Method for determining the aberration coefficients of the aberration function of a particle-optical lens
    2.
    发明授权
    Method for determining the aberration coefficients of the aberration function of a particle-optical lens 有权
    用于确定颗粒光学透镜的像差函数的像差系数的方法

    公开(公告)号:US07544939B2

    公开(公告)日:2009-06-09

    申请号:US11634283

    申请日:2006-12-05

    IPC分类号: G01N23/00

    摘要: A lens of particle-optical apparatus, such as the objective lens, suffers from aberrations. As is already known since decades Ronchigrams can be used to determine these aberrations of particle-optical lenses.Such methods rely e.g. on the determination of the 2nd derivative of the aberration function on the basis of local magnification in one or a set of Ronchigrams. Being dependent on the 2nd derivative the mathematics of these methods allow only (infinitesimal) small shifts between the Ronchigrams. However, this implies that e.g. the spatial quantization noise of the camera recording the Ronchigrams results in a large error. These conflicting requirements limit the accuracy and thus the usefulness of the known methods.The invention describes a set of algorithms which result in an improved method to quantify the lens aberration coefficients using a set of Ronchigrams.

    摘要翻译: 诸如物镜的粒子光学装置的透镜遭受像差。 如已经知道的,因为几十年可以使用Ronchigrams来确定颗粒光学透镜的这些像差。 这样的方法依赖于例如 基于在一个或一组Ronchigram中的局部放大率来确定像差函数的二阶导数。 依赖于二阶导数,这些方法的数学只允许(无穷小)Ronchigram之间的小变化。 然而,这意味着例如 记录Ronchigrams的相机的空间量化噪声导致大的误差。 这些冲突的要求限制了已知方法的准确性和有效性。 本发明描述了一组算法,其导致使用一组Ronchigram来量化透镜像差系数的改进方法。