公开(公告)号：US10580984B2

公开(公告)日：2020-03-03

申请号：US16202579

申请日：2018-11-28

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L21/00 ,  H01L51/00 ,  C23C14/24 ,  C23C14/12 ,  C23C14/04 ,  C23C14/54 ,  B41J2/14 ,  B41M3/00 ,  H01L51/56 ,  H01L51/50

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US20190221771A1

公开(公告)日：2019-07-18

申请号：US16361317

申请日：2019-03-22

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  James Robert Kantor

IPC: H01L51/52

CPC classification number: H01L51/5253 ,  H01L2251/303

Abstract: A buffer layer is provided that can be fabricated over an OLED without the use of any oxygen-containing gas. The buffer layer reduces the possibility of damage to the underlying OLED due to use of oxygen-containing materials during deposition of subsequent barrier layers, and thereby allows for deposition of barrier layers without reducing the flexibility of the device.

公开(公告)号：US10170701B2

公开(公告)日：2019-01-01

申请号：US15449946

申请日：2017-03-04

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L21/31 ,  H01L51/00 ,  C23C14/24 ,  C23C14/12 ,  C23C14/04

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US09818977B2

公开(公告)日：2017-11-14

申请号：US15141858

申请日：2016-04-29

Applicant: Universal Display Corporation

Inventor： Michael Hack ,  Ruiqing Ma ,  Emory Krall ,  William E. Quinn

IPC: H01L51/52 ,  H01L51/56 ,  H01L27/32 ,  H01L51/00 ,  H01L51/50

CPC classification number: H01L51/5253 ,  H01L27/3202 ,  H01L27/3204 ,  H01L51/0097 ,  H01L51/5004 ,  H01L51/504 ,  H01L51/52 ,  H01L51/5203 ,  H01L51/5206 ,  H01L51/5209 ,  H01L51/5212 ,  H01L51/5221 ,  H01L51/5225 ,  H01L51/5237 ,  H01L51/5246 ,  H01L51/56 ,  H01L2251/53 ,  H01L2251/5338 ,  H01L2251/5361 ,  H01L2251/5392 ,  H01L2251/566

Abstract: OLED panels and techniques for fabricating OLED panels are provided. Multiple cuts may be made in an OLED panel to define a desired shape, as well as the location and shape of external electrical contacts. The panel may be encapsulated before or after being cut to a desired shape, allowing for greater flexibility and efficiency during manufacture.

公开(公告)号：US09583707B2

公开(公告)日：2017-02-28

申请号：US14858840

申请日：2015-09-18

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Matthew King ,  Elliot H. Hartford, Jr.

IPC: H01L51/00 ,  B41J2/16 ,  C23C14/22 ,  C23C14/12 ,  C23C14/24 ,  B41J2/14 ,  H01L51/50

CPC classification number: H01L51/56 ,  B05B15/555 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14475 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  C23C14/24 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.

Abstract translation: 所公开的主题的实施例提供了一种喷嘴组件及其制造方法，喷嘴组件包括形成在第一孔板上的第一孔，以将具有有机蒸汽的载气流喷射到沉积室中的基底上，形成第二孔 在与所述第一孔相邻设置的第二孔板上形成真空孔，其中所述第一孔板和所述第二孔板由第一隔板隔开，所述第三孔形成在第三孔板上以排出所设置的吹扫气体 邻近所述第二孔板，其中所述第二孔板和所述第三孔板由第二隔板隔开，并且第三隔离板邻近所述一个或多个第三孔板设置，以在所述一个或多个孔板中形成气体通道 第三孔板。

公开(公告)号：US20150214507A1

公开(公告)日：2015-07-30

申请号：US14581586

申请日：2014-12-23

Applicant: Universal Display Corporation

Inventor： Emory Krall ,  Kamala Rajan ,  Huiqing Pang ,  Gregory McGraw ,  William E. Quinn ,  Ruiqing Ma ,  Julia J. Brown

IPC: H01L51/52 ,  H01L51/00

CPC classification number: H01L51/5275 ,  H01L51/0097 ,  Y02E10/549 ,  Y02P70/521

Abstract: Devices and techniques are provided in which a transparent substrate is scored to provide a non-planar surface on one side of the substrate. An OLED is then disposed on the other side of the scored substrate and optically coupled to the substrate. The scored surface provides improvements to outcoupling of light generated by the OLED, with little or no additional thickness relative to the OLED alone.

Abstract translation: 提供了一种器件和技术，其中对透明衬底进行刻痕以在衬底的一侧上提供非平面表面。 然后将OLED设置在刻痕基板的另一侧上并且光耦合到基板。 刻痕表面提供了对由OLED产生的光的外耦合的改进，相对于OLED单独，几乎没有或没有额外的厚度。