VENTILATION LOAD-REDUCING APPARATUS AND VEHICLE AIR CONDITIONER USING THE SAME
    81.
    发明申请
    VENTILATION LOAD-REDUCING APPARATUS AND VEHICLE AIR CONDITIONER USING THE SAME 审中-公开
    使用通风负荷减轻装置和车辆空调器

    公开(公告)号:US20110143642A1

    公开(公告)日:2011-06-16

    申请号:US13003807

    申请日:2009-07-06

    IPC分类号: B60H1/26

    摘要: A ventilation load-reducing apparatus, which has a simple structure and is capable of further improving the efficiency of the heat recovery, and a vehicle air conditioner using the same are proposed. The ventilation load-reducing apparatus includes an inside air lead-out path 4 for ventilation which leads air of a vehicle-interior out of a vehicle from a rear side of the vehicle-interior, an outside air lead-in path 5 which leads outside air into a front side of the vehicle-interior, a ventilation heat recovery device 6 which recovers heat from the air led out through the inside air lead-out path 4, a recovered heat radiator 7 which releases the heat on the air led in through the outside air lead-in path 5, and a heat transmitter 8 which transmits the heat between the ventilation heat recovery device 6 and the recovered heat radiator 7. The ventilation load-reducing apparatus is independent of a refrigerant circulating system 9 of a vehicle air conditioner 2.

    摘要翻译: 提出了具有简单的结构并且能够进一步提高热回收效率的通风减压装置,以及使用其的车辆空调。 通风减压装置包括用于通风的内部空气引出路径4,其将车辆内部的空气从车辆内部的后侧引出车辆外部空气引入路径5,其引导到外部 空气进入车辆内部的前侧;通风热回收装置6,其从通过内部空气引出路径4引出的空气回收热量;回收的散热器7,其释放通过的空气的热量; 外部空气引入路径5,以及在通风热量回收装置6和回收的散热器7之间传递热的热量传递器8.通风负荷减少装置与车辆空气的制冷剂循环系统9无关 护发素2。

    Film thickness measuring apparatus and film thickness measuring method
    82.
    发明授权
    Film thickness measuring apparatus and film thickness measuring method 失效
    膜厚测定装置及膜厚测定方法

    公开(公告)号:US07830141B2

    公开(公告)日:2010-11-09

    申请号:US12319403

    申请日:2009-01-07

    IPC分类号: G01B7/06 G01R33/12

    CPC分类号: G01B7/105

    摘要: Coil is made to be disposed with gap opposed to the surface of wafer, and wafer stage is made to move in X and Y direction and R and θ direction. When supplying an alternating current to coil with the frequency swept by impedance analyzer, the magnetic field made to be induced in coil will operate on the conductive film of wafer. By changing a parameter (a frequency or an angle) influencing the skin effect of the conductive film and giving the parameter to coil, the state where a magnetic field is not made to penetrate relatively the film of wafer and the state where the magnetic field is made to penetrate relatively the film can be formed. From the variation of various values corresponding to the eddy current induced based on the change of state influenced by the skin effect of the conductive film, the film thickness of wafer can be measured with sufficient accuracy.

    摘要翻译: 将线圈设置成与晶片表面相对的间隙,并且使晶片台在X和Y方向上移动,并且R和& 方向。 当用阻抗分析仪扫描的频率向线圈提供交流电时,在线圈中感应的磁场将在晶片的导电膜上工作。 通过改变影响导电膜的皮肤效应并给出线圈参数的参数(频率或角度),没有使磁场相对于晶片的膜渗透的状态和磁场为 可以形成相对渗透的薄膜。 根据由导电膜的皮肤效应影响的状态变化引起的涡电流对应的各种值的变化,可以以足够的精度测量晶片的膜厚度。

    Method and device for forecasting/detecting polishing end point and method and device for monitoring real-time film thickness
    83.
    发明授权
    Method and device for forecasting/detecting polishing end point and method and device for monitoring real-time film thickness 失效
    用于预测/检测抛光终点的方法和装置以及用于监控实时胶片厚度的方法和装置

    公开(公告)号:US07821257B2

    公开(公告)日:2010-10-26

    申请号:US12228945

    申请日:2008-08-18

    CPC分类号: B24B37/013

    摘要: A method and device for forecasting/detecting a polishing end point and for monitoring a real-time film thickness to suppress Joule heat loss due to the eddy current to the minimum, to precisely forecast/detect a polishing end point, to precisely calculate the remaining film thickness to be removed, and polishing rate. An inductor 36 in a sensor is arranged adjacent to a predetermined conductive film 28, and a magnetic flux change induced in the conductive film 28 by a magnetic flux formed by the inductor 36 is monitored, and by use of a magnetic flux change when a film thickness becomes corresponding to skin depth in which a film thickness in polishing is determined by the material of the predetermined conductive film 28 as a factor, a magnetic flux change part to forecast a polishing end point in the magnetic flux change process is detected, and a polishing end point is forecasted from the magnetic flux change part, and a polishing rate and a remaining film thickness amount to be removed are calculated on the spot.

