公开(公告)号：US20070155071A1

公开(公告)日：2007-07-05

申请号：US11545078

申请日：2006-10-06

申请人： Winston Chan ,  Alfred Ulmer

发明人： Winston Chan ,  Alfred Ulmer

IPC分类号： H01L21/84 ,  H01L21/00

CPC分类号： G02B6/12002 ,  G02B6/132 ,  G02B6/136 ,  G02B2006/12173 ,  G02B2006/12195

摘要： A system and method for preparing a stepped substrate and an apparatus are disclosed. The method comprises depositing photoresist on a stepped substrate, removing a first portion of the photoresist, reflowing the remaining portion of the photoresist; and etching a portion of the reflowed remaining photoresist and a portion of the stepped substrate. The apparatus comprises a deposited photoresist layer on a stepped substrate, wherein a portion of the photoresist is removed, a reflowed portion of the remaining photoresist, an etched portion of the reflowed photoresist, and an etched portion of the stepped substrate. The system for preparing a stepped substrate comprises a first processing tool for depositing at a portion of photoresist on the stepped substrate, a second processing tool for removing at least a first portion of the photoresist, a third processing tool for reflowing at least a portion of the remaining portion of the photoresist, and a fourth processing tool for etching a portion of the reflowed photoresist and a portion of the stepped substrate.

摘要翻译： 公开了一种用于制备阶梯式衬底和装置的系统和方法。 该方法包括在阶梯状衬底上沉积光致抗蚀剂，去除光致抗蚀剂的第一部分，回流光致抗蚀剂的剩余部分; 并且蚀刻回流的剩余光致抗蚀剂的一部分和阶梯式衬底的一部分。 该装置包括在阶梯式衬底上的沉积的光致抗蚀剂层，其中去除一部分光致抗蚀剂，剩余光致抗蚀剂的回流部分，回流光致抗蚀剂的蚀刻部分和阶梯式衬底的蚀刻部分。 用于制备阶梯式衬底的系统包括用于在阶梯式衬底上的光致抗蚀剂的一部分上沉积的第一处理工具，用于去除光致抗蚀剂的至少第一部分的第二处理工具，用于回流至少部分光刻胶的第三处理工具 光刻胶的剩余部分和用于蚀刻回流光致抗蚀剂的一部分和阶梯状衬底的一部分的第四处理工具。

公开(公告)号：US20060022761A1

公开(公告)日：2006-02-02

申请号：US11183561

申请日：2005-07-18

申请人： Joseph Abeles ,  Alan Braun ,  Winston Chan ,  Martin Kwakernaak ,  Steven Lipp ,  Alfred Ulmer

发明人： Joseph Abeles ,  Alan Braun ,  Winston Chan ,  Martin Kwakernaak ,  Steven Lipp ,  Alfred Ulmer

IPC分类号： H01S1/06

CPC分类号： G04F5/14

摘要： A clock including: a portable, at least partially evacuated housing; a cell being positioned within the housing and including an internal cavity having interior dimensions each less than about 1 millimeter, an intra-cavity pressure of at least about 760 Torr, and containing a metal atomic vapor; an electrical to optical energy converter being positioned within the housing to emit light through the metal atomic vapor; an optical energy intensity detector being positioned within the housing to receive the light emitted by the converter through the metal atomic vapor; at least one conductive winding around the cavity to stabilize the magnetic field experienced in the cavity dependently upon the detector; and, an output to provide a signal from the housing dependently upon the detector detecting the light emitted by the converter through the metal atomic vapor.

摘要翻译： 时钟包括：便携式，至少部分撤离的房屋; 细胞位于所述壳体内并且包括具有小于约1毫米的内部尺寸，至少约760托的腔内压力并且包含金属原子蒸汽的内部空腔; 电 - 光能转换器位于壳体内以通过金属原子蒸气发光; 光能量强度检测器定位在壳体内以接收由转换器通过金属原子蒸汽发射的光; 围绕腔体的至少一个导电绕组，以依赖于检测器来稳定腔体中经历的磁场; 以及输出，用于根据检测器检测由转换器通过金属原子蒸气发射的光来提供来自壳体的信号。