公开(公告)号：US06268904B1

公开(公告)日：2001-07-31

申请号：US09195880

申请日：1998-11-19

申请人： Takashi Mori ,  Tetsuo Takahashi ,  Hiroshi Nakamura ,  Yuji Kudo ,  Taro Ogata

发明人： Takashi Mori ,  Tetsuo Takahashi ,  Hiroshi Nakamura ,  Yuji Kudo ,  Taro Ogata

IPC分类号： G03B2742

CPC分类号： G03F7/70075 ,  G03F7/2022 ,  G03F7/70091 ,  G03F7/70858 ,  G03F7/70925

摘要： Optical exposure apparatus and methods of using same, for patterning a workpiece and photo-cleaning the optical components in the apparatus, which can be contaminated by moisture and organic compounds in the atmosphere. The apparatus comprises an illumination optical system having a light source and one or more optical components, and a projection lens having an object plane and an image plane and one or more optical components. The optical exposure apparatus includes an exposure optical path or an exposure light beam through a predetermined space in the optical exposure system. An optical path deflection member for deflecting light is introduced into the exposure optical path so as to create a second optical path that differs from the exposure optical path. Also disclosed is a method of photo-cleaning the aforementioned optical components, including the steps of forming an exposure optical path and then changing this path to create a second optical path that differs from the exposure optical path. An additional method of photo-cleaning a projection lens is disclosed, including the steps of providing an illumination light beam along an optical axis, providing and inserting a photo-cleaning optical member having refractive power into the beam, and refracting the beam so as to illuminate the lens surfaces comprising the projection lens.

公开(公告)号：US06175800B1

公开(公告)日：2001-01-16

申请号：US09296067

申请日：1999-04-21

申请人： Takashi Mori ,  Masatsugu Deshimaru ,  Hiroshi Maruyama

发明人： Takashi Mori ,  Masatsugu Deshimaru ,  Hiroshi Maruyama

IPC分类号： G06F16500

CPC分类号： G01C21/3679

摘要： A route along which a user can use facilities set as stopovers is searched; when the user sets facilities relevant to a toll road as a stopover of a route to a destination, only links of toll roads around the facilities are set as target links, and a route passing via nodes of links in the neighborhood of the facilities is searched by a processor.

摘要翻译： 搜索用户可以使用设置为中途停留的设施的路线; 当用户设置与收费公路相关的设施作为到达目的地的路线的中途停留时，仅设置设施周围的收费公路的链接被设置为目标链路，并且搜索经过设施附近的链路节点的路线 由处理器。

公开(公告)号：US5978733A

公开(公告)日：1999-11-02

申请号：US986388

申请日：1997-12-08

申请人： Masatsugu Deshimaru ,  Takashi Nomura ,  Takashi Mori

发明人： Masatsugu Deshimaru ,  Takashi Nomura ,  Takashi Mori

IPC分类号： G01C21/34 ,  G06F165/00

CPC分类号： G01C21/3614 ,  G01C21/34

摘要： A route search apparatus according to the present invention comprises: a storage device that stores link positional information of individual links and link connection information between the links, a minimum unit of road on a map being referred to as a link; a departure point specification device that specifies a point of departure on the map; a destination specification device that specifies a destination on the map; and a control device that selects a start point link that is to constitute a start point of a route search based upon the point of departure specified by the departure point specification device and the link positional information, selects an end point link that is to constitute an end point of the route search based upon the destination specified by the destination specification device and the link positional information, and performs a route search between the start point link and the end point link based upon the link connection information. And the control device selects a plurality of the start point links and a plurality of the end point links.

