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公开(公告)号：US07771602B2
公开(公告)日：2010-08-10
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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82.发明申请公开(公告)号：US20100177425A1
公开(公告)日：2010-07-15
申请号：US12730912
申请日：2010-03-24
IPC分类号： G11B5/09
摘要： A magnetic recording medium has a RAM region and a ROM region. The RAM region includes a plurality of first tracks each having a first magnetic portion. The first magnetic portions in adjacent tracks are separated from each other. The ROM region includes a plurality of second tracks each having a second magnetic portion. A width of the second magnetic portions in a direction perpendicular to a track direction of the first tracks is larger than that of the first magnetic portions in the perpendicular direction.
摘要翻译： 磁记录介质具有RAM区域和ROM区域。 RAM区域包括多个具有第一磁性部分的第一轨道。 相邻轨道中的第一磁性部分彼此分离。 ROM区域包括多个具有第二磁性部分的第二磁道。 第二磁性部分在与第一磁道的轨道方向垂直的方向上的宽度大于垂直方向上的第一磁性部分的宽度。
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公开(公告)号：US20090317662A1
公开(公告)日：2009-12-24
申请号：US12548374
申请日：2009-08-26
CPC分类号： G11B5/855
摘要： A magnetic recording medium has magnetic patterns formed of a patterned ferromagnetic layer, and a non-magnetic layer including a component of the ferromagnetic layer and separating the magnetic patterns, in which a thickness “a” of the non-magnetic layer and a thickness “b” of the magnetic patterns satisfy a relationship of: a
摘要翻译： 磁记录介质具有由图案化的铁磁层形成的磁图案和包含铁磁性层的成分的非磁性层，并分离磁性图案，其中非磁性层的厚度“a”和厚度“ 磁性图案的“b”满足以下关系：a
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84.发明申请METHOD OF MANUFACTURING DISCRETE TRACK RECORDING MEDIUM AND DISCRETE TRACK RECORDING MEDIUM 失效分离轨迹记录介质和分离轨迹记录介质的制造方法公开(公告)号：US20090195929A1
公开(公告)日：2009-08-06
申请号：US12400446
申请日：2009-03-09
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。
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公开(公告)号：US07323258B2
公开(公告)日：2008-01-29
申请号：US10947132
申请日：2004-09-23
申请人： Yoshiyuki Kamata , Yuichi Ohsawa , Hiroyuki Hieda , Akira Kikitsu
发明人： Yoshiyuki Kamata , Yuichi Ohsawa , Hiroyuki Hieda , Akira Kikitsu
CPC分类号： B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/855 , G11B2005/001 , Y10T428/256 , Y10T428/265
摘要： A magnetic recording medium which allows high density recording and has excellent durability can be obtained. A magnetic recording medium includes: a plurality of ferromagnetic material dots arranged on a soft magnetic layer formed on a non-magnetic substrate so as to be separated from one another; and carbon films which are formed on the respective ferromagnetic material dots, each carbon film having a smooth film face shape in a section passing through the center of each ferromagnetic material dot and a film thickness gradually decreasing from the center of the ferromagnetic material dot toward an outer edge thereof.
摘要翻译： 可以获得允许高密度记录并具有优异的耐久性的磁记录介质。 磁记录介质包括：多个铁磁材料点，其布置在形成在非磁性基板上以便彼此分离的软磁层上; 和形成在各个铁磁材料点上的碳膜，每个碳膜在穿过每个铁磁材料点的中心的部分中具有平滑的薄膜表面形状，并且薄膜厚度从铁磁材料点的中心逐渐减小到 的外边缘。
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86.发明授权Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造用于离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US07314833B2
公开(公告)日：2008-01-01
申请号：US11476038
申请日：2006-06-28
IPC分类号： H01L21/302
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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87.发明申请公开(公告)号：US20070230055A1
公开(公告)日：2007-10-04
申请号：US11723977
申请日：2007-03-22
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , G11B5/667 , G11B5/72 , G11B5/7315 , G11B5/7325 , G11B5/855
摘要： A magnetic recording media includes a toroidal substrate, a surface thereof is divided into a recording area located in a central part between an outer peripheral edge and an inner peripheral edge, edge areas located within 100 μm or more and 2,000 μm or less from the outer and inner peripheral edges, respectively, and adjacent areas located between the edge areas and the recording area, respectively, a magnetic film on the substrate, and a protective film on the magnetic film, in which the magnetic film is thinner in the edge areas than that in the adjacent areas, and at least a part of the protective film in the edge areas is thicker than that in the adjacent areas.
