公开(公告)号：US5807062A

公开(公告)日：1998-09-15

申请号：US663487

申请日：1996-06-13

申请人： Klaus Schultz ,  Harald Beckert ,  Berndt Lahne ,  Manfred Heinze

发明人： Klaus Schultz ,  Harald Beckert ,  Berndt Lahne ,  Manfred Heinze

IPC分类号： B65G1/00 ,  H01L21/00 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67161 ,  H01L21/67196 ,  H01L21/67766 ,  Y10S414/141

摘要： An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure under SMIF conditions. The arrangement has at least one indexing device for supplying and accepting the objects at a supplying and accepting location situated in a handling plane and at least one transporting device for transporting the wafer-shaped objects between the supplying and accepting location and a work station. The work station, together with at least one other work station, is arranged substantially coaxially to a central point through which passes a rotational axis of a changer. The arrangement is applicable in the manufacture of integrated circuits.

摘要翻译： 用于处理晶圆形物体的装置是确保高度的定位精度，提高生产率，自由选择的传送路径以及SMIF条件下的低机械性能。 该装置具有至少一个用于在位于处理平面中的供应和接受位置处供应和接收物体的分度装置，以及用于在供应和接受位置与工作站之间输送晶片形物体的至少一个输送装置。 工作站与至少一个其他工作站一起大致同轴地布置在通过更换器的旋转轴线的中心点处。 该装置适用于集成电路的制造。

公开(公告)号：US06641348B1

公开(公告)日：2003-11-04

申请号：US09184561

申请日：1998-11-02

申请人： Klaus Schultz ,  Alfred Schulz ,  Marlies Mages

发明人： Klaus Schultz ,  Alfred Schulz ,  Marlies Mages

IPC分类号： B65G4907

CPC分类号： H01L21/67775 ,  Y10S414/135

摘要： A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.

摘要翻译： 一种用于在装载和卸载端口处连接容器的装置具有用于容纳容器的水平位移平台，其目的是以简单的方式增加对故障操作和故障加载的保护，同时保证技术洁净室的要求，而不限制平台的清晰空间 。 为平台上方的预期区域提供用于检测容器的存在和用于区分具有不同内容物的容器的装置。 该设备用于在要在集装箱中运输的物体的加工或加工站的加载和卸载，特别是用于集成电路的制造过程中的物体。

公开(公告)号：US06419439B2

公开(公告)日：2002-07-16

申请号：US08687643

申请日：1996-07-26

申请人： Volker Schlehahn ,  Klaus Schultz

发明人： Volker Schlehahn ,  Klaus Schultz

IPC分类号： H01J4014

CPC分类号： H01L21/67265 ,  H01L21/67778 ,  Y10S414/113

摘要： An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks.

摘要翻译： 一种杂志的杂志架架索引器和包含在其中的晶片形物体的索引器的目标是确保在任何期望的和可预定的杂志平台上准确地访问，也可以是仅在一个移除和充电侧设置有开口的杂志，借助于 一种多用途索引，其中可以区分各种标准化的杂志和晶片格式。 杂志架和晶片形物体由光电传感器装置检测，光电传感器装置的至少一部分设计为测距系统。 分度器适用于集成电路的制造，特别是用于处理半导体和掩模形式的晶圆形物体。

公开(公告)号：US5642978A

公开(公告)日：1997-07-01

申请号：US656698

申请日：1996-06-03

申请人： Berndt Lahne ,  Klaus Schultz ,  Werner Scheler ,  Michael Heitmann ,  Axel Gaglin

发明人： Berndt Lahne ,  Klaus Schultz ,  Werner Scheler ,  Michael Heitmann ,  Axel Gaglin

IPC分类号： H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67265 ,  H01L21/67017 ,  H01L21/67766 ,  Y10S414/137

摘要： A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.

摘要翻译： 在本地洁净室的处理平面中处理盘状物体的装置的目的是确保在使用SMIF的局部洁净室的条件下对盘状物体进行处理和检查之前或之后的处理步骤 盒子 处理平面（HH）与至少一个装置的参考平面（EE）处于固定的结构关系，该装置包括作为组成部分的盒式座椅，该装置用于对包含在其中的杂志和盘形物体的架子进行索引， 被布置在将洁净室分成两个彼此上下的局部空间的中间基座的上方，其中空气流的空气流分量从中间基座上方的部分空间引导到中间基座下方的部分空间。 该器件可用于集成电路的制造，特别是用于处理任务。

公开(公告)号：US4583847A

公开(公告)日：1986-04-22

申请号：US631388

申请日：1984-07-16

申请人： Udo Battig ,  Peter Dittrich ,  Norbert Oertel ,  Gunter Osterland ,  Mathias Rucknagel ,  Werner Scheler ,  Klaus Schultz

发明人： Udo Battig ,  Peter Dittrich ,  Norbert Oertel ,  Gunter Osterland ,  Mathias Rucknagel ,  Werner Scheler ,  Klaus Schultz

