摘要:
An object to be processed is restrained from warping at the time of laser processing. A modified region M2 is formed within a wafer 11, and fractures a2, b2 extending in directions parallel to the thickness direction of the wafer 11 and tilted with respect to a plane including lines 5 are generated from the modified region M2. A modified region M3 is formed within the wafer 11, and a fracture a3 extending in a direction parallel to the thickness direction of the wafer 11 and tilted with respect to the plane including the lines 5 is generated from the modified region M3 so as to connect with the fracture b2. That is, the fractures a2, a3, b2 are generated so as to be connected together. Therefore, at the time of laser processing, the fractures cause both side parts holding the lines to cut 5 therebetween in the wafer 11 to mesh with each other, whereby internal stresses occurring in a direction parallel to the thickness direction of the wafer 11 and perpendicular to the surface including the lines 5 when the modified regions are formed can be reduced.
摘要:
An object to be processed 1 comprising a substrate 4 and a plurality of functional devices 15 formed on a front face 3 of the substrate 4 is irradiated with laser light L while locating a converging point P within the substrate 4, so as to form at least one row of a divided modified region 72, at least one row of a quality modified region 71 positioned between the divided modified region 72 and the front face 3 of the substrate 4, and at least one row of an HC modified region 73 positioned between the divided modified region 72 and a rear face 21 of the substrate 4 for one line to cut 5. Here, in a direction along the line to cut, a forming density of the divided modified region 72 is made lower than that of the quality modified region 71 and that of the HC modified region 73.
摘要:
A magnet body 1 including a shorter periphery 11, a longer periphery 12 located at a position separated from the shorter periphery 11 by a predetermined distance, and a pair of side peripheries 13, 14 connecting the shorter periphery 11 and longer periphery 12 to each other, the magnet body having a fan-shaped planar form; and a corrosion-resistant film (Ni plating film 2) applied to a surface of the magnet body. The permanent magnet member 10 has a thickness whose maximum and minimum values yield a difference of 10 to 150 μm therebetween.
摘要:
A laser processing method is provided, which, even when a substrate formed with a laminate part including a plurality of functional devices is thick, can cut the substrate and laminate part with a high precision.This laser processing method irradiates a substrate 4 with laser light L while using a rear face 21 as a laser light entrance surface and locating a light-converging point P within the substrate 4, so as to form modified regions 71, 72, 73 within the substrate 4. Here, the HC modified region 73 is formed at a position between the segmented modified region 72 closest to the rear face 21 and the rear face 21, so as to generate a fracture 24 extending along a line to cut from the HC modified region 73 to the rear face 21. Therefore, when an expandable tape is bonded to the rear face 21 of the substrate 4 and expanded, fractures smoothly advance from the substrate 4 to a laminate part 16 by way of the segmented modified regions 72, whereby the substrate 4 and laminate part 16 can be cut along the line to cut with a high precision.
摘要:
A method of cutting an object to be processed is provided, which can accurately cut an object to be processed comprising a substrate and a multilayer part provided on the front face of the substrate while having a plurality of functional devices into the functional devices along a line to cut in a short time even when the substrate is thick. A substrate 4 is irradiated with laser light L from the multilayer part 16 side while locating a converging point P within the substrate 4, so as to form a first modified region 71 shifted from the center position CL in the thickness direction of the substrate 4 to the rear face 21 side of the substrate 4 and a second modified region 72 shifted from the center position CL in the thickness direction of the substrate 4 to the front face 3 side of the substrate 4 within the substrate 4 along a line to cut, and generate a fracture 24 from the second modified region 72 to the front face 3 of the substrate 4. Thereafter, while in a state where an expandable tape 23 attached to the rear face 21 of the substrate 4 is expanded, a stress is generated in an object to be processed 1 such as to open the fracture 24.
摘要:
Provided are a method of manufacturing a rare-earth magnet with superior corrosion resistance, and a plating bath used for the method. A first protective film including nickel and a second protective film including nickel and sulfur are laminated in order on a magnet body including a rare-earth element. The first protective film is formed through electroplating with a first plating bath including a nickel source, a conductive salt and a pH stabilizer, and having a concentration of the nickel source of 0.3 mol/l to 0.7 mol/l on a nickel atom basis and a conductivity of 80 mS/cm or over. Thereby, a rare-earth-rich phase can be prevented from being leached out, and the production of pinholes can be reduced. Therefore, the corrosion resistance of the rare-earth magnet can be improved.
摘要:
When a liquid mixture of two samples such as biological samples labeled with stable isotopes is subjected to a relative quantitative analysis using a liquid chromatography-tandem mass spectrometry system, various constituents are simultaneously ionized. Accordingly, sufficient time required for second mass spectrometry is not ensured, whereby some ions remain unanalyzed after measurement. To address this problem, after second mass spectrometry, amino acid sequencing is performed using the analysis data of the second mass spectrometry, which enables determination on the presence/absence of a specific amino acid labeled with a stable isotope. When the specific amino acid is present, the m/z value of an isotopically-labeled-paired ion in an MS spectrum is calculated, and non-target information for use in second mass spectrometry is created using the calculated m/z information. This avoids redundant second mass spectrometry on sample components derived from the same peptide while allowing second mass spectrometry to be efficiently performed.
摘要:
An object to be processed can be cut highly accurately along a line to cut.An object to be processed 1 is irradiated with laser light while locating a converging point within a silicon wafer 11, and the converging point is relatively moved along a line to cut 5, so as to form modified regions M1, M2 positioned within the object 1 along the line to cut 5, and then a modified region M3 positioned between the modified regions M1, M2 within the object 1.
摘要:
In a technique to improve the high-frequency power gain of an LDMOS, the distance from the surface of a passivation film covering electrode pads to the rear surface of a silicon substrate is set into 200 μm or less, or a trench of 2 μm or more in thickness, in which an insulating film or a conductor is embedded, is formed between a region where a p type impurity is diffused, when a p+ type source penetrating layer is formed, and the channel region of a third LDMOS, so as to extend from the front surface of a semiconductor layer toward a silicon substrate. This trench restrains the p+ type source penetrating layer from spreading to the channel region, thereby lowering the inductance or the resistance of the source and improving the high-frequency power gain.
摘要:
An optical transmission network includes a first dispersion compensator arranged in a maximum dispersion span having a maximum dispersion value and searched out from within a maximum dispersion route having a maximum dispersion value from among routes of non-regeneration intervals within which a dispersion value before dispersion compensation does not satisfy an upper limit of a dispersion tolerance, and a second dispersion compensator arranged in a maximum dispersion span having a maximum dispersion value searched out from within a maximum dispersion route having a maximum dispersion value from among the routes when a dispersion compensator is successively arranged until a route of a non-regeneration interval within which a dispersion value of a certain channel does not satisfy the dispersion tolerance does not remain any more based on the dispersion value after the dispersion compensation with respect to the searched out maximum dispersion span. The dispersion compensation amounts of the first and second dispersion compensators are such that, when the dispersion compensation amount of the maximum dispersion span in which the first and second dispersion compensators are arranged is successively increased, the span has a residual dispersion value equal to or higher than a fixed range and the maximum dispersion route which relates to the spans has a residual dispersion value which satisfies the dispersion tolerance or the span has a residual dispersion value which is within the fixed range.