-
公开(公告)号：US11906485B2
公开(公告)日：2024-02-20
申请号：US17546615
申请日：2021-12-09
发明人： Tanja Haas , Henry Thiele , Josef Ludwig
IPC分类号： G01N3/42
CPC分类号： G01N3/42
摘要： The invention relates to an indenter receptacle for a measuring device, having a receptacle for detachably fastening an indenter, having an interface for mounting a measuring device, wherein a solid body joint arrangement is provided, which at least three solid body joints are provided between the interface and the receptacle and which are aligned offset at 90° to one another with respect to their flexibility in only one spatial direction.
-
公开(公告)号：US20220205777A1
公开(公告)日：2022-06-30
申请号：US17599863
申请日：2020-05-08
摘要： An apparatus determines a layer thickness of a plurality of layers arranged on a body. The apparatus includes a THz transmitter configured to emit a THz signal to said plurality of layers and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by at least one layer of said plurality of layers. The apparatus is configured to determine the layer thickness of at least one of said plurality of layers based on said reflected portion of said THz signal. The apparatus further includes a distance measuring device for determining at least one parameter characterizing a distance between said apparatus and said body, wherein said distance measuring device may include at least one optical triangulation sensor.
-
公开(公告)号：US20220120667A1
公开(公告)日：2022-04-21
申请号：US17428940
申请日：2020-07-17
发明人： Rüdiger Mästle , Henry Thiele , Andreas Godorr
IPC分类号： G01N21/15 , G01N21/3581 , G01B11/06 , G01N21/88
摘要： An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.
-
公开(公告)号：US20210208041A1
公开(公告)日：2021-07-08
申请号：US16070617
申请日：2017-01-09
发明人： Helmut Fischer
IPC分类号： G01N3/46
摘要： A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.
-
公开(公告)号：US10707112B2
公开(公告)日：2020-07-07
申请号：US15420690
申请日：2017-01-31
发明人： Werner Volz , Paul Boos
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , G01N23/223 , H01L21/67
摘要： A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
-
公开(公告)号：US20220404140A1
公开(公告)日：2022-12-22
申请号：US17775564
申请日：2020-12-16
发明人： Rüdiger Mästle
摘要： An apparatus for transmitting and/or receiving terahertz, THz, radiation, comprising at least one terahertz element which is configured to generate and/or detect a THz signal, and at least one field-shaping element which in particular is assigned to the at least one terahertz element, wherein the at least one terahertz element is arranged in the region of a first surface of the field-shaping element.
-
公开(公告)号：US11385151B2
公开(公告)日：2022-07-12
申请号：US16070617
申请日：2017-01-09
发明人： Helmut Fischer
IPC分类号： G01N3/46
摘要： A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.
-
公开(公告)号：US11062934B2
公开(公告)日：2021-07-13
申请号：US16901503
申请日：2020-06-15
发明人： Werner Volz , Paul Boos
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , H01L21/67 , G01N23/223
摘要： A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
-
公开(公告)号：US20210116344A1
公开(公告)日：2021-04-22
申请号：US16464395
申请日：2017-11-06
发明人： HELMUT FISCHER
IPC分类号： G01N3/46
摘要： The invention relates to a measuring System, a measuring arrangement and a method for detecting measuring signals during a penetration movement of a penetration body (41) into a surface of a test body (14), in particular for hardness measurement or for determining the Scratch resistance of the surface of the test body (14), or for detecting measuring signals during a scanning movement of the penetration body (41) on the surface of the test body (14), in particular for determining the surface roughness, comprising a housing (47) provided with a power generating device (44) which is operatively connected to a penetration body (41) for generating a displacement movement of the penetration body (41) along a displacement axis (48) of the penetration body (41) and which actuates a penetration movement of the penetration body (41) into the surface to be examined of the test body (14), or which positions the penetration body (41) on the surface of the test body (14) for scanning, and further comprising at least one first measuring device (78) for measuring the penetration depth in the surface of the test body (14) or a displacement movement of the penetration body (41) along its displacement axis (48) during a scanning movement on the surface of the test body (14), wherein the power generating device (44) actuates the displacement movement of the penetration body (41) by means of a magnetic force.
-
10.发明申请公开(公告)号：US20220196529A1
公开(公告)日：2022-06-23
申请号：US17546615
申请日：2021-12-09
发明人： Tanja HAAS , Henry THIELE , Josef LUDWIG
IPC分类号： G01N3/42
摘要： The invention relates to an indenter receptacle for a measuring device, having a receptacle for detachably fastening an indenter, having an interface for mounting a measuring device, wherein a solid body joint arrangement is provided, which at least three solid body joints are provided between the interface and the receptacle and which are aligned offset at 90° to one another with respect to their flexibility in only one spatial direction.
-
-
-
-
-
-
-
-
-
搜索结果
25 条记录 (耗时 0.019 秒)