摘要翻译： 磁记录介质包括环形基板，其表面被分成位于外周边缘和内周边缘之间的中心部分的记录区域，位于距离外部边缘100μm以上且2000μm以下的边缘区域 分别位于边缘区域和记录区域之间的内周边缘和相邻区域，基板上的磁性膜和磁性膜上的保护膜，其中磁性膜在边缘区域中比薄 在相邻区域中，边缘区域中的保护膜的至少一部分比相邻区域的保护膜厚。
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公开(公告)号：US20070172584A1
公开(公告)日：2007-07-26
申请号：US11657720
申请日：2007-01-25
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： A method of manufacturing a patterned magnetic recording medium includes coating a magnetic film with a resist which is decomposed by exposure to electromagnetic radiation or an electron beam to have a low molecular weight, forming a pattern on the resist by an imprinting method, transferring the pattern to the magnetic film by using the resist having the pattern formed thereon as a mask, and removing the resist by exposing the resist to the electromagnetic radiation or the electron beam.
摘要翻译： 图案化磁记录介质的制造方法包括：通过用电磁辐射或电子束分解的抗蚀剂涂覆磁性膜以具有低分子量，通过压印方法在抗蚀剂上形成图案，转印图案 通过使用其上形成有图案的抗蚀剂作为掩模，并且通过将抗蚀剂暴露于电磁辐射或电子束来除去抗蚀剂到磁性膜。
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公开(公告)号：US07232621B2
公开(公告)日：2007-06-19
申请号：US10885028
申请日：2004-07-07
IPC分类号： G11B5/65
CPC分类号： B82Y10/00 , G11B5/00 , G11B5/488 , G11B5/58 , G11B5/596 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , G11B9/1418 , G11B2005/0002 , G11B2005/0005 , H01L43/12 , Y10T428/12465 , Y10T428/24479 , Y10T428/25 , Y10T428/31
摘要： A method of patterning magnetic material includes forming a ferromagnetic material layer containing one element selected from the group consisting of Fe, Co and Ni on a substrate, selectively masking a surface of the ferromagnetic material layer, and making nonferromagnetic. The making nonferromagnetic step includes exposing an exposed portion in halogen-containing reaction gas, changing magnetism of the exposed portion and a lower layer thereof by chemical reaction, and making the exposed portion a nonferromagnetic material region. A magnetic recording medium is fabricated by using the magnetic material patterning method and includes a plurality of recording regions made of ferromagnetic materials, each containing at least one element selected from the group consisting of Fe, Co and Ni, and a nonferromagnetic material region for separating the recording regions from each other. The nonferromagnetic material region is a compound region of the ferromagnetic material and halogen.
摘要翻译： 磁性材料的图案化方法包括在基板上形成含有选自Fe，Co和Ni的一种元素的铁磁材料层，选择性地掩蔽铁磁材料层的表面，并制成非铁磁性。 制造非铁磁步骤包括暴露部分在含卤素的反应气体中，通过化学反应改变暴露部分的磁性和下层，并使暴露部分成为非铁磁材料区域。 通过使用磁性材料图案化方法制造磁记录介质，并且包括由铁磁材料制成的多个记录区域，每个记录区域包含选自Fe，Co和Ni中的至少一种元素和用于分离的非铁磁材料区域 记录区域彼此。 非铁磁材料区域是铁磁材料和卤素的化合物区域。
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公开(公告)号：US07166261B2
公开(公告)日：2007-01-23
申请号：US10814257
申请日：2004-04-01
IPC分类号： C21D10/00
CPC分类号： B82Y10/00 , G11B5/00 , G11B5/488 , G11B5/58 , G11B5/596 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , G11B9/1418 , G11B2005/0002 , G11B2005/0005 , H01L43/12 , Y10T428/12465 , Y10T428/24479 , Y10T428/25 , Y10T428/31
摘要： A method of patterning magnetic material includes forming a ferromagnetic material layer containing one element selected from the group consisting of Fe, Co and Ni on a substrate, selectively masking a surface of the ferromagnetic material layer, and making nonferromagnetic. The making nonferromagnetic step includes exposing an exposed portion in halogen-containing reaction gas, changing magnetism of the exposed portion and a lower layer thereof by chemical reaction, and making the exposed portion a nonferromagnetic material region. A magnetic recording medium is fabricated by using the magnetic material patterning method and includes a plurality of recording regions made of ferromagnetic materials, each containing at least one element selected from the group consisting of Fe, Co and Ni, and a nonferromagnetic material region for separating the recording regions from each other. The nonferromagnetic material region is a compound region of the ferromagnetic material and halogen.
摘要翻译： 磁性材料的图案化方法包括在基板上形成含有选自Fe，Co和Ni的一种元素的铁磁材料层，选择性地掩蔽铁磁材料层的表面，并制成非铁磁性。 制造非铁磁步骤包括暴露部分在含卤素的反应气体中，通过化学反应改变暴露部分的磁性和下层，并使暴露部分成为非铁磁材料区域。 通过使用磁性材料图案化方法制造磁记录介质，并且包括由铁磁材料制成的多个记录区域，每个记录区域包含选自Fe，Co和Ni中的至少一种元素和用于分离的非铁磁材料区域 记录区域彼此。 非铁磁材料区域是铁磁材料和卤素的化合物区域。
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