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公开(公告)号：US20180180906A1
公开(公告)日：2018-06-28
申请号：US15853201
申请日：2017-12-22
IPC分类号： G02F1/01
CPC分类号： G02F1/0102 , G02F1/0131 , G02F1/0136
摘要： An apparatus includes an elastically deformable optical element holder situated to receive an optical element having a plurality of holder contact surfaces, the optical element holder including a plurality of receiving portions adjacent to an aperture and corresponding to respective holder contact surfaces, each receiving portion displaceable through deformation of the optical element holder so that the optical element is insertable in the aperture so as to be cushionably supported in a predetermined position with the receiving portions in contact with the respective holder contact surfaces.
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公开(公告)号：US09019497B2
公开(公告)日：2015-04-28
申请号：US12298762
申请日：2007-05-01
申请人： Baoliang Wang
发明人： Baoliang Wang
CPC分类号： G01N21/19 , G01M11/0285
摘要： A system for measuring linear or circular diattenuation in an optical element includes a sample rotation stage for securing an optical element sample; a light source module for generating a source light beam and a detector module. The light source module and detector module are arranged with the sample rotation stage between them, thereby permitting the source light beam to propagate through a sample that may be secured in the sample stage and to the detector module. Linear motion control of the light source module and the detector module, as well as tilt control of the light source module, the sample rotation stage and the detector module is provided, thereby to facilitate detection, by the detector module of the modulated light intensity information corresponding to a diattenuation characteristic of the optical sample secured in the sample stage.
摘要翻译： 用于测量光学元件中的线性或圆形衰减的系统包括用于固定光学元件样品的样品旋转台; 用于产生源光束的光源模块和检测器模块。 光源模块和检测器模块布置有它们之间的样品旋转台，从而允许源光束传播通过可以固定在样品台中的样品和检测器模块。 提供光源模块和检测器模块的线性运动控制以及光源模块，样品旋转台和检测器模块的倾斜控制，从而便于检测器模块检测调制的光强度信息 对应于固定在样品台中的光学样品的变色特性。
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公开(公告)号：US08797660B1
公开(公告)日：2014-08-05
申请号：US13720928
申请日：2013-01-23
CPC分类号： G02B7/006 , G01N21/01 , G01N21/21 , G01N2201/0224 , G02B7/003 , G02B7/1822 , G02B7/1825 , G02B27/28 , Y10T29/49815 , Y10T29/49826 , Y10T29/49947
摘要： A mechanism and method for precisely arranging two or more optical elements, such as those incorporated into photoelastic modulators (PEMs), at a specific angular orientation. The method includes supporting one optical element in an annular mounting member that has an optic axis, and supporting other optical elements in other annular mounting members that have optic axes, and concentrically stacking together the two or more mounting members about a central axis in a manner such that one mounting member may be rotated relative to the others about the central axis and such that the optic axes of the mounting members define an optics angle, and rotating one mounting member relative to the others to define the specific angular orientation of the optical elements.
摘要翻译： 一种用于精确地布置两个或更多个光学元件（例如并入光弹性调制器（PEM）中的那些）的特定角取向的机构和方法。 该方法包括将一个光学元件支撑在具有光轴的环形安装构件中，并且将其它光学元件支撑在具有光轴的其它环形安装构件中，并以这种方式同心地将两个或更多个安装构件堆叠在中心轴上 使得一个安装构件可以围绕中心轴线相对于其它安装构件旋转，并且使得安装构件的光轴限定光学角度，并且相对于其它安装构件旋转一个安装构件以限定光学元件的特定角度取向 。
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公开(公告)号：US08537476B2
公开(公告)日：2013-09-17
申请号：US12993206
申请日：2008-06-06
申请人： James C. Mansfield , Baoliang Wang
发明人： James C. Mansfield , Baoliang Wang
CPC分类号： G02F1/0131 , G02F1/0102 , G02F1/0136
摘要： A support system for a vibrating component of an optical assembly that is adjacent to a frame, wherein the component is driven to vibrate along an X-direction of a three-dimensional Cartesian coordinate system. The support system includes a support member connected to the frame. The support system has contact elements that are adjustable for movement into and out of contact with the vibrating component to constrain motion of the vibrating component in the Y-direction and in the Z-direction, without constraining motion of the vibrating component in the X-direction.
摘要翻译： 一种用于邻近框架的光学组件的振动部件的支撑系统，其中所述部件被驱动以沿着三维笛卡尔坐标系的X方向振动。 支撑系统包括连接到框架的支撑构件。 支撑系统具有可调节的接触元件，用于与振动部件移动和脱离接触，以约束Y方向和Z方向上的振动部件的运动，而不限制X轴方向上的振动部件的运动， 方向。
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公开(公告)号：US20120326005A1
公开(公告)日：2012-12-27
申请号：US13588352
申请日：2012-08-17
申请人： Baoliang WANG
发明人： Baoliang WANG
IPC分类号： G01J1/16
摘要： A system for controlling a light beam in an optical setup includes a light source that directs a collimated light beam along a path, through a sample, and toward the active area of a stationary detector. A lens is selectively movable into the path of the light beam for spreading the beam in instances where the path of the beam is altered by the sample between the source and the stationary detector. The detector, therefore, is held stationary. Adjustment mechanisms are provided for increasing the intensity characteristic of the light that reaches the detector to account for a decrease in intensity that occurs when the lens is in the path of the light beam to spread the beam.
