公开(公告)号：US5015411A

公开(公告)日：1991-05-14

申请号：US494976

申请日：1990-03-16

申请人： Glenn M. Tom ,  Duncan W. Brown

发明人： Glenn M. Tom ,  Duncan W. Brown

IPC分类号： B01J20/32 ,  C01B6/06 ,  C01B21/04 ,  C01B23/00 ,  C01B25/06

CPC分类号： C01B6/065 ,  B01J20/08 ,  B01J20/223 ,  B01J20/3078 ,  B01J20/3204 ,  B01J20/3265 ,  C01B21/0427 ,  C01B23/00 ,  C01B25/06 ,  B01J2220/56 ,  B01J2220/64 ,  B01J2220/66

摘要： A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150.degree. C. to about 250.degree. C., depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel containing a bed of the scavenger, useful as an apparatus for purifying inert gases.

摘要翻译： 一种用于净化惰性气体混合物以从其中除去路易斯酸和氧化剂杂质的清除剂，其包含（i）惰性无机载体，和（ii）载体上的活性清除物质，其通过在其上沉积有机金属前体而形成，并在 选择升高的温度。 有机金属前体是包含IA，IIA和/或IIIA族金属的烷基金属化合物，其中热分解温度可以在约150℃至约250℃的范围内，这取决于作为 的前身。 还公开了：制备清除剂的相应方法; 通过与清除剂接触来净化惰性气体的方法; 以及容纳清除剂床的容器，可用作净化惰性气体的装置。

公开(公告)号：US4865822A

公开(公告)日：1989-09-12

申请号：US255765

申请日：1988-10-11

申请人： Glenn M. Tom ,  Duncan W. Brown

发明人： Glenn M. Tom ,  Duncan W. Brown

IPC分类号： B01J20/32

CPC分类号： B01J20/3265 ,  B01J20/3204 ,  B01J20/321

摘要： A scavenger, having utility for purifying a mixture comprising:(i) a primary component selected from one or more members of the group consisting of hydrogen selenide and hydrogen telluride, and(ii) impurities selected from one or more members of the group consisting of moisture and oxidants, comprising:(a) a support; and(b) associated with said support, one or more members of the group consisting of:(I) precusor compounds of the formula R.sub.3-x AlH.sub.x, wherein x is 0 or 1, and R is a hydrocarbon radical containing from 1 to 12 carbon atoms; and(II) aluminum chalconides of the formula Al.sub.2 M.sub.3, wherein M is selenium or tellurium.Illustrative supports useful in such scavenger include aluminosilicates, alumina, silica, carbon, and macroreticulate polymers. A process and apparatus are disclosed for purifying hyhrogen selenide and/or hydrogen telluride, to remove moisture and/or oxidant impurities therefrom, in which a bed of the scavenger is employed.

摘要翻译： 一种清除剂，其用于纯化混合物，其包含：（i）选自硒化氢和碲化氢中的一种或多种成员的主要成分，和（ii）选自以下的一种或多种成员的杂质： 水分和氧化剂，包括：（a）载体; 和（b）与所述载体相关联，所述组中的一个或多个成员包括：（I）式R3-xAlHx的前体化合物，其中x为0或1，R为含有1至12个碳的烃基 原子 和（II）式Al 2 M 3的铝金卤素，其中M是硒或碲。 在这种清除剂中有用的说明性的载体包括硅铝酸盐，氧化铝，二氧化硅，碳和大理石聚合物。 公开了一种用于净化硒化氢和/或碲化氢的方法和装置，以除去其中使用清除剂床的水分和/或氧化剂杂质。

公开(公告)号：US4738693A

公开(公告)日：1988-04-19

申请号：US117207

申请日：1987-11-04

申请人： Glenn M. Tom

发明人： Glenn M. Tom

IPC分类号： B01D53/04 ,  B01D53/14 ,  B01D53/18 ,  F16K27/02

CPC分类号： B01D53/0446 ,  F16K27/0263 ,  B01D2257/104 ,  B01D2257/80 ,  B01D2258/0216 ,  B01D2259/40003 ,  B01D2259/40084 ,  B01D2259/40086 ,  B01D2259/4525 ,  B01D53/261

