公开(公告)号：US07034299B2

公开(公告)日：2006-04-25

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： H01J37/26 ,  G01N23/04

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US20060060774A1

公开(公告)日：2006-03-23

申请号：US11202146

申请日：2005-08-12

申请人： Mayuka Oosaki ,  Hiroki Kawada ,  Ryo Nakagaki ,  Chie Shishido

发明人： Mayuka Oosaki ,  Hiroki Kawada ,  Ryo Nakagaki ,  Chie Shishido

IPC分类号： G01N23/00

CPC分类号： G01N23/225

摘要： A method for measuring a dimension of a pattern formed on a sample using a secondary electron image obtained by picking up an image of the sample using a scanning electron microscope includes: obtaining a secondary electron image of a sample by picking up an image of the sample using a scanning electron microscope; creating, using the secondary electron image, an image profile of a pattern whose dimension is to be measured, within the obtained secondary electron image; retrieving a model profile that matches best with the created image profile from a plurality of model profiles prestored that are obtained from respective secondary electron images of a plurality of patterns, the cross sections of the plurality of patterns being of known shapes and dimensions and being different in shape; and obtaining a dimension of the pattern using information of the retrieved model profile.

摘要翻译： 使用通过使用扫描电子显微镜拾取样品的图像获得的二次电子图像来测量在样品上形成的图案的尺寸的方法包括：通过拾取样品的图像获得样品的二次电子图像 使用扫描电子显微镜; 在获得的二次电子图像中产生使用二次电子图像的尺寸要被测量的图案的图像轮廓; 从从多个图案的相应二次电子图像获得的预先存储的多个模型轮廓中检索与所创建的图像轮廓最佳匹配的模型轮廓，所述多个图案的横截面具有已知的形状和尺寸并且是不同的 形状; 以及使用所检索的模型简档的信息来获得所述模式的维度。

公开(公告)号：US20050253067A1

公开(公告)日：2005-11-17

申请号：US11127248

申请日：2005-05-12

申请人： Hiroki Kawada ,  Ryo Nakagaki

发明人： Hiroki Kawada ,  Ryo Nakagaki

IPC分类号： H01L21/66 ,  G01N23/225 ,  H01J37/21 ,  H01J37/22 ,  H01J37/28

CPC分类号： G01N23/225 ,  H01J37/28 ,  H01J2237/216

摘要： According to the invention, to achieve the above objective, there is provided a charged particle beam apparatus that creates a first image by irradiating a charged particle beam on a sample to scan a first pattern of the sample, controls on the basis of the first image the focus of the charged particle beam and the brightness and/or contrast of the image, and irradiates the charged particle beam to correctly scan a second pattern different from the first pattern by using the control conditions used to control the focus of the charged particle beam and the brightness and/or contrast of the image.

摘要翻译： 根据本发明，为了实现上述目的，提供了一种带电粒子束装置，其通过在样本上照射带电粒子束来扫描样品的第一图案来产生第一图像，基于第一图像进行控制 带电粒子束的焦点以及图像的亮度和/或对比度，并且通过使用用于控制带电粒子束的焦点的控制条件照射带电粒子束以正确地扫描与第一图案不同的第二图案 以及图像的亮度和/或对比度。

公开(公告)号：US20050051725A1

公开(公告)日：2005-03-10

申请号：US10918340

申请日：2004-08-16

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Hirohito Okuda ,  Hiroshi Kakibayashi

IPC分类号： G01N23/04 ,  G01N33/48 ,  G01N23/00

CPC分类号： H01J37/222 ,  G01N23/04 ,  G06T7/0012 ,  H01J2237/26

摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.

摘要翻译： 无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。 此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。 透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据 等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别 样品中存在微观物质。

公开(公告)号：US06553323B1

公开(公告)日：2003-04-22

申请号：US09661182

申请日：2000-09-13

申请人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

发明人： Kenji Obara ,  Yuji Takagi ,  Toshifumi Honda ,  Ryo Nakagaki ,  Toshiei Kurosaki ,  Yasuhiko Ozawa

IPC分类号： G01B528

CPC分类号： H01L22/20 ,  G01N21/88 ,  G01N2021/8861

摘要： The present invention improves inspection efficiency in detailed inspections of defects performed based on inspection information from a defect inspection. Particles and defects are detected by a defect inspection device 1. If the cause of the particles and defects are to be determined by performing a detailed inspection with a details inspection device 3 using an SEM or the like, attributes are determined on the particles and defects detected by the defects inspection device 1 before the detailed inspection is performed. The attributes are determined with an attribute inspection device using an optical microscope or the like. Based on these attributes, the defects and particles are separated into those that require detailed inspection and those that do not require detailed inspection or that cannot be inspected in detail. A details inspection device 3 is used to inspect the particles and defects requiring detailed inspection.

摘要翻译： 本发明基于来自缺陷检查的检查信息进行的缺陷的详细检查，提高了检查效率。 通过缺陷检查装置1检测颗粒和缺陷。如果通过使用SEM等的细节检查装置3进行详细检查来确定颗粒和缺陷的原因，则根据颗粒和缺陷确定属性 在执行详细检查之前由缺陷检查装置1检测到。 属性由使用光学显微镜等的属性检查装置确定。 基于这些属性，缺陷和颗粒被分成需要详细检查的那些和不需要详细检查或者不能被详细检查的那些。 细节检查装置3用于检查需要详细检查的颗粒和缺陷。