing apparatus and a data generating apparatus are provided that can reduce, when a plurality of types of inks are used to print an image, the color unevenness that is caused by the variation of ejecting characteristics among a plurality of nozzles. A conversion table for correcting, based on an ejecting characteristic, a multi dimensional color printed by ejecting at least two types of inks on a common region on a printing medium is used to correct a plurality of color signals corresponding to these inks.
摘要:
The present invention is intended to provide an image processor that can reduce color unevenness occurring in a composite color image formed by overlapping different types of inks due to a variation in printing characteristic among a plurality of nozzles while suppressing a reduction in processing speed in generation of printing data. The image processor converts a color signal indicating the image represented by a plurality of elements to a color signal corresponding to the plurality of inks with use of a conversion table determined on the basis of ejection characteristics of nozzle groups corresponding to the plurality of inks so as to suppress color unevenness occurring in a composite color image due to a variation in ejection characteristic among the plurality of nozzles.
摘要:
In a prior art, since the wavelengths of R, G, and B LEDs serving as the light sources of a CIS scanner vary, read colors vary between individual scanners. Since the behavior of metamerism also changes due to the same reason, measures against the metamerism are hard to take. To solve this problem, a color patch is irradiated with light from an LED, and its spectral reflectivity is measured using a spectroreflectometer, thereby estimating the emission wavelength of the light source LED. A signal change characteristic representing the relationship to the output signals of three LEDs obtained from the spectral reflectivity of the patch is stored in a memory. In actual image reading, color correction is performed based on the signal change characteristic stored in the memory.
摘要:
An apparatus includes a printing unit configured to eject ink from a print head onto a sheet conveyed in a direction to perform printing on the sheet; a conveying unit configured to be provided on a downstream side of the print head in the direction, and configured to include a rotating member in contact with the sheet; and a reading unit configured to read a surface of the sheet on a downstream side of the rotating member in the direction, in which information on ink adhesion to the rotating member is obtained based on a result read by the reading unit.