公开(公告)号：US20100178597A1

公开(公告)日：2010-07-15

申请号：US12685218

申请日：2010-01-11

申请人： Hiroyuki ISHIDA ,  Tamiya Aiyama ,  Koichi Maruyama

发明人： Hiroyuki ISHIDA ,  Tamiya Aiyama ,  Koichi Maruyama

IPC分类号： G03F1/00

CPC分类号： G03F1/72 ,  C03C17/3607 ,  C03C17/3626 ,  C03C17/3649 ,  C03C17/3665 ,  C03C17/38 ,  C03C2218/355 ,  G03F1/84 ,  Y10T428/31616

摘要： A mask blank is provided by forming a plurality of films, including at least a thin film to be a transfer pattern, on a board. At the time of patterning a resist film of the mask blank according to pattern data, film information to check with a pattern is obtained for each of a plurality of the films.

摘要翻译： 通过在板上形成至少包括作为转印图案的薄膜的多个膜来提供掩模坯料。 在根据图案数据对掩模毛坯的抗蚀剂膜进行图案化时，对于多个膜中的每一个获得用于检查图案的胶片信息。

公开(公告)号：US07660456B2

公开(公告)日：2010-02-09

申请号：US10592320

申请日：2005-03-07

申请人： Hiroyuki Ishida ,  Tamiya Aiyama ,  Koichi Maruyama

发明人： Hiroyuki Ishida ,  Tamiya Aiyama ,  Koichi Maruyama

IPC分类号： G06K9/00 ,  G03F1/00 ,  G06F17/50

CPC分类号： G03F1/72 ,  C03C17/3607 ,  C03C17/3626 ,  C03C17/3649 ,  C03C17/3665 ,  C03C17/38 ,  C03C2218/355 ,  G03F1/84 ,  Y10T428/31616

摘要： A mask blank is provided by forming a plurality of films, including at least a thin film to be a transfer pattern, on a board. At the time of patterning a resist film of the mask blank according to pattern data, film information to check with a pattern is obtained for each of a plurality of the films.

摘要翻译： 通过在板上形成至少包括作为转印图案的薄膜的多个膜来提供掩模坯料。 在根据图案数据对掩模毛坯的抗蚀剂膜进行图案化时，对于多个膜中的每一个获得用于检查图案的胶片信息。

公开(公告)号：US07106525B2

公开(公告)日：2006-09-12

申请号：US10752707

申请日：2004-01-08

申请人： Shuichi Takeuchi ,  Koichi Maruyama

发明人： Shuichi Takeuchi ,  Koichi Maruyama

IPC分类号： G02B13/18 ,  G02B3/02 ,  G11B7/00 ,  G11B7/135

CPC分类号： G11B7/139 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006

摘要： There is provided an objective lens for an optical pick-up used for different types of optical discs. The objective lens has at least one surface on which a plurality of annular zones are formed. The at least one surface is divided into an inner area having a low NA and an outer area having high NA outside the inner area. Further, with regard to a light beam used for a second optical disc (e.g., a DVD), an optical path difference generated between at least one of steps formed between adjacent annular zones of the plurality of annular zones within the outer area is lower by a predetermined amount than an integral multiple of a wavelength of the light beam used for the second optical disc.

摘要翻译： 提供了用于不同类型光盘的光学拾取器的物镜。 物镜具有形成多个环形区域的至少一个表面。 所述至少一个表面被分成具有低NA的内部区域和在所述内部区域之外具有高NA的外部区域。 此外，关于用于第二光盘（例如DVD）的光束，在外部区域中的多个环形区域的相邻环形区域之间形成的至少一个台阶之间产生的至少一个台阶之间产生的光程差较小 比用于第二光盘的光束的波长的整数倍的预定量。

公开(公告)号：US20050157624A1

公开(公告)日：2005-07-21

申请号：US11036989

申请日：2005-01-19

申请人： Dalsuke Koreeda ,  Koichi Maruyama

发明人： Dalsuke Koreeda ,  Koichi Maruyama

IPC分类号： G02B13/00 ,  G02B13/18 ,  G11B7/00 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1353 ,  G11B7/1275 ,  G11B7/1374 ,  G11B2007/0006

摘要： There is provided an optical pick-up used for recording data to and/or reproducing data from at least three types of optical discs having at least two different thicknesses of cover layers. The optical pick-up includes light sources and an objective lens. A thickness t1 of a first optical disc, a thickness t2 of a second optical disc, and a thickness t3 of a third optical disc satisfy a relationship t1≦t2 NA3. Further, a first light beam for the first optical disc is incident on the objective lens as a converging light beam, and the second and third light beams for the second and third optical discs are incident on the objective lens as diverging light beams, respectively. Given that magnification of the objective lens is m1 when the first optical disc is used, magnification of the objective lens is m2 when the second optical disc is used, and magnification of the objective lens is m3 when the first optical disc is used, following conditions are satisfied: m1>0, m3