    摘要翻译: 一种用于预测/检测抛光终点并用于监测实时膜厚度以将由于涡流引起的焦耳热损失抑制到最小以精确地预测/检测抛光终点的方法和装置,以精确地计算剩余的 要去除的膜厚度和抛光速率。 传感器中的电感器36布置成与预定的导电膜28相邻,并且通过由电感器36形成的磁通量在导电膜28中感应的磁通量变化被监测,并且通过使用磁通量改变膜 厚度对应于其中通过预定导电膜28的材料确定抛光中的膜厚度的皮肤深度,检测用于预测磁通量变化过程中的抛光终点的磁通量变化部分,并且 从磁通量变化部分预测抛光终点,并且现场计算抛光速率和待除去的剩余膜厚度量。

    Method and device for forecasting polishing end point
    84.
    发明授权
    Method and device for forecasting polishing end point 有权
    抛光终点预测方法和装置

    公开(公告)号:US07795866B2

    公开(公告)日:2010-09-14

    申请号:US12218600

    申请日:2008-07-16

    申请人: Takashi Fujita

    发明人: Takashi Fujita

    摘要: A method for forecasting a polishing end time or point, wherein an inductor 36 in a sensor is placed adjacent to the conductive film 28. The magnetic flux formed by the inductor 36 is monitored, and a change of magnetic flux induced in the conductive film 28 is detected. Based on the skin effect of the material of the conductive film 28 as a factor, a process is used in which an eddy current formed with the decrease of the film thickness by polishing increases and a process in which the eddy current formed with the decrease of the film thickness substantially decreases when the polishing is progressed. Based on the characteristic change of the magnetic flux induced in the conductive film 28, the polishing end point is forecasted, and at the same time, the magnetic flux induced in the conductive film 28 is alleviated or turned off.

    摘要翻译: 一种用于预测抛光结束时间或点的方法,其中传感器中的电感器36放置在与导电膜28相邻的位置。由电感器36形成的磁通量被监测,并且在导电膜28中感应的磁通量的变化 被检测到。 基于导电膜28的材料的皮肤效应作为因素,使用其中通过抛光增加膜厚减小而形成的涡流增加的过程和其中形成的涡流减小的过程 当抛光进行时,膜厚度显着降低。 基于在导电膜28中感应的磁通的特性变化,预测抛光终点,同时,导电膜28中感应的磁通减轻或关闭。

    Pad conditioner, pad conditioning method, and polishing apparatus
    85.
    发明授权
    Pad conditioner, pad conditioning method, and polishing apparatus 有权
    垫调节剂,垫调理方法和抛光装置

    公开(公告)号:US07731569B2

    公开(公告)日:2010-06-08

    申请号:US11948612

    申请日:2007-11-30

    申请人: Takashi Fujita

    发明人: Takashi Fujita

    IPC分类号: B24B1/00

    CPC分类号: B24B53/017 B24B29/005

    摘要: A pad conditioning apparatus and method for conditioning a surface of a polishing pad which is used in a polishing apparatus for polishing works, having a bending or deflecting or elastic member and a supporting section to support a base end of the bending or deflecting or elastic member, wherein the bending or deflecting or elastic member elastically deforms upon contact of a vicinity of a tip end of the bending or deflecting or elastic member with the polishing pad, so that a pressure necessary to condition the pad is generated. A pad preparation apparatus using the pad conditioner; and a pad preparation method using the same, enable even conditioning of a polishing pad of an elastic body by following a surface of the polishing pad.

    摘要翻译: 一种用于调整用于抛光工件的抛光装置中的具有弯曲或偏转或弹性构件的抛光垫的表面的衬垫调节装置和方法以及用于支撑弯曲或偏转或弹性构件的基端的支撑部分 其中,所述弯曲或偏转或弹性构件在弯曲或偏转或弹性构件的末端附近与抛光垫接触时弹性变形,从而产生调节垫所需的压力。 一种衬垫调节装置, 以及使用其的垫制备方法,通过跟随抛光垫的表面,能够均匀地调理弹性体的抛光垫。

    Relative position measurement method and relative position measurement system using satellites
    86.
    发明授权
    Relative position measurement method and relative position measurement system using satellites 失效
    相对位置测量方法和使用卫星的相对位置测量系统

