公开(公告)号：US07049680B2

公开(公告)日：2006-05-23

申请号：US10971073

申请日：2004-10-25

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L29/00

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element.Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer.Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

公开(公告)号：US07023071B2

公开(公告)日：2006-04-04

申请号：US10866874

申请日：2004-06-15

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L29/00 ,  H01L21/8234

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element.Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer.Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

公开(公告)号：US5700704A

公开(公告)日：1997-12-23

申请号：US458615

申请日：1995-06-02

申请人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

发明人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

IPC分类号： H01L27/11 ,  H01L21/8244

CPC分类号： H01L27/11 ,  H01L27/1104 ,  Y10S257/903 ,  Y10S257/904

摘要： A method is provided for manufacturing a semiconductor integrated circuit device which includes a capacitor element having a first electrode, a second electrode, and a dielectric film formed between said first electrode and said second electrode. In particular, the method includes the step of forming at least one of the first electrode and second electrode with a polycrystalline silicon film which is deposited over a semiconductor substrate by a CVD method and which is doped with an impurity during said deposition to decrease the resistance of the polycrystalline silicon film. The capacitor element formed by this method is particularly useful for memory cells of static random access memory devices.

摘要翻译： 提供一种用于制造半导体集成电路器件的方法，该半导体集成电路器件包括具有形成在所述第一电极和所述第二电极之间的第一电极，第二电极和电介质膜的电容器元件。 特别地，该方法包括用多晶硅膜形成第一电极和第二电极中的至少一个的步骤，该多晶硅膜通过CVD方法沉积在半导体衬底上，并且在所述沉积期间掺杂有杂质以降低电阻 的多晶硅膜。 通过该方法形成的电容器元件对静态随机存取存储器件的存储单元特别有用。

公开(公告)号：US5652457A

公开(公告)日：1997-07-29

申请号：US351173

申请日：1994-11-30

申请人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

发明人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

IPC分类号： H01L27/11 ,  H01L29/76

CPC分类号： H01L27/11 ,  H01L27/1104 ,  Y10S257/903 ,  Y10S257/904

摘要： Herein disclosed is a semiconductor integrated circuit device comprising a SRAM having its memory cell composed of transfer MISFETs to be controlled through word lines and drive MISFETs. The gate electrodes of the drive MISFETs and the gate electrodes of the transfer MISFETs of the memory cell, and the word lines are individually formed of different conductive layers. The drive MISFETs and the transfer MISFETs are individually arranged to cross each other in the gate length direction. The word lines are extended in the gate length direction of the gate electrodes of the drive MISFETs and caused to cross the gate electrodes of the drive MISFETs partially.The two transfer MISFETs of the memory cell have their individual gate electrodes connected with two respective word lines spaced from each other and extended in an identical direction. The region defined by the two word lines is arranged therein with the two drive MISFETs and the source lines.The source line is formed of a conductive layer identical to that of the word line. The individual data lines of the complementary data line are formed of an identical conductive layer which is different from that of the word line and the source line. The identical conductive layer between the word line and source line and the complementary data line is formed with two word lines: a main word line extended in the first direction identical to that of the word line and source line and used by adopting the divided word line system: and a sub-word line used by adopting the double word line system.

摘要翻译： 这里公开了一种半导体集成电路器件，其包括具有其存储单元的SRAM，SRAM由通过字线控制的转移MISFET和驱动MISFET构成。 驱动MISFET的栅电极和存储单元的转移MISFET的栅电极和字线分别由不同的导电层形成。 驱动MISFET和转移MISFET分别布置成在栅极长度方向上彼此交叉。 字线在驱动MISFET的栅电极的栅极长度方向上延伸，并且部分地与驱动MISFET的栅电极交叉。 存储器单元的两个转移MISFET的各自的栅极电极与彼此间隔开并沿相同方向延伸的两个相应字线连接。 由两个字线限定的区域配置有两个驱动MISFET和源极线。 源极线由与字线的导电层相同的导电层形成。 互补数据线的各个数据线由与字线和源极线不同的导电层形成。 字线和源极线与互补数据线之间的相同的导电层由两条字线形成：主字线在第一方向上延伸，与字线和源极线相同，并通过采用分割字线 系统：采用双字线系统使用的子字线。