摘要翻译： 根据本发明的路径搜索装置包括：存储装置，其存储各个链路的链路位置信息和链路之间的链路连接信息，地图上的最小路单元被称为链路; 指定地图上出发点的出发点指定装置; 指定地图上的目的地的目的地规格设备; 以及控制装置，其基于由出发点指定装置指定的出发点和链接位置信息来选择构成路线搜索的起始点的起点链接，选择构成一个 基于由目的地指定装置指定的目的地的路线搜索的终点和链接位置信息，并且基于链接连接信息在起始点链接和终点链接之间执行路线搜索。 并且控制装置选择多个起始点链接和多个终点链接。

公开(公告)号：US5760963A

公开(公告)日：1998-06-02

申请号：US619252

申请日：1996-03-21

申请人： Takashi Mori

发明人： Takashi Mori

IPC分类号： G02F1/13 ,  G02B3/00 ,  G02B5/02 ,  G02B13/14 ,  G02B27/18 ,  G03F7/20 ,  G02B27/10

CPC分类号： G02B3/0062 ,  G02B13/143 ,  G02B5/0236 ,  G03F7/70058 ,  G03F7/70075 ,  G02B3/0012 ,  G02B3/0068

摘要： A fly-eye lens in accordance with the present invention comprises a plurality of lens elements which are arranged in two-dimensionally close contact with each other so as to connect light-entering and light-exit surfaces of the lens elements to each other, while at least three refractive surfaces with a predetermined refractive power are disposed between the light-entering and light-exit surfaces in each of the lens elements. Here, each of the plurality of lens elements has an identical focal length f and, concering a bundle of rays which enters each of the lens elements in parallel to its optical axis with a maximum incident height h.sub.max and then is emitted therefrom with an exit angle .theta..sub.max, substantially satisfies a conditional expression: h.sub.max =f.multidot.sin .theta..sub.max Accordingly, the plurality of lens elements substantially satisfy a sine condition, whereby the fly-eye lens forms a perfect diffusing surface light source.

摘要翻译： 根据本发明的蝇眼透镜包括彼此二维紧密接触地布置的多个透镜元件，以便将透镜元件的光进入和光出射表面彼此连接，同时 具有预定屈光力的至少三个折射表面设置在每个透镜元件中的光入射表面和光出射表面之间。 这里，多个透镜元件中的每一个都具有相同的焦距f，并且使具有最大入射高度hmax的平行于其光轴进入每个透镜元件的一束光束协调一致，然后从出射角 θmax基本上满足条件表达式：hmax =fxsinθmax因此，多个透镜元件基本上满足正弦条件，由此，飞眼透镜形成完美的漫射面光源。

公开(公告)号：US5745535A

公开(公告)日：1998-04-28

申请号：US553063

申请日：1995-11-03

申请人： Takashi Mori

发明人： Takashi Mori

IPC分类号： H04L27/38 ,  H04J11/00 ,  H04L27/26 ,  H04L7/00

CPC分类号： H04L27/2657 ,  H04L27/2662 ,  H04L27/2675

摘要： A provisional symbol discrimination timing detection unit detects a provisional symbol discrimination timing of a received signal modulated by a multi-subcarrier modulation scheme. A provisional symbol extraction unit demodulates the received signal and outputs, as a provisional demodulated symbol, a demodulated signal value of the provisional symbol discrimination timing of the demodulated signal for each subcarrier, demodulated signal being obtained by quadrature-demodulating the received signal. A phase difference detection unit detects a phase difference between the phase of the output provisional demodulated symbol of the received signal at a predetermined position and the phase of a reference symbol at this position. A symbol discrimination timing correction unit obtains a time difference between the provisional discrimination timing and the reference symbol discrimination timing on the basis of a subcarrier frequency and the detected phase difference for each subcarrier and corrects the provisional symbol discrimination timing on the basis of the time difference.