摘要翻译： 提供了一种用于将数据记录到至少三种类型的具有至少两个不同厚度的覆盖层厚度的光盘中的数据的光学拾取器。 光学拾取器包括光源和物镜。 第一光盘的厚度t 1，第二光盘的厚度t 2和第三光盘的厚度t 3满足关系t 1 <= t 2 = NA 2> NA 3。 此外，用于第一光盘的第一光束作为会聚光束入射在物镜上，并且用于第二和第三光盘的第二和第三光束分别作为发散光束入射在物镜上。 假设当使用第一光盘时物镜的放大倍数为m 1，当使用第二光盘时物镜的倍率为m 2，并且当使用第一光盘时物镜的倍率为m 3 满足以下条件：m 1> 0，m 3

公开(公告)号：US06819504B2

公开(公告)日：2004-11-16

申请号：US10235643

申请日：2002-09-06

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G02B302

CPC分类号： G11B7/1374 ,  G11B7/0948 ,  G11B7/1376 ,  G11B7/13922 ,  G11B7/13927

摘要： A single-element objective lens for an optical pick-up directs an incident light beam to a data recording surface of an optical disc through a cover layer to form a beam spot thereon. A numerical aperture of the objective lens is 0.7 or more. The objective lens is configured to compensate for coma such that a characteristic of a change of spherical aberration due to a degree of divergence/convergence of the incident beam is comparable with respect to a characteristic of a change of spherical aberration due to variation of the cover layer so that the change of spherical aberration due to variation of the cover layer can be cancelled by the change of spherical aberration due to a degree of divergence/convergence of the incident beam.

摘要翻译： 用于光学拾取器的单元件物镜通过覆盖层将入射光束引导到光盘的数据记录表面，以在其上形成光束点。 物镜的数值孔径为0.7以上。 物镜被配置为补偿彗差，使得由于入射光束的发散/收敛程度引起的球面像差变化的特性与由于盖的变化引起的球面像差变化的特性相当 使得由于覆盖层的变化引起的球面像差的变化可以通过由入射光束的发散/收敛程度引起的球面像差的变化来抵消。

公开(公告)号：US06775064B2

公开(公告)日：2004-08-10

申请号：US09918440

申请日：2001-08-01

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G02B518

CPC分类号： G02B5/1895 ,  G02B5/1876 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006 ,  G11B2007/13727

摘要： The objective lens is a biconvex plastic lens having first and second surfaces which are both aspheric. The objective lens is divided into an inside area which is inside of a circle of an effective diameter of the objective lens and an outside area which is outside of the circle of the effective diameter. A diffractive lens structure having a plurality of concentric ring-shaped steps is formed in the inside area. A surface of the outside area is continuous with no steps and corresponds to a macroscopic base curve of the inside area. The objective lens has a gap of a spherical aberration between the inside area and the outside area.

摘要翻译： 物镜是具有非球面的第一和第二表面的双凸透镜塑料透镜。 物镜被分成在物镜的有效直径的圆的内侧的内侧区域和位于有效直径的圆的外侧的外部区域。 在内部区域中形成具有多个同心环状台阶的衍射透镜结构。 外部区域的表面是连续的，没有步骤，对应于内部区域的宏观基础曲线。 物镜在内部区域和外部区域之间具有球面像差的间隙。

公开(公告)号：US06741402B2

公开(公告)日：2004-05-25

申请号：US09973114

申请日：2001-10-10

申请人： Shuichi Takeuchi ,  Koichi Maruyama

发明人： Shuichi Takeuchi ,  Koichi Maruyama

IPC分类号： G02B308

CPC分类号： G02B27/4283 ,  G02B7/028 ,  G02B27/0037 ,  G02B27/4288 ,  G11B7/1353 ,  G11B7/1374 ,  G11B7/13922 ,  G11B2007/0006

摘要： A single element objective lens for an optical disc drive converges a laser beam, which is emitted by a laser source, on a data recording surface of an optical disc through a protective layer of the optical disc. One surface of the objective lens is divided into a central area including an optical axis thereof and a peripheral area surrounding the central area. The peripheral area is provided with a diffraction lens structure formed by a plurality of concentric annular zones including minute steps. The central area is a continuous surface having no stepped portions. The diffraction lens structure compensates for variation of converging characteristic of the objective lens due to a change of a temperature.