IPC分类号： G01B9/00 ,  G01B5/00 ,  G01B11/00 ,  H01L21/68 ,  H01L21/683 ,  G03B27/42

CPC分类号： H01L21/6838 ,  G01B11/002 ,  G01B5/0004 ,  G03F7/70716 ,  G03F7/70775 ,  H01L21/681

摘要： The invention relates to an improvement for a wafer mounting table particularly for use in photolithographic apparatus for processing wafers comprising a compact mounting block made of glass-ceramics which has two neighboring back supports limiting two sides of a top face of said mounting block. The top face is provided with at least three studs for supporting a wafer to be processed. The sides of the back-supports facing away from said top face are provided with an elongated horizontally extending silvered area each, which is in opposition to a laser path measuring system each. The laser beams of said laser path measuring system define a plane which coincides with a projection plane of a projection lens being provided in opposition to a wafer mounted on said studs. Means are provided for substantially eliminating departures of the silvered areas from a straight plane. Further means are provided which enable a quick adaption of the laser mount for wafer charges having different thicknesses or diameters.

摘要翻译： 本发明涉及一种用于晶片安装台的改进，其特别适用于用于处理晶片的光刻设备，其包括由玻璃陶瓷制成的紧凑型安装块，其具有限制所述安装块的顶面的两侧的两个相邻的后支撑。 顶面设置有至少三个支柱，用于支撑待加工的晶片。 背面支撑物背离所述顶面的侧面设置有细长的水平延伸的镀银区域，每个都与激光路径测量系统相对立。 所述激光路径测量系统的激光束限定了与投影透镜的投影平面重合的平面，所述投影平面与安装在所述螺柱上的晶片相对。 提供了用于基本上消除镀银区域从直线平面偏离的装置。 提供了进一步的装置，其能够快速适应具有不同厚度或直径的晶片电荷的激光装置。

公开(公告)号：US06736582B1

公开(公告)日：2004-05-18

申请号：US09958504

申请日：2001-10-09

申请人： Andreas Mages ,  Andreas Birkner ,  Alfred Schulz ,  Klaus Schultz

发明人： Andreas Mages ,  Andreas Birkner ,  Alfred Schulz ,  Klaus Schultz

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/139 ,  Y10S414/14

摘要： In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part. The inner part is flushed with an air flow coming from the clean room in the region of each level. The device is used for loading and unloading of clean rooms with objects that are transported in a container.

摘要翻译： 在用于操纵用于装载和卸载洁净室的物体的装置中，问题在于降低调整装置和空调的硬件费用，同时保持符合人体工程学的益处并进一步改善装置中的洁净室条件。 该装置包括壳体（2）的固定外部部分（3）以及可从其延伸伸缩的内部部分（4）和在内部部分（4）的顶部区域中的容器元件（11）。 为了使内部部件伸缩，并且为了将插座元件降低到内部部件中，设置有公共导轨（16）和公共驱动器（20）。 连接到驱动器的插座元件通过垂直向上移动与内部部件的驱动器接合，用于内部部件的伸缩延伸，并且在达到内部部件被固定的入口水平面（E2，E2）之后，可以是 内部下降。 内部部分用来自每层的洁净室的气流冲洗。 该装置用于装载和卸载在容器中运输的物体的洁净室。

公开(公告)号：US06211514B1

公开(公告)日：2001-04-03

申请号：US08918860

申请日：1997-08-26

申请人： Klaus Schultz ,  Sebastian Kaden

发明人： Klaus Schultz ,  Sebastian Kaden

IPC分类号： H01J4014

CPC分类号： H01L21/681 ,  Y10S414/137

摘要： A device and method for the sensing of wafer-shaped objects and shelves in a container is disclosed. The device and method function to increase the reliability of detection in containers which are open on one side as well as in containers which are open on two sides, and to detect whether a shelf is occupied by more than one object, to detect oblique positions of the objects along several shelves and the position of the shelves themselves independent from dimensional tolerances without impeding the handling of either the wafer-shaped objects or the container and without interfering with clean room conditions. Radiation from a radiation source which is reflected at the front sides of the objects and at the shelves is directed to optoelectronic sensor elements for recording an image by an imaging optical device. The recording of every image is adapted to the reflectance ratios at the front sides which contribute to the imaging. The device and method is applicable in the manufacture of integrated circuits.