公开(公告)号：US07834420B2

公开(公告)日：2010-11-16

申请号：US12335302

申请日：2008-12-15

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L29/00 ,  H01L21/8234

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element. Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

摘要翻译： 一种完整的CMOS型SRAM，其存储单元由六个MISFET组成，其中一对用于连接CMOS反相器的输入/输出端的局部布线由难熔金属硅化物层形成，该难熔金属硅化物层形成在构成个体的第一导电层上 存储单元的驱动MISFET，转移MISFET和负载MISFET的栅极电极，其中形成在局部布线上的参考电压线被布置成叠加在局部布线上以形成电容元件。 此外，通过在第一导电层上叠加局部布线，在局部布线和第一导电层之间形成电容元件。 此外，通过使用诸如硅化的电阻降低装置来形成局部布线。 此外，公开了用于降低转移MISFET的栅电极的电阻和用于形成局部布线的装置的手段。

公开(公告)号：US20080099854A1

公开(公告)日：2008-05-01

申请号：US11834095

申请日：2007-08-06

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L27/11

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element. Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

公开(公告)号：US20080073726A1

公开(公告)日：2008-03-27

申请号：US11826491

申请日：2007-07-16

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L27/088

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element. Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

公开(公告)号：US5834851A

公开(公告)日：1998-11-10

申请号：US460641

申请日：1995-06-02

申请人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

发明人： Shuji Ikeda ,  Satoshi Meguro ,  Soichiro Hashiba ,  Isamu Kuramoto ,  Atsuyoshi Koike ,  Katsuro Sasaki ,  Koichiro Ishibashi ,  Toshiaki Yamanaka ,  Naotaka Hashimoto ,  Nobuyuki Moriwaki ,  Shigeru Takahashi ,  Atsushi Hiraishi ,  Yutaka Kobayashi ,  Seigou Yukutake

IPC分类号： H01L27/11

CPC分类号： H01L27/11 ,  H01L27/1104 ,  Y10S257/903 ,  Y10S257/904

摘要： Herein disclosed is a semiconductor integrated circuit device comprising a SRAM having its memory cell composed of transfer MISFETs to be controlled through word lines and drive MISFETs. The gate electrodes of the drive MISFETs and the gate electrodes of the transfer MISFETs of the memory cell, and the word lines are individually formed of different conductive layers. The drive MISFETs and the transfer MISFETs are individually arranged to cross each other in the gate length direction. The word lines are extended in the gate length direction of the gate electrodes of the drive MISFETs and caused to cross the gate electrodes of the drive MISFETs partially. The two transfer MISFETs of the memory cell have their individual gate electrodes connected with two respective word lines spaced from each other and extended in an identical direction. The region defined by the two word lines is arranged therein with the two drive MISFETs and the source lines.The source line is formed of a conductive layer identical to that of the word line. The individual data lines of the complementary data line are formed of an identical conductive layer which is different from that of the word line and the source line. The identical conductive layer between the word line and source line and the complementary data line is formed with two word lines: a main word line extended in the first direction identical to that of the word line and source line and used by adopting the divided word line system: and a sub-word line used by adopting the double word line system.

