METHOD OF MANUFACTURE FOR AN ULTRAVIOLET EMITTING OPTOELECTRONIC DEVICE

    公开(公告)号:US20210273415A1

    公开(公告)日:2021-09-02

    申请号:US17320856

    申请日:2021-05-14

    摘要: Methods for fabricating ultraviolet laser diode devices include providing substrate members comprising gallium and nitrogen or aluminum and nitrogen, forming an epitaxial material overlying a surface region of the substrate members, patterning the epitaxial material to form epitaxial mesa regions, depositing a bond media on at least one of the epitaxial mesa regions, bonding the bond media on at least one of the epitaxial mesa regions to a handle substrate, subjecting the sacrificial layer to an energy source to initiate release of the substrate member and transfer the at least one of the epitaxial mesa regions to the handle substrate, and processing the at least one of the epitaxial mesa regions to form the ultraviolet laser diode device.