摘要翻译： 用于控制光学装置中的光束的系统包括光源，该光源将准直光束沿着路径，通过样本并朝向静止检测器的有效区域引导。 在光源的路径被源和静态检测器之间的样本改变的情况下，透镜可选择性地移动到光束的路径中，用于扩展光束。 因此，检测器保持静止。 提供调节机构用于增加到达检测器的光的强度特性，以解决当透镜在光束的路径中扩展光束时发生的强度的降低。
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公开(公告)号：US20110181883A1
公开(公告)日：2011-07-28
申请号：US13002650
申请日：2009-07-02
申请人： Baoliang Wang
发明人： Baoliang Wang
IPC分类号： G01J4/00
CPC分类号： G01N21/23 , G02F1/0131
摘要： Improving the throughput of systems for measuring birefringence of optical samples includes techniques for directing multiple beams through the photoelastic modulator component of the system so that, along with expanded detection mechanisms to accommodate the multiple beams, the heretofore scanning (via a single beam) of a line across the sample is considerably enlarged so that several lines covering a “swath” of the sample area is scanned by the system of the present invention.
摘要翻译： 提高用于测量光学样本的双折射的系统的通量包括用于将多个光束引导通过系统的光弹性调制器部件的技术，使得随着扩展的检测机构以适应多个光束，迄今为止扫描（经由单个光束） 跨越样品的线被相当大地放大，使得覆盖样品区域的“条”的几条线被本发明的系统扫描。
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公开(公告)号：US06985227B2
公开(公告)日：2006-01-10
申请号：US10730583
申请日：2003-12-08
申请人： Baoliang Wang
发明人： Baoliang Wang
IPC分类号： G01J4/00
CPC分类号： G03F7/7085 , G01J4/04 , G01N21/19 , G01N21/23 , G01N21/33 , G03F7/70966
摘要： Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is a technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.
摘要翻译： 提供了用于精确测量光学元件的双折射性质的系统和方法，特别是用于深紫外（DUV）波长的那些元件。 该系统包括位于样品（136）的相对侧上的两个光弹性调制器（PEM）（126,128）。 每个PEM可操作用于调制通过样品的光束的极性。 该系统还包括与一个PEM相关联的偏振器（124），与另一个PEM相关联的分析器（130），以及用于在通过PEM，偏振器和分析器之后测量光的强度的检测器（132）。 描述了用于在宽范围内确定双折射性质的技术。 例如，提供双波长源光实施例用于测量相对高水平的双折射。 还提供了一种技术，用于根据对于给定的采样光学元件的待检测的双折射的估计值来选择确定双折射性质的多种方法中最精确和最有效的方法之一。
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公开(公告)号：US09683930B2
公开(公告)日：2017-06-20
申请号：US14893157
申请日：2014-05-20
发明人： John Freudenthal , Andy Leadbetter , Baoliang Wang
CPC分类号： G01N21/23 , G01J4/00 , G01N21/21 , G01N2201/0621 , G01N2201/0683
摘要： This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one example, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. An example spatially resolved imaging approach described herein is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.
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公开(公告)号：US20150153270A1
公开(公告)日：2015-06-04
申请号：US14095833
申请日：2013-12-03
发明人： Baoliang WANG
IPC分类号： G01N21/23
CPC分类号： G01N21/23
摘要： A birefringence measurement system includes a lens mounted for selective movement into and out of use in the optical setup so that a wide range of sample types can be handled by the system without reconfiguring the primary components of the optical setup of the system (moving the detector, changing the light source power, etc.) in a manner that would sacrifice the cost effectiveness, efficiency, mechanical reliability and repeatability of measurements for such systems.
摘要翻译： 双折射测量系统包括安装用于在光学设置中选择性地移入和移出使用的透镜，使得可以由系统处理大范围的采样类型，而不重新配置系统的光学设置的主要部件（移动检测器 ，改变光源功率等），以牺牲这种系统的成本效益，效率，机械可靠性和测量重复性。
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公开(公告)号：US20140204451A1
公开(公告)日：2014-07-24
申请号：US13720928
申请日：2013-01-23
IPC分类号： G02B7/00
CPC分类号： G02B7/006 , G01N21/01 , G01N21/21 , G01N2201/0224 , G02B7/003 , G02B7/1822 , G02B7/1825 , G02B27/28 , Y10T29/49815 , Y10T29/49826 , Y10T29/49947
摘要： A mechanism and method for precisely arranging two or more optical elements, such as those incorporated into photoelastic modulators (PEMs), at a specific angular orientation. The method includes supporting one optical element in an annular mounting member that has an optic axis, and supporting other optical elements in other annular mounting members that have optic axes, and concentrically stacking together the two or more mounting members about a central axis in a manner such that one mounting member may be rotated relative to the others about the central axis and such that the optic axes of the mounting members define an optics angle, and rotating one mounting member relative to the others to define the specific angular orientation of the optical elements.
摘要翻译： 一种用于精确地布置两个或更多个光学元件（例如并入光弹性调制器（PEM）中的那些）的特定角取向的机构和方法。 该方法包括将一个光学元件支撑在具有光轴的环形安装构件中，并且将其它光学元件支撑在具有光轴的其它环形安装构件中，并以这种方式同心地将两个或更多个安装构件堆叠在中心轴上 使得一个安装构件可以围绕中心轴线相对于其它安装构件旋转，并且使得安装构件的光轴限定光学角度，并且相对于其它安装构件旋转一个安装构件以限定光学元件的特定角度取向 。
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