摘要翻译： 这里公开了一种半导体集成电路器件，其包括具有其存储单元的SRAM，SRAM由通过字线控制的转移MISFET和驱动MISFET构成。 驱动MISFET的栅电极和存储单元的转移MISFET的栅电极和字线分别由不同的导电层形成。 驱动MISFET和转移MISFET分别布置成在栅极长度方向上彼此交叉。 字线在驱动MISFET的栅电极的栅极长度方向上延伸，并且部分地与驱动MISFET的栅电极交叉。 存储器单元的两个转移MISFET的各自的栅极电极与彼此间隔开并沿相同方向延伸的两个相应字线连接。 由两个字线限定的区域配置有两个驱动MISFET和源极线。 源极线由与字线的导电层相同的导电层形成。 互补数据线的各个数据线由与字线和源极线不同的导电层形成。 字线和源极线与互补数据线之间的相同的导电层由两条字线形成：主字线在第一方向上延伸，与字线和源极线相同，并通过采用分割字线 系统：采用双字线系统使用的子字线。

公开(公告)号：US5754467A

公开(公告)日：1998-05-19

申请号：US451117

申请日：1995-05-25

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： G11C11/412 ,  H01L21/768 ,  H01L21/8244 ,  H01L27/11 ,  G11C11/00 ,  H01L25/00 ,  H01L29/76

CPC分类号： H01L27/11 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  G11C11/412 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacitor. The capacitor is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using a structure with decreased resistance such as silicided structure. In addition, there are made common the processing for lowering the resistance of the gate electrode of the transfer MISFETs and the processing for forming the local wiring lines.

摘要翻译： 一种完整的CMOS型SRAM，其存储单元由六个MISFET组成，其中一对用于连接CMOS反相器的输入/输出端的局部布线由难熔金属硅化物层形成，该难熔金属硅化物层形成在构成个体的第一导电层上 存储单元的驱动MISFET，转移MISFET和负载MISFET的栅极电极，其中形成在局部布线上的参考电压线被布置成叠加在局部布线上以形成电容器。 电容器通过将局部布线叠置在第一导电层上而形成在局部布线和第一导电层之间。 此外，通过使用诸如硅化结构的电阻降低的结构形成局部布线。 此外，公开了用于降低转移MISFET的栅电极的电阻和用于形成局部布线的处理的处理。

公开(公告)号：US20110076820A1

公开(公告)日：2011-03-31

申请号：US12895357

申请日：2010-09-30

申请人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

发明人： Shuji Ikeda ,  Toshiaki Yamanaka ,  Kenichi Kikushima ,  Shinichiro Mitani ,  Kazushige Sato ,  Akira Fukami ,  Masaya Iida ,  Akihiro Shimizu

IPC分类号： H01L21/8234

CPC分类号： H01L27/11 ,  G11C11/412 ,  G11C11/4125 ,  H01L21/76895 ,  H01L27/0203 ,  H01L27/0207 ,  H01L27/1104 ,  Y10S257/904

摘要： A SRAM of complete CMOS type having its memory cell composed of six MISFETs, in which a pair of local wiring lines for connecting the input/output terminals of CMOS inverters are formed of a refractory metal silicide layer formed over a first conducting layer constituting the individual gate electrodes of the drive MISFETs, the transfer MISFETs and the load MISFETs of the memory cell and in which a reference voltage line formed over the local wiring lines is arranged to be superposed over the local wiring lines to form a capacity element. Moreover, the capacity element is formed between the local wiring lines and the first conducting layer by superposing the local wiring lines over the first conducting layer. Moreover, the local wiring lines are formed by using resistance lowering means such as silicification. In addition, there are made common the means for lowering the resistance of the gate electrode of the transfer MISFETs and the means for forming the local wiring lines.

摘要翻译： 一种完整的CMOS型SRAM，其存储单元由六个MISFET组成，其中一对用于连接CMOS反相器的输入/输出端的局部布线由难熔金属硅化物层形成，该难熔金属硅化物层形成在构成个体的第一导电层上 存储单元的驱动MISFET，转移MISFET和负载MISFET的栅极电极，其中形成在局部布线上的参考电压线被布置成叠加在局部布线上以形成电容元件。 此外，通过在第一导电层上叠加局部布线，在局部布线和第一导电层之间形成电容元件。 此外，通过使用诸如硅化的电阻降低装置来形成局部布线。 此外，公开了用于降低转移MISFET的栅电极的电阻和用于形成局部布线的装置的手段。