摘要翻译： 公开了一种用于感测容器中的晶片状物体和搁板的装置和方法。 该装置和方法的功能是提高在一侧敞开的容器中以及在两侧敞开的容器中的检测的可靠性，并且检测货架是否被多于一个物体占据，以检测斜坡位置 沿着几个搁架的物体和搁板本身的位置，与尺寸公差无关，而不会妨碍晶片形物体或容器的处理，而不会干扰洁净室条件。 在物体的前侧和在货架上反射的辐射源的辐射被引导到用于通过成像光学装置记录图像的光电传感器元件。 每个图像的记录适应于有助于成像的前侧的反射率比。 该装置和方法适用于集成电路的制造。

公开(公告)号：US5605428A

公开(公告)日：1997-02-25

申请号：US331523

申请日：1994-11-03

申请人： Andreas Birkner ,  Berndt Lahne ,  Klaus Schultz

发明人： Andreas Birkner ,  Berndt Lahne ,  Klaus Schultz

IPC分类号： G01B11/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/67 ,  H01L23/544 ,  H01J40/14

CPC分类号： H01L21/67265 ,  H01L23/544 ,  H01L2223/54453 ,  H01L2924/0002 ,  Y10S414/137

摘要： A device for indexing magazine compartments of a magazine and wafer-shaped objects contained therein to ensure precise access of the removing and charging device in any given predetermined plane of the magazine regardless of dimensional tolerances. An optoelectronic sensor having a transmitter and receiver emits a bundle of measurement rays to detect the position of the wafer-shaped objects as well as the position of the magazine compartments relative to a reference plane whose location is rigidly defined by design with respect to a first handling plane for removing and charging. The magazine is adjustable vertically in a measurable manner for removal and charging by a magazine seat via a magazine lift. The device is applicable in the manufacture of integrated circuits, in particular for handling wafer-shaped objects.

摘要翻译： PCT No.PCT / EP94 / 00620 Sec。 371日期：1994年11月3日 102（e）日期1994年11月3日PCT 1993年3月3日PCT公布。 第WO94 / 20979号公报 日期1994年9月15日一种用于将杂志的杂志室和其中包含的晶片状物体分度的装置，用于确保移除和充电装置在任何给定的预定平面上的精确访问，而与尺寸公差无关。 具有发射器和接收器的光电传感器发射一束测量光线以检测晶片形物体的位置以及相对于参考平面的刀库隔间的位置，该参考平面的位置相对于第一 搬运平面，用于拆卸和充电。 杂志可以以​​可测量的方式垂直调节，以便通过杂志升降机由杂志座移除和充电。 该器件适用于集成电路的制造，特别是用于处理晶片状物体。

公开(公告)号：US08281368B2

公开(公告)日：2012-10-02

申请号：US12038815

申请日：2008-02-28

申请人： Raghavendra Malpani ,  Cristian Ilac ,  Tanmoy Dutta ,  Klaus Schultz

发明人： Raghavendra Malpani ,  Cristian Ilac ,  Tanmoy Dutta ,  Klaus Schultz

IPC分类号： G06F7/04 ,  G06F15/16 ,  G06F17/30 ,  H04L29/06

CPC分类号： G06F21/556

摘要： A secure (e.g., HTTPS) connection is established between a client and a server. Communication over the connection may utilize an application (e.g., a Web browser) that is not part of the client's trusted computing base. A password is sent from the client to the server over the connection such that the clear text password is unavailable to the application. For example, the password can be encrypted and inserted directly into the HTTPS stream from the client's trusted computing base.

摘要翻译： 在客户端和服务器之间建立安全（例如HTTPS）连接。 通过连接的通信可以利用不是客户机的可信计算基础的一部分的应用（例如，Web浏览器）。 密码通过连接从客户端发送到服务器，使得明文密码对应用程序不可用。 例如，密码可以被加密并直接从客户端的可信计算基础插入到HTTPS流中。

公开(公告)号：US07109509B2

公开(公告)日：2006-09-19

申请号：US10692047

申请日：2003-10-23

申请人： Ulysses Gilchrist ,  Louise S. Barriss ,  Hagen Raue ,  Berndt Lahne ,  Manfred Heinze ,  Joachim König ,  Klaus Schultz

发明人： Ulysses Gilchrist ,  Louise S. Barriss ,  Hagen Raue ,  Berndt Lahne ,  Manfred Heinze ,  Joachim König ,  Klaus Schultz

IPC分类号： G01N21/00 ,  G01V8/12

CPC分类号： H01L21/67265 ,  H01L21/67259 ,  H01L21/681 ,  Y10S414/137

摘要： For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation.A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.

摘要翻译： 对于用于检测堆叠在壁元件的开口处的基板的装置，存在构造检测装置的问题，使得能够相对于基板的过程更灵活地执行基板的位置的检测 测量和使用的测量方法以及传感器系统对待检测的半导体衬底的限定方法被确保在具有降低的颗粒产生风险的测量的确定位置。 发送和接收装置（11）由安装在壁元件（1）上的垂直驱动机构（10）和传感器头（13）组成，该传感器头可通过垂直驱动机构在下位和上位之间进行调节 （10），所述传感器头被布置成在垂直驱动机构（10）上枢转，以便枢转到所述开口（4）中。 该装置特别适用于半导体工业，用于记录具有诸如半导体晶片，平板显示器或掩模的基板的盒或容器的占有状态。