公开(公告)号：US07069101B1

公开(公告)日：2006-06-27

申请号：US09363966

申请日：1999-07-29

申请人： John F. Arackaparambil ,  Tom Chi ,  Billy Chow ,  Patrick M. D'Souza ,  Parris Hawkins ,  Charles Huang ,  Jett Jensen ,  Badri N. Krishnamurthy ,  Pradeep M. Kulkarni ,  Prakash M. Kulkarni ,  Wen Fong Lin ,  Shantha Mohan ,  Bishnu Nandy ,  Huey-Shin Yuan

发明人： John F. Arackaparambil ,  Tom Chi ,  Billy Chow ,  Patrick M. D'Souza ,  Parris Hawkins ,  Charles Huang ,  Jett Jensen ,  Badri N. Krishnamurthy ,  Pradeep M. Kulkarni ,  Prakash M. Kulkarni ,  Wen Fong Lin ,  Shantha Mohan ,  Bishnu Nandy ,  Huey-Shin Yuan

IPC分类号： G06F19/00

CPC分类号： G05B19/41845 ,  G05B2219/31018 ,  G05B2219/31202 ,  G05B2219/45026 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/26 ,  Y02P90/86

摘要： The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

摘要翻译： 本发明提供了一种新颖的分布式工厂系统框架，其包括具有SW开发和集成（210），安装和管理（220），工厂建模（230），制造计划（240）， 制造控制，监控和跟踪（250）和制造结果分析（260）。 工厂生命周期包括框架组件。 分布式工厂系统框架还包括应用程序组件和软件构建块。 框架组件适用于管理应用组件，而应用组件被用于提供用于管理诸如晶圆厂之类的过程的指令。 构建块适用于形成或修改框架和应用程序组件。 分布式工厂系统框架提供计算机实现的整合处理系统的方法，并促进过程和设备更改。

公开(公告)号：US07174230B2

公开(公告)日：2007-02-06

申请号：US10084092

申请日：2002-02-28

申请人： John F. Arackaparambil ,  Tom Chi ,  Billy Chow ,  Patrick M. D'Souza ,  Parris Hawkins ,  Charles Huang ,  Jett Jensen ,  Badri N. Krishnamurthy ,  Pradeep M. Kulkarni ,  Prakash M. Kulkarni ,  Wen Fong Lin ,  Shantha Mohan ,  Bishnu Nandy ,  Huey-Shin Yuan

发明人： John F. Arackaparambil ,  Tom Chi ,  Billy Chow ,  Patrick M. D'Souza ,  Parris Hawkins ,  Charles Huang ,  Jett Jensen ,  Badri N. Krishnamurthy ,  Pradeep M. Kulkarni ,  Prakash M. Kulkarni ,  Wen Fong Lin ,  Shantha Mohan ,  Bishnu Nandy ,  Huey-Shin Yuan

IPC分类号： G06F19/00

CPC分类号： G05B19/41845 ,  G05B2219/31018 ,  G05B2219/31202 ,  G05B2219/45026 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/26 ,  Y02P90/86

摘要： The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

摘要翻译： 本发明提供了一种新颖的分布式工厂系统框架，其包括具有SW开发和集成（210），安装和管理（220），工厂建模（230），制造计划（240）， 制造控制，监控和跟踪（250）和制造结果分析（260）。 工厂生命周期包括框架组件。 分布式工厂系统框架还包括应用程序组件和构建块。 框架组件适于用于管理应用组件，同时使用应用组件来提供用于管理诸如晶圆厂的过程的指令。 构建块适用于形成或修改框架和应用程序组件。 分布式工厂系统框架提供计算机实现的整合处理系统的方法，并促进过程和设备更改。

公开(公告)号：US06984198B2

公开(公告)日：2006-01-10

申请号：US09928474

申请日：2001-08-14

申请人： Badri N. Krishnamurthy ,  Parris C. M. Hawkins

发明人： Badri N. Krishnamurthy ,  Parris C. M. Hawkins

IPC分类号： G01R31/26

CPC分类号： G05B19/41875 ,  G05B15/02 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/22

摘要： Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An “experiment” may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment.A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.