摘要翻译： 临时符号鉴别定时检测单元检测由多子载波调制方案调制的接收信号的临时符号鉴别定时。 临时符号提取单元对接收到的信号进行解调，并且作为临时解调符号输出每个子载波的解调信号的临时符号鉴别定时的解调信号值，通过对接收信号进行正交解调获得的解调信号。 相位差检测单元检测在预定位置处的接收信号的输出临时解调符号的相位与该位置处的参考符号的相位之间的相位差。 符号鉴别定时校正单元根据子载波频率和检测到的每个子载波的相位差来获得临时鉴别定时和参考符号鉴别定时之间的时间差，并且基于时间差校正临时符号鉴别定时 。

公开(公告)号：US5713660A

公开(公告)日：1998-02-03

申请号：US334665

申请日：1994-11-04

申请人： Takashi Mori ,  Hideki Komatsuda ,  Noriaki Yamamoto

发明人： Takashi Mori ,  Hideki Komatsuda ,  Noriaki Yamamoto

IPC分类号： G02B19/00 ,  G02B27/00 ,  G03F7/20 ,  F21V5/04

CPC分类号： G03F7/70091 ,  G02B19/0028 ,  G02B19/0047

摘要： An illumination optical apparatus according to the present invention comprises a light source, a collector mirror having an ellipsoidal surface of revolution for reflecting and collecting light from the light source, a collimator lens for converting the light collected by the collector mirror into nearly parallel beams, an optical integrator for producing a plurality of light source images from the beams outgoing from the collimator lens, and a condenser lens for condensing light from the plurality of light source images to illuminate a body to be illuminated in a superimposed manner. Wherein the collimator lens is arranged to satisfy the following condition, R.sub.max

摘要翻译： 根据本发明的照明光学装置包括光源，具有用于反射和收集来自光源的光的旋转椭圆面的集光镜，用于将由集光镜收集的光转换成几乎平行的光束的准直透镜， 用于从来自准直透镜的光束产生多个光源图像的光学积分器，以及用于聚集来自多个光源图像的光的聚光镜，以照亮重叠的被照明体。 其中准直透镜被设置为满足以下条件，Rmax

公开(公告)号：US5636003A

公开(公告)日：1997-06-03

申请号：US365532

申请日：1994-12-28

申请人： Osamu Tanitsu ,  Takashi Mori ,  Noriaki Yamamoto

发明人： Osamu Tanitsu ,  Takashi Mori ,  Noriaki Yamamoto

IPC分类号： G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70058 ,  G03F7/70358

摘要： An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.

摘要翻译： 一种照明光学装置，用于以弓形或矩形的形状照亮被照明的物体。 第一光学积分器基于平行光束形成基本线性排列的多个光源图像。 然后，基于来自第一光学积分器的光束，第二光学积分器以基本上正方形的布置形成多个光源图像。 中继光学系统设置在第一和第二光学积分器之间，并且使由第一光学整形器形成的光源图像的位置与由第二光学积分器形成的光源图像的位置共轭。

公开(公告)号：US5389643A

公开(公告)日：1995-02-14

申请号：US013080

申请日：1993-02-03

申请人： Shuhei Miyazawa ,  Shigeki Hibi ,  Hiroyuki Yoshimura ,  Takashi Mori ,  Yorihisa Hoshino ,  Mitsuo Nagai ,  Kouichi Kikuchi ,  Hisashi Shibata ,  Kazuo Hirota ,  Takashi Yamanaka ,  Isao Yamatsu ,  Masanori Mizuno

发明人： Shuhei Miyazawa ,  Shigeki Hibi ,  Hiroyuki Yoshimura ,  Takashi Mori ,  Yorihisa Hoshino ,  Mitsuo Nagai ,  Kouichi Kikuchi ,  Hisashi Shibata ,  Kazuo Hirota ,  Takashi Yamanaka ,  Isao Yamatsu ,  Masanori Mizuno

IPC分类号： A61K31/46 ,  A61P1/00 ,  A61P1/08 ,  A61P25/20 ,  A61P43/00 ,  C07C229/60 ,  C07C229/64 ,  C07D451/04 ,  C07D451/12 ,  C07D451/06

