公开(公告)号：US09347616B2

公开(公告)日：2016-05-24

申请号：US14119402

申请日：2012-05-24

申请人： Richard D. Chism ,  Andy Krell

发明人： Richard D. Chism ,  Andy Krell

IPC分类号： F16K27/00 ,  F17D1/04 ,  H01L21/67 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  F17C13/04

CPC分类号： F17C13/04 ,  C23C14/48 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/4482 ,  C23C16/45561 ,  F17C2205/0335 ,  F17D1/04 ,  G03F7/70 ,  H01L21/67017 ,  Y10T137/0318 ,  Y10T137/877

摘要： A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

摘要翻译： 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。

公开(公告)号：US20140083512A1

公开(公告)日：2014-03-27

申请号：US14119402

申请日：2012-05-24

申请人： Richard D. Chism ,  Andy Krell

发明人： Richard D. Chism ,  Andy Krell

IPC分类号： F17D1/04

CPC分类号： F17C13/04 ,  C23C14/48 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/4482 ,  C23C16/45561 ,  F17C2205/0335 ,  F17D1/04 ,  G03F7/70 ,  H01L21/67017 ,  Y10T137/0318 ,  Y10T137/877

摘要： A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

摘要翻译： 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。