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    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
    81.
    发明申请
    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE 有权
    非易失性半导体存储器件

    公开(公告)号：US20110127597A1

    公开(公告)日：2011-06-02

    申请号：US13003644

    申请日：2009-07-01

    申请人： Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Yosuke Komori ,  Megumi Ishiduki ,  Masaru Kito ,  Ryota Katsumata ,  Masaru Kidoh

    发明人： Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Yosuke Komori ,  Megumi Ishiduki ,  Masaru Kito ,  Ryota Katsumata ,  Masaru Kidoh

    IPC分类号： H01L29/788 ,  H01L29/792

    CPC分类号： H01L29/7926 ,  G11C16/0466 ,  H01L27/11565 ,  H01L27/11578 ,  H01L27/11582

    摘要： A nonvolatile semiconductor memory device with charge storage layers with high reliability is provided. A plurality of insulating films and a plurality of electrode films 14 are alternately stacked on a substrate 11, and a plurality of selection gate electrodes 17 extending in the X direction and a plurality of bit lines BL extending in the Y direction are provided thereon. U-shaped silicon members 33 are provided, each of which is constituted by a plurality of silicon pillars 31 passing through the electrode films 14 and the selection gate electrode 17, whose upper ends are connected to the bit lines BL, and a connective member 32 connecting lower parts of one pair of the silicon pillars 31 disposed in diagonal positions. The electrode film 14 of each layer is divided for the respective selection gate electrodes 17. One pair of the silicon pillars 31 connected to one another through the connective member 32 are caused to pass through the different electrode films 14 and the different selection gate electrodes 17. All of the U-shaped silicon members 33 connected commonly to one bit line BL are commonly connected to another bit line BL.

    摘要翻译： 提供具有高可靠性的电荷存储层的非易失性半导体存储器件。 多个绝缘膜和多个电极膜14交替堆叠在基板11上，并且在其上设置有沿X方向延伸的多个选择栅电极17和在Y方向上延伸的多个位线BL。 设置有U形硅构件33，每个都由通过电极膜14的多个硅柱31和其上端连接到位线BL的选择栅电极17构成，并且连接构件32 连接设置在对角位置的一对硅柱31的下部。 每个层的电极膜14被分配用于各个选择栅极电极17.使通过连接构件32彼此连接的一对硅柱31通过不同的电极膜14和不同的选择栅电极17 通常连接到一个位线BL的所有U形硅构件33共同连接到另一位线BL。

    Nonvolatile semiconductor memory device
    82.
    发明授权
    Nonvolatile semiconductor memory device 有权
    非易失性半导体存储器件

    公开(公告)号：US08350326B2

    公开(公告)日：2013-01-08

    申请号：US12839895

    申请日：2010-07-20

    申请人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kito ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi

    发明人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kito ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi

    IPC分类号： H01L29/792

    CPC分类号： H01L29/7926 ,  H01L21/28282 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/42344 ,  H01L29/66833

    摘要： According to one embodiment, a nonvolatile semiconductor memory device includes first and second stacked structural bodies, first and second semiconductor pillars, a memory unit connection portion, a selection unit stacked structural body, first and second selection unit semiconductor pillars, a selection unit connection portion, and first to fifth interconnections. The semiconductor pillars pierce the stacked structural bodies. The first and second interconnections are connected to the first and second semiconductor pillars, respectively. The memory unit connection portion connects the first and second semiconductor pillars. The selection unit semiconductor pillars pierce the selection unit stacked structural body. The third and fourth interconnections are connected to the first and second selection unit semiconductor pillars, respectively. The selection unit connection portion connects the first and second selection unit semiconductor pillars. The fifth interconnection is connected to the third interconnection on a side opposite to the selection unit stacked structural body.

    摘要翻译： 根据一个实施例，非易失性半导体存储器件包括第一和第二堆叠结构体，第一和第二半导体柱，存储单元连接部分，选择单元堆叠结构体，第一和第二选择单元半导体柱，选择单元连接部分 ，以及第一至第五互连。 半导体支柱刺穿堆叠的结构体。 第一和第二互连分别连接到第一和第二半导体柱。 存储单元连接部连接第一和第二半导体柱。 选择单元半导体柱刺穿选择单元堆叠结构体。 第三和第四互连分别连接到第一和第二选择单元半导体柱。 选择单元连接部分连接第一和第二选择单元半导体柱。 第五互连在与选择单元堆叠结构体相反的一侧连接到第三互连。