CPC分类号： C07D451/04

摘要： An aminobenzoic acid derivative represented by the following general formulas (I), (I-2) or (I-3), or a pharmacologically acceptable salt thereof, which exhibits a serotonin antagonism and an acetylcholine release accelerating activity at a well-balanced activity ratio and which is efficacious as a drug for patients with gastrointestinal unindentified complaints: ##STR1## wherein R.sup.1 represents a group such as an alkynyl or cyanoalkyl group; R.sup.2 represents a group such as an amino or acylamino group;R.sup.3 represents a halogen atom;X represents --O-- or --NH--; andA represents an oxygen or sulfur atom.

摘要翻译： 由以下通式（I），（I-2）或（I-3）表示的氨基苯甲酸衍生物或其药理学上可接受的盐，其平衡活性显示出5-羟色胺拮抗作用和乙酰胆碱释放促进活性 （I-2）和（IMA）（I-3），其中R1表示诸如炔基或氰基烷基的基团 ; R2表示氨基或酰氨基等基团。 R3表示卤原子; X表示-O-或-NH-; A表示氧或硫原子。

公开(公告)号：US5296892A

公开(公告)日：1994-03-22

申请号：US8370

申请日：1993-01-22

申请人： Takashi Mori

发明人： Takashi Mori

IPC分类号： G02B19/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/70058 ,  G02B19/0014 ,  G02B19/0047

摘要： An illuminating apparatus comprises a first optical integrator and a second optical integrator which are replaceably arranged. The second optical integrator is structured to provide substantially the same number of secondary light sources as the first optical integrator but with the different size of surface light source formed by these second light sources. Further, the structure is arranged so that it has an aperture number on the emission side, which is equal to the aperture number of the first optical integrator on its emission side. Hence, the illuminance evenness is not degraded even when the .sigma. value is significantly varied.

摘要翻译： 照明装置包括可替换地布置的第一光学积分器和第二光学积分器。 第二光学积分器被构造为提供与第一光学积分器基本相同数量的次级光源，但是具有由这些第二光源形成的不同尺寸的表面光源。 此外，该结构被布置成使得其在发射侧具有孔数，该孔数与发射侧的第一光学积分器的孔径数相等。 因此，即使当（Sigma）值显着变化时，照度均匀性也不会降低。

公开(公告)号：US5245384A

公开(公告)日：1993-09-14

申请号：US899546

申请日：1992-06-16

申请人： Takashi Mori

发明人： Takashi Mori

IPC分类号： G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70058

摘要： An illuminating optical apparatus adapted to eliminate the occurrence of any exposure light quantity loss and maintain an uniform exposure condition even if the .sigma. value of an illuminating system is varied in response to changing of the pattern of a reticle to be exposed and an exposure apparatus having such illuminating optical apparatus. The illuminating optical apparatus includes an elliptical mirror for condensing an illuminating light from a light source, a collimating optical system for collimating the condensed illuminating light, an optical integrator for forming a plurality of secondary light sources from the coliminated illuminating light, and an afocal zoom optical system arranged in an optical path between the collimating optical system and the optical integrator to vary the secondary light sources in size. An image of an opening of the elliptical mirror is formed at an entrance surface of the optical integrator or in the vicinity thereof.

摘要翻译： 一种照明光学装置，其适用于消除任何曝光光量损失的发生，并且即使照明系统的σ值响应于待曝光的掩模版的图案的改变而变化，并且保持均匀的曝光条件，以及具有 这种照明光学装置。 照明光学装置包括：用于聚集来自光源的照明光的椭圆镜;用于准直聚光照明光的准直光学系统;用于从聚焦照明光形成多个次级光源的光学积分器;以及远焦放大 光学系统布置在准直光学系统和光学积分器之间的光路中，以改变二次光源的尺寸。 椭圆镜的开口的图像形成在光学积分器的入射面或其附近。