    公开(公告)号:US07616152B2

    公开(公告)日:2009-11-10

    申请号:US11666254

    申请日:2004-10-29

    IPC分类号: G01S5/14 G01C21/30

    摘要: A positioning system wherein radio waves from a GPS satellite (4) are received by a reference station (1), the absolute position of which is already known, and a plurality of mobile stations (3) to perform relative positioning among particular stations, thereby determining the positions of the mobile stations (3). At least one of the mobile stations (3) is disposed such that a baseline limit length allowing relative positioning relative to the reference station (1) is exceeded, and the intervals between particular mobile stations (3) are shorter than the baseline limit length allowing relative positioning. Each of the stations (1, 3) is equipped with a GPS receiver (11, 21) that receives the radio waves from the GPS satellite (4), and further equipped with a wireless communication apparatus (12, 22) that transmits/receives data to/from a particular station. There are provided a relative position calculation part (32) for calculating the relative position between the particular stations; and an absolute position calculation part (33) for determining, based on an absolute position of one station that performs a relative positioning, an absolute position of the other station.

    摘要翻译: 一种定位系统,其中来自GPS卫星(4)的无线电波被其绝对位置已知的参考站(1)接收,并且多个移动站(3)在特定站点之间执行相对定位,从而 确定移动台(3)的位置。 移动站(3)中的至少一个被布置成使得允许允许相对于参考站(1)的相对定位的基线限制长度,并且特定移动站(3)之间的间隔比基线限制长度短,允许 相对定位 每个站(1,3)配备有从GPS卫星(4)接收无线电波的GPS接收机(11,21),并且还配备有发送/接收的无线通信装置(12,22) 来往/来自特定车站的数据。 提供了用于计算特定站之间的相对位置的相对位置计算部分(32) 以及用于基于执行相对定位的一个站的绝对位置确定另一个站的绝对位置的绝对位置计算部分(33)。

    SHEET CONVEYANCE APPARATUS AND IMAGE FORMING APPARATUS INCLUDING THE SAME
    87.
    发明申请
    SHEET CONVEYANCE APPARATUS AND IMAGE FORMING APPARATUS INCLUDING THE SAME 有权
    板材输送装置和图像形成装置,包括它们

    公开(公告)号:US20090160125A1

    公开(公告)日:2009-06-25

    申请号:US12335360

    申请日:2008-12-15

    IPC分类号: B65H9/00

    摘要: A sheet conveyance apparatus includes a reference surface extending along a sheet conveyance direction and configured to regulate the position of a side edge of a sheet to be conveyed, a skew conveyance mechanism configured to convey the sheet obliquely so that the side edge of the sheet collides against the reference surface, and a sheet deforming unit configured to deform the side edge of the sheet when the sheet is conveyed toward the reference surface by the skew conveyance mechanism.

    摘要翻译: 一种纸张输送装置,包括沿着纸张输送方向延伸并被配置为调节要输送的纸张的侧边缘的位置的参考表面;斜面输送机构,其被配置为倾斜地输送纸张,使得纸张的侧边缘碰撞 以及片材变形单元,其构造成当片材通过斜面传送机构朝向基准面传送时使片材的侧边缘变形。

    Image transfer fixation apparatus and image formation apparatus
    88.
    发明申请
    Image transfer fixation apparatus and image formation apparatus 有权
    图像转印固定装置和图像形成装置

    公开(公告)号:US20090116880A1

    公开(公告)日:2009-05-07

    申请号:US12289392

    申请日:2008-10-27

    IPC分类号: G03G15/16

    摘要: A transfer fixation apparatus includes: a fixing member that carries the toner image; a pressurizing member that becomes in contact with the fixing member with pressure to form a nip through which the recording target medium is transported; and a plurality of heating members that are provided at relatively upstream positions when viewed from the relatively downstream nip and apply heat to the surface of the recording target medium that is transported toward the nip, wherein the number of heating members that apply heat to the surface of the recording target medium is changed depending on whether the transfer of the toner image is performed only on the front side of the recording target medium or the transfer of the toner image is performed also on the reverse side of the recording target medium after the transfer of the toner image on the front side of the recording target medium.

    摘要翻译: 转印固定装置包括:承载调色剂图像的固定构件; 加压构件,其在压力下与所述固定构件接触以形成记录目标介质通过所述辊隙传送; 以及多个加热构件,其设置在从相对下游的辊隙观察的相对上游位置处,并向向辊隙输送的记录介质的表面施加热量,其中向表面施加热量的加热构件的数量 记录目标介质的变化取决于调色剂图像的转印仅在记录介质的前侧进行还是在转印之后也在记录介质的反面进行调色剂图像的转印 的调色剂图像在记录目标介质的正面上。