公开(公告)号：US07048434B2

公开(公告)日：2006-05-23

申请号：US10247048

申请日：2002-09-17

申请人： Alex Tregub ,  Mansour Moinpour ,  David Fryer

发明人： Alex Tregub ,  Mansour Moinpour ,  David Fryer

IPC分类号： G01N25/20

CPC分类号： G01N25/4846

摘要： Thermally analysis of layers and multiple layer structures used in the semiconductor processing arts is disclosed. A modulated calorimetric analysis may be used to determine a thermal signature that characterizes the chemical properties of a sample of material. The signature may include one or more thermal properties such as heat capacities. The signature may be used to compare and infer the suitability of a material for use in an integrated circuit manufacturing process. A thermal signature for a material that is not known to be suitable for manufacturing integrated circuits may be compared with a thermal signature for a standard material that is known to be suitable in order to determine whether the aforementioned material is suitable. Multiple layer structures may also be analyzed, compared, and inferred, and approaches for determining thermal signatures for any individual layer of the multiple layer structure are disclosed.

摘要翻译： 公开了半导体加工领域中使用的层和多层结构的热分析。 可以使用调制的量热分析来确定表征材料样品的化学性质的热特征。 签名可以包括一个或多个热性质，例如热容量。 签名可用于比较和推断用于集成电路制造过程中的材料的适用性。 可以将不知道适合于制造集成电路的材料的热学特征与已知适合于确定上述材料是否合适的标准材料的热学特征进行比较。 还可以分析，比较和推断多层结构，并且公开了用于确定多层结构的任何单独层的热特征的方法。

公开(公告)号：US07763395B2

公开(公告)日：2010-07-27

申请号：US10611070

申请日：2003-06-30

申请人： Alexander (Alex) Tregub ,  Florence Eschbach ,  James Powers ,  Fu-Chang Lo

发明人： Alexander (Alex) Tregub ,  Florence Eschbach ,  James Powers ,  Fu-Chang Lo

IPC分类号： G03F1/00 ,  G03B27/42

CPC分类号： G03F1/62

摘要： An embodiment of the present invention includes a technique to improve stability of a pellicle. The pellicle is pre-baked at a predetermined temperature substantially below a glass transition temperature. The pre-baked pellicle is purged with an inert gas. The purged pellicle is radiated by a radiation at a wavelength. In another embodiment, a chamber is sealed with a pellicle membrane which divides the chamber into first and second compartments. The chamber has an inflow opening in the first compartment and an outflow opening in the second compartment. A gas is injected into the inflow opening and penetrates the pellicle membrane to the outflow opening. In another embodiment, the chamber has first inflow and outflow openings and second inflow and outflow openings in the first and second compartments, respectively. A first gas is injected into the first inflow opening and a second gas into the second inflow opening. The first and second gases have a permeability difference. The first gas penetrates the pellicle membrane to the second outflow opening.

摘要翻译： 本发明的一个实施例包括提高防护薄膜的稳定性的技术。 防护薄膜组件在基本上低于玻璃化转变温度的预定温度下预烘烤。 预烘烤的防护薄膜组件用惰性气体吹扫。 被吹扫的防护薄膜组件以波长的辐射辐射。 在另一个实施例中，用隔热膜密封腔室，隔膜膜将腔室分成第一和第二隔室。 所述腔室在第一隔室中具有流入开口，并且在第二隔室中具有流出开口。 将气体注入到流入口中并将防护薄膜穿透到流出口。 在另一个实施例中，腔室分别具有第一和第二隔室中的第一流入口和第二流入口和第二流入口。 将第一气体注入第一流入口，将第二气体注入第二流入口。 第一和第二气体具有渗透率差异。 第一气体将防护薄膜穿入第二流出口。