摘要： A valve block leak-tightly joinable to a receptacle to form a container suitable for liquid storage/vapor dispensing, and gas purification applications. The valve block is provided with first and second valve ports with which valves may be employed to flow feed gas through the valve block and receptacle. To effect purging the valve block ports and gas flow passages, the valve block is provided with a purge valve port which may be opened while the first and second valve ports are closed, to remove dead space hold-up gas from the respective ports and flow passages of the block prior to initiation of vapor dispensing or gas purification operation. The disclosed container is particularly advantageous for dispensing or purifying source reagent compounds for elements of Group III and Group V, in semiconductor manufacturing applications.

公开(公告)号：US4604270A

公开(公告)日：1986-08-05

申请号：US760869

申请日：1985-07-31

申请人： Glenn M. Tom

发明人： Glenn M. Tom

IPC分类号： C08F8/42 ,  C01B23/00

CPC分类号： C08F8/42 ,  Y10S95/90

摘要： Lewis acid and oxidant impurities are removed from inert fluids by contacting with a high capacity macroreticulate polymer comprising a macroreticulate polymer backbone having a plurality of pendant functional groups or mixtures of functional groups having the general formula: ##STR1## where Ar is an aromatic hydrocarbon radical containing from one to three rings; R.sub.1 and R.sub.2 are the same or different and are selected from the group consisting of hydrogen, alkyl hydrocarbon radicals, methylene-bridged benzophenone radicals, salts of methylene-bridged benzophenone, methylene-bridged fluorenone radicals and salts of methylene-bridged fluorenone; and M is selected from the group consisting of lithium, potassium, sodium, alkyl magnesium, and alkyl zinc.

摘要翻译： 路易斯酸和氧化剂杂质通过与含有具有多个侧链官能团的大分子聚合物主链或具有以下通式的官能团的混合物的大容量大孔结晶聚合物接触而从惰性流体中除去：其中Ar是芳族烃基 包含一到三个戒指; R1和R2相同或不同，选自氢，烷基烃基，亚甲基桥连的二苯甲酮基，亚甲基桥连的二苯甲酮的盐，亚甲基桥芴酮基和亚甲基桥芴酮的盐; M选自锂，钾，钠，烷基镁和烷基锌。

公开(公告)号：US4603148A

公开(公告)日：1986-07-29

申请号：US655856

申请日：1984-09-28

申请人： Glenn M. Tom

发明人： Glenn M. Tom

IPC分类号： B01J20/26 ,  C08F8/42 ,  B01D53/34

CPC分类号： C08F8/42

摘要： Lewis acid and oxidant impurities are removed from inert fluids by contacting with a high capacity macroreticulate polymer comprising a macroreticulate polymer backbone having a plurality of pendant functional groups or mixtures of functional groups having the general formula: ##STR1## where Ar is an aromatic hydrocarbon radical containing from one to three rings; R.sub.1 and R.sub.2 are the same or different and are selected from the group consisting of hydrogen, alkyl hydrocarbon radicals, methylene-bridged benzophenone radicals, salts of methylene-bridged benzophenone, methylene-bridged fluorenone radicals and salts of methylene-bridged fluorenone; and M is selected from the group consisting of lithium, potassium, sodium, alkyl magnesium, and alkyl zinc.

摘要翻译： 路易斯酸和氧化剂杂质通过与含有具有多个侧链官能团的大分子聚合物主链或具有以下通式的官能团的混合物的大容量大孔结晶聚合物接触而从惰性流体中除去：其中Ar是芳族烃基 包含一到三个戒指; R1和R2相同或不同，选自氢，烷基烃基，亚甲基桥连的二苯甲酮基，亚甲基桥连的二苯甲酮的盐，亚甲基桥芴酮基和亚甲基桥芴酮的盐; M选自锂，钾，钠，烷基镁和烷基锌。