公开(公告)号：US5642978A

公开(公告)日：1997-07-01

申请号：US656698

申请日：1996-06-03

申请人： Berndt Lahne ,  Klaus Schultz ,  Werner Scheler ,  Michael Heitmann ,  Axel Gaglin

发明人： Berndt Lahne ,  Klaus Schultz ,  Werner Scheler ,  Michael Heitmann ,  Axel Gaglin

IPC分类号： H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67265 ,  H01L21/67017 ,  H01L21/67766 ,  Y10S414/137

摘要： A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.

摘要翻译： 在本地洁净室的处理平面中处理盘状物体的装置的目的是确保在使用SMIF的局部洁净室的条件下对盘状物体进行处理和检查之前或之后的处理步骤 盒子 处理平面（HH）与至少一个装置的参考平面（EE）处于固定的结构关系，该装置包括作为组成部分的盒式座椅，该装置用于对包含在其中的杂志和盘形物体的架子进行索引， 被布置在将洁净室分成两个彼此上下的局部空间的中间基座的上方，其中空气流的空气流分量从中间基座上方的部分空间引导到中间基座下方的部分空间。 该器件可用于集成电路的制造，特别是用于处理任务。