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公开(公告)号：US20120062068A1
公开(公告)日：2012-03-15
申请号：US13228593
申请日：2011-09-09
IPC分类号： H01L41/02
CPC分类号： H03H9/175 , H03H9/02062 , H03H9/13
摘要： The various embodiments of the present disclosure relate generally bulk-acoustic-wave resonators. An exemplary embodiment of the present invention provides a bulk-acoustic-wave resonator comprising an acoustic reflector, a substantially c-axis oriented hexagonal crystal structure, and a plurality of electrodes. The crystal structure is solidly-mounted to the acoustic reflector. The bulk-wave resonator resonates in at least two non-harmonically-related operational modes.
摘要翻译： 本公开的各种实施例一般涉及体声波谐振器。 本发明的一个示例性实施例提供一种包括声反射器，基本上c轴取向的六方晶体结构和多个电极的体声波谐振器。 晶体结构牢固地安装在声反射体上。 体波谐振器以至少两个非谐波相关的工作模式谐振。
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公开(公告)号：US20130162369A1
公开(公告)日：2013-06-27
申请号：US13530029
申请日：2012-06-21
申请人： Adam Wathen , William Hunt , Farasat Munir , Kyle Spencer Davis , James Geoffrey Maloney , Ryan Sloan Westafer
发明人： Adam Wathen , William Hunt , Farasat Munir , Kyle Spencer Davis , James Geoffrey Maloney , Ryan Sloan Westafer
IPC分类号： H03H9/30
CPC分类号： H03H9/30
摘要： A thin-film bulk acoustic wave delay line device providing true-time delays and a method of fabricating same. An exemplary device can comprise several thin-film layers including thin-film transducer layers, thin-film delay layers, and stacks of additional thin-film materials providing acoustic reflectors and matching networks. The layer material selection and layer thicknesses can be controlled to improve impedance matching between transducers and the various delay line materials. For example, the transducer layers and delay layers can comprise piezoelectric and amorphous forms of the same material. The layers can be deposited on a carrier substrate using standard techniques. The device can be configured so that mechanical waves propagate solely within the thin films, providing a substrate-independent device. The device, so constructed, can be of a small size, e.g. 40 μm per side, and capable of handling high power levels, potentially up to 20 dBm, with low insertion loss of approximately 3 dB.
摘要翻译： 提供真实时间延迟的薄膜体声波延迟线装置及其制造方法。 示例性装置可以包括几个薄膜层，包括薄膜换能器层，薄膜延迟层和提供声反射器和匹配网络的附加薄膜材料的叠层。 可以控制层材料选择和层厚度，以改善换能器和各种延迟线材料之间的阻抗匹配。 例如，换能器层和延迟层可以包括相同材料的压电和无定形形式。 可以使用标准技术将这些层沉积在载体衬底上。 该器件可以被配置为使得机械波仅在薄膜内传播，从而提供与衬底无关的器件。 如此构造的装置可以具有小尺寸，例如， 并且能够处理高功率电平，可能高达20dBm，低插入损耗约为3dB。
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公开(公告)号：US08810108B2
公开(公告)日：2014-08-19
申请号：US13228593
申请日：2011-09-09
CPC分类号： H03H9/175 , H03H9/02062 , H03H9/13
摘要： The various embodiments of the present disclosure relate generally bulk-acoustic-wave resonators. An exemplary embodiment of the present invention provides a bulk-acoustic-wave resonator comprising an acoustic reflector, a substantially c-axis oriented hexagonal crystal structure, and a plurality of electrodes. The crystal structure is solidly-mounted to the acoustic reflector. The bulk-wave resonator resonates in at least two non-harmonically-related operational modes.
摘要翻译： 本公开的各种实施例一般涉及体声波谐振器。 本发明的一个示例性实施例提供一种包括声反射器，基本上c轴取向的六方晶体结构和多个电极的体声波谐振器。 晶体结构牢固地安装在声反射体上。 体波谐振器以至少两个非谐波相关的工作模式谐振。
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公开(公告)号：US09473106B2
公开(公告)日：2016-10-18
申请号：US13530029
申请日：2012-06-21
申请人： Adam Wathen , William Hunt , Farasat Munir , Kyle Spencer Davis , James Geoffrey Maloney , Ryan Sloan Westafer
发明人： Adam Wathen , William Hunt , Farasat Munir , Kyle Spencer Davis , James Geoffrey Maloney , Ryan Sloan Westafer
CPC分类号： H03H9/30
摘要： A thin-film bulk acoustic wave delay line device providing true-time delays and a method of fabricating same. An exemplary device can comprise several thin-film layers including thin-film transducer layers, thin-film delay layers, and stacks of additional thin-film materials providing acoustic reflectors and matching networks. The layer material selection and layer thicknesses can be controlled to improve impedance matching between transducers and the various delay line materials. For example, the transducer layers and delay layers can comprise piezoelectric and amorphous forms of the same material. The layers can be deposited on a carrier substrate using standard techniques. The device can be configured so that mechanical waves propagate solely within the thin films, providing a substrate-independent device. The device, so constructed, can be of a small size, e.g. 40 μm per side, and capable of handling high power levels, potentially up to 20 dBm, with low insertion loss of approximately 3 dB.
摘要翻译： 提供真实时间延迟的薄膜体声波延迟线装置及其制造方法。 示例性装置可以包括几个薄膜层，包括薄膜换能器层，薄膜延迟层和提供声反射器和匹配网络的附加薄膜材料的叠层。 可以控制层材料选择和层厚度，以改善换能器和各种延迟线材料之间的阻抗匹配。 例如，换能器层和延迟层可以包括相同材料的压电和无定形形式。 可以使用标准技术将这些层沉积在载体衬底上。 该器件可以被配置为使得机械波仅在薄膜内传播，从而提供与衬底无关的器件。 如此构造的装置可以具有小尺寸，例如， 并且能够处理高功率水平，潜在地高达20dBm，低插入损耗约为3dB。
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