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公开(公告)号:US20220205777A1
公开(公告)日:2022-06-30
申请号:US17599863
申请日:2020-05-08
Inventor: Rüdiger Mästle , Lars-Christian Anklamm
Abstract: An apparatus determines a layer thickness of a plurality of layers arranged on a body. The apparatus includes a THz transmitter configured to emit a THz signal to said plurality of layers and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by at least one layer of said plurality of layers. The apparatus is configured to determine the layer thickness of at least one of said plurality of layers based on said reflected portion of said THz signal. The apparatus further includes a distance measuring device for determining at least one parameter characterizing a distance between said apparatus and said body, wherein said distance measuring device may include at least one optical triangulation sensor.
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公开(公告)号:US20220120667A1
公开(公告)日:2022-04-21
申请号:US17428940
申请日:2020-07-17
Inventor: Rüdiger Mästle , Henry Thiele , Andreas Godorr
IPC: G01N21/15 , G01N21/3581 , G01B11/06 , G01N21/88
Abstract: An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.
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公开(公告)号:US12146733B2
公开(公告)日:2024-11-19
申请号:US17426597
申请日:2020-05-25
Inventor: Rüdiger Mästle , Lars-Christian Anklamm
IPC: G01B11/06 , G01B11/02 , G01B21/04 , G01N21/3581 , G01N21/3586 , G01B11/26
Abstract: A measuring device comprises a Terahertz, THz, transmitter configured to emit a THz signal to an object to be measured and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by said object. The said THz transmitter and said THz receiver are arranged in a measuring head of said measuring device. The measuring device may vary a distance between said measuring head and said object to be measured, emit, by means of said THz transmitter, said THz signal to said object to be measured, receive said reflected portion of said THz signal, and determine a first parameter characterizing a detected signal proportional and/or related to said received reflected portion of said THz signal.
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公开(公告)号:US20220404140A1
公开(公告)日:2022-12-22
申请号:US17775564
申请日:2020-12-16
Inventor: Rüdiger Mästle
Abstract: An apparatus for transmitting and/or receiving terahertz, THz, radiation, comprising at least one terahertz element which is configured to generate and/or detect a THz signal, and at least one field-shaping element which in particular is assigned to the at least one terahertz element, wherein the at least one terahertz element is arranged in the region of a first surface of the field-shaping element.
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公开(公告)号:US12061077B2
公开(公告)日:2024-08-13
申请号:US17599863
申请日:2020-05-08
Inventor: Rüdiger Mästle , Lars-Christian Anklamm
CPC classification number: G01B11/0625 , G01B11/026
Abstract: An apparatus determines a layer thickness of a plurality of layers arranged on a body. The apparatus includes a THz transmitter configured to emit a THz signal to said plurality of layers and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by at least one layer of said plurality of layers. The apparatus is configured to determine the layer thickness of at least one of said plurality of layers based on said reflected portion of said THz signal. The apparatus further includes a distance measuring device for determining at least one parameter characterizing a distance between said apparatus and said body, wherein said distance measuring device may include at least one optical triangulation sensor.
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公开(公告)号:US20220091028A1
公开(公告)日:2022-03-24
申请号:US17426597
申请日:2020-05-25
Inventor: Rüdiger Mästle , Lars-christian Anklamm
IPC: G01N21/3586 , G01B11/06 , G01B11/02
Abstract: A measuring device comprises a Terahertz, THz, transmitter configured to emit a THz signal to an object to be measured and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by said object. The said THz transmitter and said THz receiver are arranged in a measuring head of said measuring device. The measuring device may vary a distance between said measuring head and said object to be measured, emit, by means of said THz transmitter, said THz signal to said object to be measured, receive said reflected portion of said THz signal, and determine a first parameter characterizing a detected signal proportional and/or related to said received reflected portion of said THz signal.
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公开(公告)号:US12188859B2
公开(公告)日:2025-01-07
申请号:US17428940
申请日:2020-07-17
Inventor: Rüdiger Mästle , Henry Thiele , Andreas Godorr
IPC: G01N21/15 , G01N21/3581 , G01B11/06 , G01N21/88
Abstract: An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.
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公开(公告)号:US20240369350A1
公开(公告)日:2024-11-07
申请号:US18682059
申请日:2022-08-08
Inventor: Rüdiger Mästle , Niklas Müller
IPC: G01B11/06 , G01N21/3586 , G01N21/59
Abstract: A method, for example a computer-implemented method, includes determining a transmission of an object, for example a substrate, for electromagnetic radiation in a frequency range between 30 gigahertz (GHz) and 200 GHz. The method includes determining a thickness of the substrate on at least one location of the object, determining the transmission by using a first model characterizing the transmission of the object for the electromagnetic radiation, based at least on the thickness of the substrate.
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