摘要翻译： 用于光盘驱动器的单个元件物镜将由激光源发射的激光束通过光盘的保护层会聚在光盘的数据记录表面上。 物镜的一个表面被分成包括其光轴的中心区域和围绕中心区域的周边区域。 周边区域设置有由包括微小步骤的多个同心环形区域形成的衍射透镜结构。 中心区域是没有阶梯部分的连续表面。 衍射透镜结构由于温度的变化而补偿物镜的会聚特性的变化。

公开(公告)号：US06594222B2

公开(公告)日：2003-07-15

申请号：US09747969

申请日：2000-12-27

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G11B700

CPC分类号： G11B7/1353 ,  G11B7/1374 ,  G11B7/13922 ,  G11B2007/0006

摘要： Disclosed is an objective lens of an optical pick-up that includes a refractive lens and a diffractive lens structure that is formed as a large number of concentric ring areas having minute steps in an optical axis direction at the boundaries therebetween. The lens surface of the objective lens is divided into a high NA exclusive area for a DVD only, and a common area that is surrouned by the high NA exclusive area. The diffractive lens structure in the common area changes the spherical aberration in the undercorrected direction as the wavelength of the incident laser beam increases. The diffractive lens structure formed in the high NA exclusive area has a smaller wavelength dependence of a spherical aberration than that formed in the common area, and is designed such that a spherical aberration at the short wavelength is adequately corrected for the thin cover type optical disc.

摘要翻译： 公开了一种光学拾取器的物镜，其包括折射透镜和衍射透镜结构，该折射透镜和衍射透镜结构形成为在其间的边界处沿光轴方向具有微小阶梯的多个同心圆环区域。 物镜的透镜表面被分成仅用于DVD的高NA专用区域和由高NA专属区域所淹没的公共区域。 公共区域中的衍射透镜结构随着入射激光束的波长增加而改变校正不正确的方向上的球面像差。 形成在高NA专用区域中的衍射透镜结构具有比在公共区域中形成的球面像差更小的波长依赖性，并且被设计成使得对于薄盖型光盘来适当地校正短波长的球面像差 。

公开(公告)号：US06344935B1

公开(公告)日：2002-02-05

申请号：US09517576

申请日：2000-03-02

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G02B300

CPC分类号： G11B7/1353 ,  G11B7/1374 ,  G11B7/139 ,  G11B2007/0006

摘要： An optical system of an optical pick-up that is capable of using optical discs DVD and CD. The system includes a light source portion for selectively emitting a first laser beam (650 nm) and a second laser beam (780 nm), and an objective lens for converging the laser beam from the light source portion onto an recording layer of the optical disc. The objective lens is provided with a transmittance controlling phase grating in a peripheral region to have a wavelength dependence such that the transmittance for the first laser beam is higher than the transmittance for the second laser beam. The transmittance controlling phase grating is formed as a plurality of concentric grooves. Each of the grooves has a rectangular cross-section in a plane containing an optical axis of the objective lens.

摘要翻译： 能够使用光盘DVD和CD的光学拾取器的光学系统。 该系统包括用于选择性地发射第一激光束（650nm）和第二激光束（780nm）的光源部分和用于将来自光源部分的激光束会聚到光盘的记录层上的物镜 。 物镜在周边区域设置有透射率控制相位光栅以具有波长依赖性，使得第一激光束的透射率高于第二激光束的透射率。 透射率控制相位光栅形成为多个同心凹槽。 每个凹槽在包含物镜的光轴的平面中具有矩形横截面。

公开(公告)号：US6115175A

公开(公告)日：2000-09-05

申请号：US577160

申请日：1995-12-22

申请人： Koichi Maruyama ,  Makoto Iwaki ,  Syunitirou Wakamiya ,  Shigeo Kubota ,  Hiroshi Suganuma ,  Minoru Takeda

发明人： Koichi Maruyama ,  Makoto Iwaki ,  Syunitirou Wakamiya ,  Shigeo Kubota ,  Hiroshi Suganuma ,  Minoru Takeda

IPC分类号： G02B13/14 ,  G02B13/24 ,  G03F7/20 ,  H01L21/027 ,  G01B11/00 ,  G02B11/00

CPC分类号： G03F7/70241 ,  G02B13/143

摘要： A UV image forming optical system includes a collimating lens for collimating light emitted from a UV light source, an imaging lens for forming an image of the collimated light transmitted through the collimating lens, and a beam splitting optical system positioned in an optical path of the collimated light between the collimating lens and the imaging lens. At least one of the collimated light emitted from the collimating lens and the light transmitted through the imaging lens, reflected by a reflector and transmitted again through the imaging lens is made incident upon an external viewing optical system.

摘要翻译： UV图像形成光学系统包括用于准直从UV光源发射的光的准直透镜，用于形成通过准直透镜透射的准直光的图像的成像透镜，以及位于所述准直透镜的光路中的分束光学系统 准直透镜与成像透镜之间的准直光。 从准直透镜发射的准直光中的至少一个和透过成像透镜的光被反射器反射并再次透过成像透镜，被入射到外部观察光学系统上。